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1. 发明申请

US20060260638A1 Method and system for processing substrates with sonic energy that reduces or eliminates damage to semiconductor devices 审中-公开
标题翻译：用于处理具有声能的衬底的方法和系统，其减少或消除对半导体器件的损坏
公开(公告)号：US20060260638A1
公开(公告)日：2006-11-23
申请号：US11370361
申请日：2006-03-08
申请人： Pejman Fani , Ismail Kashkoush , John Korbler , Vivek Vohra , Alan Walter
发明人： Pejman Fani , Ismail Kashkoush , John Korbler , Vivek Vohra , Alan Walter
IPC分类号： B08B3/12 , B08B7/00
CPC分类号： B08B3/12 , H01L21/67051
摘要： A system and method for processing and/or cleaning substrates using sonic energy that eliminates or reduces damage to the substrates. In one aspect, the invention utilizes and produces low power density sonic energy to effectively remove particles from a substrate. In another aspect, the invention utilizes and generates a clean electrical signal for driving a source of sonic energy, such as a transducer.
摘要翻译：使用消除或减少对基底的损伤的声能处理和/或清洁基底的系统和方法。一方面，本发明利用并产生低功率密度的声能以有效地从基底去除颗粒。在另一方面，本发明利用并产生用于驱动声能源的清洁电信号，例如换能器。

2. 发明申请

US20070169800A1 ACOUSTIC ENERGY SYSTEM, METHOD AND APPARATUS FOR PROCESSING FLAT ARTICLES 有权
标题翻译：声学能量系统，处理平面文章的方法和装置
公开(公告)号：US20070169800A1
公开(公告)日：2007-07-26
申请号：US11625556
申请日：2007-01-22
申请人： Pejman Fani , Mark Rouillard , John Korbler , James Brown , Chad Hosack
发明人： Pejman Fani , Mark Rouillard , John Korbler , James Brown , Chad Hosack
IPC分类号： B08B3/00 , B08B3/12
CPC分类号： H01L21/02057 , B08B3/04 , B08B3/10 , B08B3/12 , H01L21/67051
摘要： A system, apparatus and method for processing this flat articles, such as semiconductor wafers, with acoustical energy. In a cleaning process, the inventive system, apparatus and method can remove particles from both sides of a wafer more efficiently and effectively. in one aspect, the invention is a system for processing flat articles comprising: a rotatable support for supporting a flat article; a first dispenser for applying liquid to a first surface of a flat article on the rotatable support; a second dispenser for applying liquid to a second surface of a flat article on the rotatable support; a first transducer assembly comprising a first transducer for generating acoustic energy and a first transmitter acoustically coupled to the first transducer, the first transducer assembly positioned so that when the first dispenser applies liquid to the first surface of a flat article on the rotatable support, a first meniscus of liquid is formed between a portion of the first transmitter and the first surface of the flat article; and a second transducer assembly comprising a second transducer for generating acoustic energy and a second transmitter acoustically coupled to the second transducer, the second transducer assembly positioned so that when the second dispenser applies liquid to the second surface of the flat article on the rotatable support, a second meniscus of liquid is formed between a portion of the second transmitter and the second surface of the flat article.
摘要翻译：用于处理具有声能的扁平制品（例如半导体晶片）的系统，装置和方法。在清洁过程中，本发明的系统，装置和方法可以更有效和更有效地从晶片的两侧去除颗粒。在一个方面，本发明是一种用于处理扁平制品的系统，包括：用于支撑扁平制品的可旋转支撑件; 用于将液体施加到可旋转支撑件上的扁平物品的第一表面的第一分配器; 用于将液体施加到可旋转支撑件上的平坦物品的第二表面的第二分配器; 第一传感器组件，包括用于产生声能的第一传感器和声耦合到第一换能器的第一传感器，第一传感器组件被定位成使得当第一分配器将液体施加到可旋转支撑件上的平坦物品的第一表面时，在第一发射器的一部分和平坦物品的第一表面之间形成液体的第一弯液面; 以及第二换能器组件，其包括用于产生声能的第二换能器和声耦合到所述第二换能器的第二发射器，所述第二换能器组件被定位成使得当所述第二分配器将液体施加到所述可旋转支撑件上的所述扁平物品的第二表面时，在第二发射器的一部分和平坦物品的第二表面之间形成液体的第二弯液面。

3. 发明申请

US20060054182A1 System and method of powering a sonic energy source and use of the same to process substrates 审中-公开
标题翻译：为声能源提供动力的系统和方法，并使用它来处理衬底
公开(公告)号：US20060054182A1
公开(公告)日：2006-03-16
申请号：US11227705
申请日：2005-09-15
申请人： John Korbler , Ismail Kashkoush , John Volkert , Michael Peters , Pejman Fani
发明人： John Korbler , Ismail Kashkoush , John Volkert , Michael Peters , Pejman Fani
IPC分类号： B08B3/12
CPC分类号： H01L21/67051 , B08B3/12
摘要： A system and method of supplying power to a sonic energy source that minimizes damage to substrate devices during processing while increasing processing efficiency and/or effectiveness. The system and method utilize the concept of ramping the amplitude and/or varying the frequency of the electrical signal used to drive the sonic energy source, thereby resulting in corresponding ramping and/or variations in the amplitude and frequency of the resulting sonic energy being applied to the substrate. A method of processing a substrate with sonic energy comprising: a) supporting at least one substrate in a process chamber; b) generating a base electrical signal; c) transmitting the base electrical signal to an amplifier, the amplifier converting the base electrical signal into an output electrical signal having a peak amplitude; d) transmitting the output electrical signal to a transducer, the transducer converting the output electrical signal into corresponding sonic energy; e) applying the sonic energy to the at least on substrate supported in the process chamber; and f) ramping the peak amplitude of the output electrical signal.
摘要翻译：一种向声能量源供电的系统和方法，其在处理过程中使衬底装置的损害最小化，同时提高处理效率和/或有效性。该系统和方法利用斜率振幅和/或改变用于驱动声能量的电信号的频率的概念，从而导致所应用的声能的振幅和频率的相应斜坡和/或变化到基底。一种用声能处理衬底的方法，包括：a）在处理室中支撑至少一个衬底; b）产生基本电信号; c）将基本电信号发送到放大器，放大器将基本电信号转换成具有峰值振幅的输出电信号; d）将输出电信号传输到换能器，换能器将输出电信号转换成相应的声能; e）将声能施加到所述处理室中支撑的所述至少一个衬底上; 以及f）斜率输出电信号的峰值幅度。

4. 发明授权

US08316869B2 Acoustic energy system, method and apparatus for processing flat articles 有权
标题翻译：用于加工扁平制品的声能系统，方法和装置
公开(公告)号：US08316869B2
公开(公告)日：2012-11-27
申请号：US12871286
申请日：2010-08-30
申请人： Pejman Fani , Mark Rouillard , John Korbler , James Brown , Chad Hosack
发明人： Pejman Fani , Mark Rouillard , John Korbler , James Brown , Chad Hosack
IPC分类号： B08B3/00
CPC分类号： H01L21/02057 , B08B3/04 , B08B3/10 , B08B3/12 , H01L21/67051
摘要： A system, apparatus and method for processing flat articles with acoustical energy. The inventive system, apparatus and method can remove particles from both sides of a wafer more efficiently and effectively. In one aspect, the invention is a system and/or method for processing flat articles wherein a liquid is applied to both major surfaces of the flat article. A first transducer assembly is positioned adjacent to a first of the major surfaces of the flat article and a second member is positioned adjacent to a second of the major surfaces. The first transducer assembly generates and transmits acoustical energy to the first major surface of the flat article while the second member either: (1) reflects the acoustical energy generated by the first transducer assembly back to the second major surface of the flat article; and/or (2) generates and transmits acoustical energy to the second major surface of the flat article.
摘要翻译：用于处理具有声能的扁平制品的系统，装置和方法。本发明的系统，装置和方法可以更有效和有效地从晶片的两侧去除颗粒。一方面，本发明是一种用于处理扁平制品的系统和/或方法，其中将液体施加到扁平制品的两个主表面上。第一换能器组件邻近扁平制品的第一主表面定位，并且第二构件邻近第二主表面定位。第一换能器组件产生并将声能传递到扁平制品的第一主表面，而第二构件可以：（1）将由第一换能器组件产生的声能反射回平面物品的第二主表面; 和/或（2）产生和传播声能到平坦物品的第二主表面。

5. 发明授权

US07836769B2 Apparatus and method of measuring acoustical energy applied to a substrate 失效
标题翻译：测量施加到基底上的声能的装置和方法
公开(公告)号：US07836769B2
公开(公告)日：2010-11-23
申请号：US11837292
申请日：2007-08-10
申请人： John Korbler
发明人： John Korbler
IPC分类号： G01H1/00 , H01L41/00
CPC分类号： G01H11/08
摘要： An apparatus and method for measuring the acoustical energy that will be applied to a substrate during cleaning. A substrate is provided that has placed upon it a piezoelectric member that is capable of sensing the acoustical power that is transmitted. This enables the detection and calibration of transducer assemblies that are used in the cleaning of substrates.
摘要翻译：一种用于测量在清洁过程中将施加到基板上的声能的装置和方法。提供了一种基板，其已经放置有能够感测传输的声功率的压电元件。这使得能够检测和校准用于清洁衬底的换能器组件。

6. 发明授权

US07784478B2 Acoustic energy system, method and apparatus for processing flat articles 有权
标题翻译：用于加工扁平制品的声能系统，方法和装置
公开(公告)号：US07784478B2
公开(公告)日：2010-08-31
申请号：US11625556
申请日：2007-01-22
申请人： Pejman Fani , Mark Rouillard , John Korbler , James Brown , Chad Hosack
发明人： Pejman Fani , Mark Rouillard , John Korbler , James Brown , Chad Hosack
IPC分类号： B08B3/12
CPC分类号： H01L21/02057 , B08B3/04 , B08B3/10 , B08B3/12 , H01L21/67051
摘要： A system, apparatus and method for processing flat articles, such as semiconductor wafers, with acoustical energy. In a cleaning process, the inventive system, apparatus and method can remove particles from both sides of a wafer more efficiently and effectively. In one aspect, the invention is a system for processing flat articles comprising: a first dispenser for applying a liquid to a first surface of a flat article; a second dispenser for applying liquid to a second surface of a flat article; a first transducer assembly positioned so as to transmit acoustical energy to the first surface of the flat article; and a second transducer assembly positioned so as to transmit acoustical energy to the second surface of the flat article.
摘要翻译：用于处理具有声能的扁平制品（例如半导体晶片）的系统，装置和方法。在清洁过程中，本发明的系统，装置和方法可以更有效和更有效地从晶片的两侧去除颗粒。一方面，本发明是一种用于处理扁平制品的系统，包括：用于将液体施加到平坦物品的第一表面的第一分配器; 用于将液体施加到平坦物品的第二表面的第二分配器; 第一换能器组件被定位成将声能传递到平坦物品的第一表面; 以及第二换能器组件，其定位成将声能传递到平坦物品的第二表面。

7. 发明授权

US06955727B2 Substrate process tank with acoustical source transmission and method of processing substrates 有权
标题翻译：具有声源传输的基板工艺槽和处理衬底的方法
公开(公告)号：US06955727B2
公开(公告)日：2005-10-18
申请号：US10699042
申请日：2003-10-31
申请人： John Korbler , Xuecang Geng
发明人： John Korbler , Xuecang Geng
IPC分类号： B08B3/00 , B08B3/10 , B08B3/12 , B08B7/00 , B08B7/02 , B65D20060101 , H01L21/00 , H01L41/08 , H04R25/00
CPC分类号： B08B3/12 , H01L21/67057 , Y10S134/902
摘要： A system and method for improving the efficiency and effectiveness of the transmission of acoustical energy to process fluids during substrate processing, such as cleaning or photoresist stripping. The invention utilizes a layered stack of materials to transmit acoustical energy from a source of acoustical energy to the process fluid. The material of which each layer is constructed is chosen so as to reduce the differences in acoustical impedance between consecutive layers of the stack, providing a more gradual transition, in terms of acoustical impedance, when acoustical energy is being transmitted from the source to the process fluid. In one aspect, the invention is a system comprising: a process chamber for receiving a process fluid; an acoustical energy source; and an acoustical stack having a first transmission layer and a second transmission layer that forms an acoustical energy pathway from the acoustical energy source to the process fluid in the process chamber.
摘要翻译：一种系统和方法，用于提高在衬底处理（例如清洁或光致抗蚀剂剥离）过程中将声能传递到处理流体的效率和有效性。本发明利用层叠的材料堆叠将声能从声能源传递到过程流体。选择构成每个层的材料，以便减少堆叠的连续层之间的声阻抗的差异，当声能从源传输到过程时，在声阻抗方面提供更渐进的转变流体。一方面，本发明是一种系统，包括：用于接收处理流体的处理室; 声能源; 以及具有第一透射层和第二透射层的声学叠层，其形成从声能源到处理室中的处理流体的声能路径。

8. 发明申请

US20100326464A1 ACOUSTIC ENERGY SYSTEM, METHOD AND APPARATUS FOR PROCESSING FLAT ARTICLES 有权
标题翻译：声学能量系统，处理平面文章的方法和装置
公开(公告)号：US20100326464A1
公开(公告)日：2010-12-30
申请号：US12871286
申请日：2010-08-30
申请人： Pejman Fani , Mark Rouillard , John Korbler , James Brown , Chad Hosack
发明人： Pejman Fani , Mark Rouillard , John Korbler , James Brown , Chad Hosack
IPC分类号： B08B3/12
CPC分类号： H01L21/02057 , B08B3/04 , B08B3/10 , B08B3/12 , H01L21/67051
摘要： A system, apparatus and method for processing flat articles with acoustical energy. The inventive system, apparatus and method can remove particles from both sides of a wafer more efficiently and effectively. In one aspect, the invention is a system and/or method for processing flat articles wherein a liquid is applied to both major surfaces of the flat article. A first transducer assembly is positioned adjacent to a first of the major surfaces of the flat article and a second member is positioned adjacent to a second of the major surfaces. The first transducer assembly generates and transmits acoustical energy to the first major surface of the flat article while the second member either: (1) reflects the acoustical energy generated by the first transducer assembly back to the second major surface of the flat article; and/or (2) generates and transmits acoustical energy to the second major surface of the flat article.
摘要翻译：用于处理具有声能的扁平制品的系统，装置和方法。本发明的系统，装置和方法可以更有效和有效地从晶片的两侧去除颗粒。一方面，本发明是一种用于处理扁平制品的系统和/或方法，其中将液体施加到扁平制品的两个主表面上。第一换能器组件邻近扁平制品的第一主表面定位，并且第二构件邻近第二主表面定位。第一传感器组件产生并将声能传递到扁平制品的第一主表面，而第二构件可以：（1）将由第一换能器组件产生的声能反射回平面物品的第二主表面; 和/或（2）产生和传播声能到平坦物品的第二主表面。

9. 发明申请

US20080034875A1 APPARATUS AND METHOD OF MEASURING ACOUSTICAL ENERGY APPLIED TO A SUBSTRATE 失效
标题翻译：测量应用于基板的声学能量的装置和方法
公开(公告)号：US20080034875A1
公开(公告)日：2008-02-14
申请号：US11837292
申请日：2007-08-10
申请人： John Korbler
发明人： John Korbler
IPC分类号： G01H1/00
CPC分类号： G01H11/08
摘要： An apparatus and method for measuring the acoustical energy that will be applied to a substrate during cleaning. A substrate is provided that has placed upon it a piezoelectric member that is capable of sensing the acoustical power that is transmitted. This enables the detection and calibration of transducer assemblies that are used in the cleaning of substrates.
摘要翻译：一种用于测量在清洁过程中将施加到基板上的声能的装置和方法。提供了一种基板，其已经放置有能够感测传输的声功率的压电元件。这使得能够检测和校准用于清洁衬底的换能器组件。

10. 发明申请

US20060260639A1 Method and system for processing substrates with sonic energy that reduces or eliminates damage to semiconductor devices 审中-公开
公开(公告)号：US20060260639A1
公开(公告)日：2006-11-23
申请号：US11370707
申请日：2006-03-08
申请人： Pejman Fani , Ismail Kashkoush , John Korbler , Vivek Vohra , Alan Walter
发明人： Pejman Fani , Ismail Kashkoush , John Korbler , Vivek Vohra , Alan Walter
IPC分类号： B08B3/12 , B08B7/00
CPC分类号： B08B3/12 , H01L21/67051
摘要： A system and method for processing and/or cleaning substrates using sonic energy that eliminates or reduces damage to the substrates. In one aspect, the invention utilizes and produces low power density sonic energy to effectively remove particles from a substrate. In another aspect, the invention utilizes and generates a clean electrical signal for driving a source of sonic energy, such as a transducer.

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