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    • 2. 发明授权
    • Semiconductor devices and methods of fabricating the same
    • 半导体器件及其制造方法
    • US08405158B2
    • 2013-03-26
    • US12832373
    • 2010-07-08
    • Young-Bae YoonJong-Hyuk KimKeonsoo KimYoungseop RahYoonmoon Park
    • Young-Bae YoonJong-Hyuk KimKeonsoo KimYoungseop RahYoonmoon Park
    • H01L27/088H01L29/76
    • H01L27/11521G11C16/0483H01L27/11519
    • A semiconductor memory device and method of manufacturing the same, the device including string structures, the string structures including two or more adjacent string selection transistors connected in series to each other in a first direction and being spaced apart from one another in a second direction intersecting the first direction, the two or more string selection transistors having different threshold voltages; string selection lines, the string selection lines connecting the adjacent string selection transistors of the string structures in the second direction; and a bit line electrically connecting two or more adjacent string structures, wherein a device isolation layer between the adjacent string selection transistors in the second direction has recessed regions, and profiles of the recessed regions on respective sides of the string selection transistors are different from each other.
    • 一种半导体存储器件及其制造方法,该器件包括串联结构,串联结构包括两个或多个相邻的串选择晶体管,它们在第一方向上彼此串联连接,并且在第二方向上相互间隔开 所述第一方向,所述两个或更多个串选择晶体管具有不同的阈值电压; 串选择线,串串选择线,连接串结构的相邻串选择晶体管沿第二方向; 以及电连接两个或更多个相邻串结构的位线,其中在第二方向上的相邻串选择晶体管之间的器件隔离层具有凹陷区域,并且串选择晶体管的相应侧上的凹陷区域的轮廓与每个不同 其他。
    • 5. 发明申请
    • SEMICONDUCTOR DEVICES AND METHODS OF FABRICATING THE SAME
    • 半导体器件及其制造方法
    • US20110038211A1
    • 2011-02-17
    • US12832373
    • 2010-07-08
    • Young-Bae YoonJong-Hyuk KimKeonsoo KimYoungseop RahYoonmoon Park
    • Young-Bae YoonJong-Hyuk KimKeonsoo KimYoungseop RahYoonmoon Park
    • G11C16/04H01L27/088
    • H01L27/11521G11C16/0483H01L27/11519
    • A semiconductor memory device and method of manufacturing the same, the device including string structures, the string structures including two or more adjacent string selection transistors connected in series to each other in a first direction and being spaced apart from one another in a second direction intersecting the first direction, the two or more string selection transistors having different threshold voltages; string selection lines, the string selection lines connecting the adjacent string selection transistors of the string structures in the second direction; and a bit line electrically connecting two or more adjacent string structures, wherein a device isolation layer between the adjacent string selection transistors in the second direction has recessed regions, and profiles of the recessed regions on respective sides of the string selection transistors are different from each other.
    • 一种半导体存储器件及其制造方法,该器件包括串联结构,串联结构包括两个或更多个相邻的串选择晶体管,它们在第一方向上彼此串联连接并且沿第二方向相互间隔开 所述第一方向,所述两个或更多个串选择晶体管具有不同的阈值电压; 串选择线,串串选择线,连接串结构的相邻串选择晶体管沿第二方向; 以及电连接两个或更多个相邻串结构的位线,其中在第二方向上的相邻串选择晶体管之间的器件隔离层具有凹陷区域,并且串选择晶体管的相应侧上的凹陷区域的轮廓与每个不同 其他。
    • 6. 发明授权
    • Methods of forming nand-type nonvolatile memory devices
    • 形成非易失性存储器件的方法
    • US07709323B2
    • 2010-05-04
    • US12474896
    • 2009-05-29
    • Hoo-Sung ChoSoon-Moon JungWon-Seok ChoJong-Hyuk KimJae-Hun JeongJae-Hoon Jang
    • Hoo-Sung ChoSoon-Moon JungWon-Seok ChoJong-Hyuk KimJae-Hun JeongJae-Hoon Jang
    • H01L21/336
    • H01L27/11524H01L27/0688H01L27/11551
    • Methods of forming a NAND-type nonvolatile memory device include: forming first common drains and first common sources alternatively in an active region which is defined in a semiconductor substrate and extends one direction, forming a first insulating layer covering an entire surface of the semiconductor substrate, patterning the first insulating layer to form seed contact holes which are arranged at regular distance and expose the active region, forming a seed contact structure filling each of the seed contact holes and a semiconductor layer disposed on the first insulating layer and contacting the seed contact structures, patterning the semiconductor layer to form a semiconductor pattern which extends in the one direction and is disposed over the active region, forming second common drains and second common sources disposed alternatively in the semiconductor pattern in the one direction, forming a second insulating layer covering an entire surface of the semiconductor substrate, forming a source line pattern continuously penetrating the second insulating layer, the semiconductor pattern and the first insulating layer, the source line pattern being connected with the first and second common sources, wherein a grain boundary of the semiconductor layer is positioned at a center between the one pair of seed contact structures adjacent to each other, and is positioned over the first common drain or the first common source.
    • 形成NAND型非易失性存储器件的方法包括:在半导体衬底中限定的有源区域中交替形成第一公共漏极和第一公共源,并延伸一个方向,形成覆盖半导体衬底的整个表面的第一绝缘层 图案化第一绝缘层以形成以规则距离布置的暴露有源区域的种子接触孔,形成填充每个种子接触孔的种子接触结构以及设置在第一绝缘层上并接触种子接触的半导体层 结构,图案化所述半导体层以形成在所述一个方向上延伸并设置在所述有源区上方的半导体图案,形成沿所述一个方向交替设置在所述半导体图案中的第二公共漏极和第二公共源,形成第二绝缘层覆盖层 半导体衬底的整个表面 使源极线图案连续地穿过第二绝缘层,半导体图案和第一绝缘层,源极线图案与第一和第二共用源连接,其中半导体层的晶界位于第二绝缘层之间的中心 一对种子接触结构彼此相邻,并且位于第一公共漏极或第一公共源的上方。
    • 8. 发明授权
    • Semiconductor integrated circuit devices having single crystalline thin film transistors and methods of fabricating the same
    • 具有单晶薄膜晶体管的半导体集成电路器件及其制造方法
    • US07417286B2
    • 2008-08-26
    • US11280045
    • 2005-11-15
    • Sung-Jin KimSoon-Moon JungWon-Seok ChoJae-Hoon JangJong-Hyuk KimKun-Ho KwakHoon Lim
    • Sung-Jin KimSoon-Moon JungWon-Seok ChoJae-Hoon JangJong-Hyuk KimKun-Ho KwakHoon Lim
    • H01L23/62
    • H01L27/0688H01L21/8221
    • Semiconductor integrated circuit devices having single crystalline thin film transistors and methods of fabricating the same are provided. The semiconductor integrated circuit devices include an interlayer insulating layer formed on a semiconductor substrate and a single crystalline semiconductor plug penetrating the interlayer insulating layer. A single crystalline semiconductor body pattern is provided on the interlayer insulating layer. The single crystalline semiconductor body pattern has an elevated region and contacts the single crystalline semiconductor plug. The method of forming the single crystalline semiconductor body pattern having the elevated region includes forming a sacrificial layer pattern covering the single crystalline semiconductor plug on the interlayer insulating layer. A capping layer is formed to cover the sacrificial layer pattern and the interlayer insulating layer, and the capping layer is patterned to form an opening which exposes a portion of the sacrificial layer pattern. Subsequently, the sacrificial layer pattern is selectively removed to form a cavity in the capping layer, and a planarized single crystalline semiconductor body pattern is formed to fill the cavity and the opening.
    • 提供具有单晶薄膜晶体管的半导体集成电路器件及其制造方法。 半导体集成电路器件包括形成在半导体衬底上的层间绝缘层和贯穿层间绝缘层的单晶半导体插件。 在层间绝缘层上设置单晶体半导体图案。 单晶半导体主体图案具有升高的区域并与单晶半导体插头接触。 形成具有升高区域的单晶半导体主体图案的方法包括在层间绝缘层上形成覆盖单晶半导体插塞的牺牲层图案。 形成覆盖牺牲层图案和层间绝缘层的覆盖层,并且对覆盖层进行图案化以形成露出牺牲层图案的一部分的开口。 随后,选择性地去除牺牲层图案以在封盖层中形成空腔,并且形成平坦化的单晶半导体主体图案以填充空腔和开口。
    • 10. 发明授权
    • Method of forming single crystal semiconductor thin film on insulator and semiconductor device fabricated thereby
    • 在绝缘体上形成单晶半导体薄膜的方法和由此制造的半导体器件
    • US07276421B2
    • 2007-10-02
    • US11197836
    • 2005-08-05
    • Jong-Hyuk KimSoon-Moon JungWon-Seok ChoJae-Hoon JangKun-Ho KwakSung-Jin KimJae-Joo Shim
    • Jong-Hyuk KimSoon-Moon JungWon-Seok ChoJae-Hoon JangKun-Ho KwakSung-Jin KimJae-Joo Shim
    • H01L21/331
    • H01L21/8221H01L21/28525H01L21/76877H01L27/0688H01L27/11H01L27/1108H01L27/12H01L29/785
    • Methods of forming a single crystal semiconductor thin film on an insulator and semiconductor devices fabricated thereby are provided. The methods include forming an interlayer insulating layer on a single crystal semiconductor layer. A single crystal semiconductor plug is formed to penetrate the interlayer insulating layer. A semiconductor oxide layer is formed within the single crystal semiconductor plug using an ion implantation technique and an annealing technique. As a result, the single crystal semiconductor plug is divided into a lower plug and an upper single crystal semiconductor plug with the semiconductor oxide layer being interposed therebetween. That is, the upper single crystal semiconductor plug is electrically insulated from the lower plug by the semiconductor oxide layer. A single crystal semiconductor pattern is formed to be in contact with the upper single crystal semiconductor plug and cover the interlayer insulating layer. The single crystal semiconductor pattern is grown by an epitaxy growth technique using the upper single crystal semiconductor plug as a seed layer, or by a solid epitaxy growth technique using the upper single crystal semiconductor plug as a seed layer.
    • 提供了在绝缘体上形成单晶半导体薄膜的方法和由此制造的半导体器件。 所述方法包括在单晶半导体层上形成层间绝缘层。 形成单晶半导体插塞以穿透层间绝缘层。 使用离子注入技术和退火技术在单晶半导体插头内形成半导体氧化物层。 结果,单晶半导体插头被分成下插头和上部单晶半导体插头,半导体氧化物层之间插入其中。 也就是说,上单晶半导体插头通过半导体氧化物层与下插塞电绝缘。 单晶半导体图案形成为与上单晶半导体插头接触并覆盖层间绝缘层。 通过使用上部单晶半导体插塞作为种子层的外延生长技术,或通过使用上部单晶半导体插塞作为种子层的固体外延生长技术,生长单晶半导体图案。