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    • 8. 发明授权
    • Liquid metal micro switches using as channels and heater cavities matching patterned thick film dielectric layers on opposing thin ceramic plates
    • 液态金属微动开关,用作通道和加热器腔体,在相对的薄陶瓷板上匹配图案化的厚膜电介质层
    • US06777630B1
    • 2004-08-17
    • US10426449
    • 2003-04-30
    • Lewis R DovePaul Thomas CarsonJohn F CaseyMarvin Glenn Wong
    • Lewis R DovePaul Thomas CarsonJohn F CaseyMarvin Glenn Wong
    • H01H2900
    • H01H1/0036H01H29/28H01H2029/008H01H2061/006
    • An efficient way to fabricate the channels and cavities in a LIMMS device is to form them as matching upper and lower portions each created as a patterned layer of thick film dielectric material deposited on a respective upper or lower substrate. The two portions are adhered together by a patterned layer of adhesive, and hermetically sealed around an outer perimeter. The heater resistors are mounted atop the lower layer, thus suspending them away from that substrate and exposing more of their surface area. Vias can be used to route the conductors for the heaters and the switched signal contacts through the lower substrate to cooperate with surface mount techniques using solder balls on an array of contact pads. These vias can be made hermetic by their placement within the patterned layers of dielectric material and by covering their exposed ends with pads of hermetic metal. Suitable thick film dielectric materials that may be deposited as a paste and subsequently cured include the KQ 150 and KQ 115 thick film dielectrics from Heracus and the 4141A/D thick film compositions from DuPont.
    • 在LIMMS装置中制造通道和空腔的有效方法是将它们形成为匹配上部和下部,每个上部和下部被形成为沉积在相应的上部或下部基底上的厚膜介电材料的图案化层。 两个部分通过图案化的粘合剂层粘合在一起,并围绕外周密封。 加热电阻器安装在下层的顶部,从而将它们悬挂在远离基板并暴露出更多的表面积。 通孔可用于将加热器的导体和切换的信号触点通过下基板布线,以使用在接触焊盘阵列上的焊球的表面贴装技术配合。 这些通孔可以通过它们放置在图案化的电介质材料层内并通过用气密金属垫覆盖其暴露的末端而形成为气密的。 可以作为糊料沉积并随后固化的合适的厚膜电介质材料包括来自Heraeus的KQ 150和KQ 115厚膜电介质和来自DuPont的4141A / D厚膜组合物。