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    • 8. 发明申请
    • CERIUM OXIDE POWDER FOR ABRASIVE AND CMP SLURRY COMPRISING THE SAME
    • 用于磨料和CMP浆料的氧化铝粉末包括它
    • WO2008136593A1
    • 2008-11-13
    • PCT/KR2008/002460
    • 2008-04-30
    • LG CHEM, LTD.OH, Myoung-HwanCHO, Seung-BeomNHO, Jun-SeokKIM, Jong-PilKIM, Jang-Yul
    • OH, Myoung-HwanCHO, Seung-BeomNHO, Jun-SeokKIM, Jong-PilKIM, Jang-Yul
    • C01F17/00
    • C01F17/0043C01F17/005C01P2002/72C01P2004/03C01P2004/10C01P2004/20C09K3/1454C09K3/1463
    • Disclosed are cerium oxide powder for an abrasive; CMP slurry including the same; and a shallow trench isolation (STI) process using the CMP slurry. At least two kinds of cerium oxides prepared by using cerium carbonates having different crystal structures are mixed in an appropriate ratio and used as an abrasive for CMP slurry, thereby adjusting required polishing properties of the CMP slurry. Also, in a disclosed method of preparing a cerium carbonate, the crystal structure of the cerium carbonate can be easily controlled. Based on the finding that in a cerium oxide for an abrasive, the kind of improved polishing property depends on the crystal structure of a cerium carbonate, at least one from among polishing properties, such as the polishing rate of a silicon oxide layer, the polishing rate of a silicon nitride layer, the polishing selectivity between the silicon oxide layer and the silicon nitride layer, and WIWNU, can be adjusted by using at least two kinds of cerium oxides selected from the group including ( i ) a cerium oxide prepared by using a lanthanite- (Ce) crystal structured cerium carbonate, (ii) a cerium oxide prepared by using an orthorhombic crystal structured cerium carbonate, and (iii) a cerium oxide prepared by using a hexagonal crystal structured cerium carbonate, as an abrasive for CMP slurry, and adjusting the mixing ratio of the cerium oxides.
    • 公开了用于研磨剂的氧化铈粉末; 包括CMP的CMP浆料; 和使用CMP浆料的浅沟槽隔离(STI)工艺。 通过使用具有不同晶体结构的碳酸铈制备的至少两种氧化铈以适当的比例混合,并用作CMP浆料的研磨剂,从而调节CMP浆料的所需抛光性能。 此外,在公开的碳酸铈的制备方法中,可以容易地控制碳酸铈的晶体结构。 基于在研磨剂的氧化铈中发现,改善的研磨性能的种类取决于碳酸铈的晶体结构,从抛光性能,例如氧化硅层的研磨速度,抛光 氮化硅层的速率,氧化硅层和氮化硅层之间的抛光选择性以及WIWNU可以通过使用选自以下的至少两种氧化铈来调节:(i)通过使用制备的氧化铈 (Ce)晶体结构的碳酸铈,(ii)通过使用正交晶体结构的碳酸铈制备的氧化铈,和(iii)通过使用六方晶结晶的碳酸铈制备的氧化铈作为CMP浆料的研磨剂 ,并调节氧化铈的混合比。
    • 9. 发明申请
    • METHOD FOR PREPARING CERIUM CARBONATE POWDER USING UREA
    • 使用尿素制备碳酸钙粉末的方法
    • WO2008114965A1
    • 2008-09-25
    • PCT/KR2008/001452
    • 2008-03-14
    • LG CHEM, LTD.OH, Myoung-HwanCHO, Seung-BeomNHO, Jun-SeokKIM, Jong-PilKIM, Jang-YulSHIN, Dong-Mok
    • OH, Myoung-HwanCHO, Seung-BeomNHO, Jun-SeokKIM, Jong-PilKIM, Jang-YulSHIN, Dong-Mok
    • C01F17/00
    • C01F17/005C01P2002/72
    • In a method for preparing cerium carbonate powder by mixing a cerium precursor solution with a urea solution and carrying out a precipitation reaction, wherein the cerium carbonate powder has a hexagonal crystal structure, by using at least one type of organic solvent as a solvent for either or both the cerium precursor solution and the urea solution, and adjusting temperature of the precipitation reaction within a range of 120°C to 300°C. Also, the method can yield cerium carbonate powder, cerium oxide powder from the cerium carbonate powder, and CMP slurry including the cerium oxide powder as an abrasive. In the method, urea as a precipitant can improve the uniformity of a reaction, and thus it is possible to easily and inexpensively obtain cerium carbonate powder with a hexagonal crystal structure without the danger by high-temperature high-pressure and the need for an expensive system in hydrothermal synthesis.
    • 在通过将铈前体溶液与尿素溶液混合并进行沉淀反应制备碳酸铈粉末的方法中,其中所述碳酸铈粉末具有六方晶系结构,通过使用至少一种有机溶剂作为溶剂用于任一种 或铈前体溶液和尿素溶液两者,并将沉淀反应的温度调节在120℃至300℃的范围内。 此外,该方法可以产生碳酸铈粉末,来自碳酸铈粉末的氧化铈粉末和包含氧化铈粉末作为研磨剂的CMP浆料。 在该方法中,作为沉淀剂的尿素可以提高反应的均匀性,因此可以容易且廉价地获得六方晶系结构的碳酸铈粉末,而不会受到高温高压的危险,并且需要昂贵的 水热合成系统。