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2. 发明申请

WO1994001354A1 MAGNETICALLY LEVITATED CARRYING APPARATUS 审中-公开
标题翻译： MAGNETICALLY LEVIDATED携带装置
公开(公告)号：WO1994001354A1
公开(公告)日：1994-01-20
申请号：PCT/JP1993000930
申请日：1993-07-06
申请人： EBARA CORPORATION , MORI, Satoshi , MATSUMURA, Masao , KANEMITSU, Yoichi , YOSHIOKA, Takeshi , KAJIYAMA, Masaaki , KONDO, Fumio , SHIRAO, Yuji , EGUCHI, Masato , SHINOZAKI, Hiroyuki , IKEDA, Yukio , HIROSE, Masayoshi , NAKANIWA, Masaru , KIMURA, Norio , USUI, Katsuaki , AOKI, Katsuyuki
发明人： EBARA CORPORATION
IPC分类号： B65G54/02
CPC分类号： H01L21/67167 , C23C14/042 , H01L21/67184 , H01L21/67709 , H01L21/67736
摘要： In a tunnel which is kept in a high-vacuum or filled with a highly clean atmosphere, a carrying truck (3) is moved by an electromagnetic levitation system. Electromagnets (4) for electromagnetically levitate the carrying truck (3) which travels in the tunnel (1) in a noncontact way and carries semiconductor waters, electromagnets (6) constituting a linear motor for driving the carrying truck (3), and displacement sensors (8) for sensing the levitation quantity of the carrying truck (3) in the tunnel (1) are provided outside the tunnel (1). Thereby, gases are not produced and the semiconductor wafers (22) are not contaminated. Also, when the carrying truck (3) changes the traveling direction by 90 at a branch part where two tracks intersect at right angles in the tunnel (1), the electromagnets (4) are provided in parallel with the respective tracks and are so controlled that the excitation levels of the electromagnets (4) are changed gradually. Thereby, the traveling direction of the carrying truck (3) can be changed smoothly without contact of the truck with the inner wall of the tunnel (1) and the semiconductor wafers (22) are prevented from being damaged by collisions, etc.
摘要翻译：在保持在高真空或充满高度清洁的气氛的隧道中，搬运车（3）由电磁悬浮系统移动。电磁体（4）用于以非接触方式电磁悬浮在隧道（1）内运送的运载车（3），并承载半导体水，构成用于驱动运载车（3）的线性电动机的电磁体（6）和位移传感器在隧道（1）外部设置用于感测在隧道（1）中的运载车辆（3）的悬浮量的传感器（8）。由此，不产生气体，半导体晶片（22）不被污染。此外，当搬运车（3）在隧道（1）中两条轨道以直角相交的分支部分将行驶方向改变90°时，电磁体（4）设置成与各轨迹平行并被控制电磁铁（4）的激发电平逐渐变化。因此，可以平稳地改变搬运车（3）的行进方向，而不会使卡车与隧道（1）的内壁接触，并且防止半导体晶片（22）被碰撞等损坏。

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