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    • 5. 发明申请
    • PLASMA PROCESSING APPARATUS
    • 等离子体加工设备
    • WO2013024235A1
    • 2013-02-21
    • PCT/GB2011/051548
    • 2011-08-16
    • P2I LTDKING, Charles Edmund
    • KING, Charles Edmund
    • H01J37/32C23C16/509
    • H01J37/32082H01J37/32165H01J37/32376H01J2237/3323H01J2237/3325
    • The present invention relates to an apparatus (10) for plasma processing an article(12), the apparatus comprisingra chamber(14) for receiving an article to be processed; electrode means (16) for generating an electricand/or magneticfield in said chamberwhen energised by alternating electrical energyfor establishing a plasma in said chamber so that said article can be processed; andvarying frequency generatingmeans (20) for generating alternating electrical energy for transmission tothe electrode means, said alternating electrical energy being generated at a plurality of different frequencies in succession, one frequency after another frequency, thereby producing a succession of standing waves in said chamber of a plurality of different wavelengths.
    • 本发明涉及一种用于等离子体处理物品(12)的设备(10),该设备包括用于接收待处理物品的室(14) 电极装置(16),用于当通过交替的电能激发时在所述室中产生电和/或磁场,以在所述室中建立等离子体,使得可以处理所述制品; 和用于产生用于传输到电极装置的交替电能的变化频率产生装置(20),所述交替电能以多个不同的频率连续产生,一个频率再次频率,从而在所述腔室中产生一系列驻波 多个不同的波长。
    • 8. 发明申请
    • PLASMA DEPOSITION APPARATUS
    • 等离子体沉积装置
    • WO2009010753A2
    • 2009-01-22
    • PCT/GB2008/002440
    • 2008-07-17
    • P2I LIMITEDCOULSON, Stephen, RichardKING, Charles, Edmund
    • COULSON, Stephen, RichardKING, Charles, Edmund
    • B05D7/24
    • H01J37/32449B05D1/62C23C16/4412C23C16/507C23C16/54Y10T428/31504
    • Apparatus (10) for coating a surface of an article (14) with a thin film polymer layer by plasma deposition, the apparatus comprising: a plurality of processing chambers (12a, 12b, 12c....12n) into each of which one or more articles can be placed; means (18, 19, 20, 21, 22) for supplying an active species to said processing chambers for forming a plasma in said chambers; a plurality of induction means (24) associated with respective processing chambers, each induction means being operable to induce an electrical field internally of an associated processing chamber for forming a plasma when said active species is supplied thereto so that a surface of said article can be coated with a thin film polymer layer by plasma deposition; means (26) for providing a time varying electric current in the induction means; and pressure control means (28) for selectively controlling pressure in said processing chambers such that pressure in any one or more of said chambers can be controlled independently of pressure in other of said chambers.
    • 用于通过等离子体沉积用薄膜聚合物层涂覆物品(14)的表面的设备(10),所述设备包括:多个处理室(12a,12b,12c ... 12n),其中每个处理室 或更多的物品可以放置; 用于向所述处理室供应活性物质以在所述室中形成等离子体的装置(18,19,20,21,22); 多个与相应处理室相关联的感应装置(24),每个感应装置可操作以在所述活性物质被供应时在相关联的处理室的内部感应电场,以形成等离子体,使得所述制品的表面可以 通过等离子体沉积涂覆薄膜聚合物层; 用于在感应装置中提供时变电流的装置(26); 以及用于选择性地控制所述处理室中的压力的​​压力控制装置(28),使得可以独立于所述其它室中的压力来控制任何一个或多个所述室中的压力。
    • 10. 发明申请
    • VACUUM PROCESSING APPARATUS
    • 真空处理装置
    • WO2010046636A2
    • 2010-04-29
    • PCT/GB2009002499
    • 2009-10-19
    • P2I LTDKING CHARLES EDMUND
    • KING CHARLES EDMUND
    • C23C14/56A43B1/00B01J3/00H01J37/32
    • C23C14/566A43B7/12A43D95/06A43D95/10Y10T137/86083
    • The present invention relates to an apparatus (10) for vacuum processing articles (12). The apparatus comprises a processing region (14) in which articles can be vacuum processed at a processing pressure and a loading region (18) into which articles can be loaded into the apparatus at ambient pressure. A plurality of article carriers (20) are provided for carrying articles from the loading region to the processing region along an enclosed passage (24) so that articles can be vacuum processed. The carriers (20) comprise respective sealing means (26) for sealing against an inner surface of the passage when carrying articles along the passage. The sealing means (26) resist the flow of gas or vapour past the sealing means along the passage from the loading region to the processing region so that articles loaded at ambient pressure in the loading region and carried to the processing region can be vacuum processed at processing pressure.
    • 本发明涉及一种用于真空处理物品(12)的设备(10)。 该设备包括处理区域(14)和装载区域(18),物品可以在处理压力下被真空处理,装载区域(18)中的物品可以在环境压力下被装载到装置中。 提供了多个物品载体(20),用于沿着封闭通道(24)将物品从装载区域运送到处理区域,从而物品可以被真空处理。 载体(20)包括相应的密封装置(26),用于在沿通道运送物品时密封通道的内表面。 密封装置(26)阻止沿着从装载区域到处理区域的通道经过密封装置的气体或蒸汽的流动,从而可以在装载区域中的环境压力下装载并运送到处理区域的物品可以在 处理压力。