专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20140242530A1 SUBSTRATE HEAT TREATMENT APPARATUS AND METHOD 审中-公开
标题翻译：基板热处理装置和方法
公开(公告)号：US20140242530A1
公开(公告)日：2014-08-28
申请号：US13945324
申请日：2013-07-18
申请人： Sung Guk An , Jun Heo , Jong Hyun Yun , Kyoung Wan Park , Ho Young Kang , Byung Il Lee
发明人： Sung Guk An , Jun Heo , Jong Hyun Yun , Kyoung Wan Park , Ho Young Kang , Byung Il Lee
IPC分类号： H01L21/02
CPC分类号： H01L21/324 , F27B17/0025 , H01L21/67109 , H01L21/67115
摘要： Substrate heat treatment apparatus and method are provided. According to an embodiment of the present invention, there is provided a substrate heat treatment apparatus including an inner shell configured to form a substrate housing space to house at least one substrate, an outer shell configured to cover the inner shell, and having at least one gas hole, and at least one heater configured to heat the substrate, wherein the at least one gas hole is configured to allow a first gas to be injected into a space between the inner shell and the outer shell.
摘要翻译：提供基板热处理装置和方法。根据本发明的实施例，提供了一种基板热处理设备，其包括：内壳，其构造成形成用于容纳至少一个基板的基板容纳空间;外壳，构造成覆盖所述内壳，并且具有至少一个气体孔和至少一个加热构造成加热基底的加热器，其中所述至少一个气孔被配置为允许第一气体被注入到所述内壳和所述外壳之间的空间中。

2. 发明授权

US06240331B1 Integrated management of semiconductor process data 有权
标题翻译：半导体工艺数据的综合管理
公开(公告)号：US06240331B1
公开(公告)日：2001-05-29
申请号：US09135652
申请日：1998-08-18
申请人： Jong-hyun Yun
发明人： Jong-hyun Yun
IPC分类号： G06F1900
CPC分类号： H01L21/67276 , G05B19/41845 , G05B2219/31427 , Y02P90/10 , Y02P90/16
摘要： A method for integrated management of semiconductor process data. The method is capable of easily accessing data generated in one semiconductor fabrication line, and commonly sharing and easily accessing data generated in a plurality of semiconductor fabrication lines. An integrated management system (IMS) is installed in every semiconductor fabrication lines and allows integrated management of the semiconductor process data. Each IMS is in communication with every other IMS and includes a plurality of data sets and corresponding data set modules. Then a user interface computer logs into a contacted IMS. A work environment, including a contacted data set module, is updated at the user interface computer using information from the contacted IMS. A task is then carried out at the user interface computer according to the updated work environment.
摘要翻译：一种半导体工艺数据综合管理的方法。该方法能够容易地访问在一个半导体制造线中生成的数据，并且通常共享并容易地访问在多个半导体制造线中生成的数据。在每个半导体制造线路中安装了集成管理系统（IMS），并允许对半导体工艺数据进行集成管理。每个IMS与每个其他IMS通信，并且包括多个数据集和对应的数据集模块。然后，用户界面计算机登录到联系的IMS。使用来自所接触的IMS的信息在用户界面计算机上更新包括联系的数据集模块的工作环境。然后根据更新的工作环境在用户界面计算机上执行任务。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式