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1. 发明申请

US20090152542A1 TESTING THE QUALITY OF LIFT-OFF PROCESSES IN WAFER FABRICATION 有权
标题翻译：测试水轮机制造工艺的质量
公开(公告)号：US20090152542A1
公开(公告)日：2009-06-18
申请号：US11957483
申请日：2007-12-17
申请人： Edward Hin Pong Lee , Jennifer Ai-Ming Leung
发明人： Edward Hin Pong Lee , Jennifer Ai-Ming Leung
IPC分类号： H01L23/58 , H01L21/66
CPC分类号： H01L22/34
摘要： Test methods and components are disclosed for testing the quality of lift-off processes in wafer fabrication. A wafer is populated with one or more test components along with the functional components. These test components are fabricated with holes in an insulation layer that is deposited between conductive layers, where the holes were created by the same or similar lift-off process that is used to fabricate the functional components on the wafer. The test components may then be measured in order to determine the quality of the holes created by the lift-off process. The quality of the lift-off process used to fabricate the functional components may then be determined based on the quality of the holes in the test components.
摘要翻译：公开了用于测试晶片制造中的剥离过程的质量的测试方法和组件。晶片与功能部件一起填充一个或多个测试部件。这些测试部件被制成在绝缘层上的孔，该绝缘层沉积在导电层之间，其中孔是通过用于制造晶片上的功能部件的相同或类似的剥离工艺产生的。然后可以测量测试部件以确定由剥离过程产生的孔的质量。然后可以基于测试部件中的孔的质量来确定用于制造功能部件的剥离过程的质量。

2. 发明授权

US07741133B2 Resistance measurements of a helical coil 有权
标题翻译：螺旋线圈的电阻测量
公开(公告)号：US07741133B2
公开(公告)日：2010-06-22
申请号：US11957484
申请日：2007-12-17
申请人： Edward Hin Pong Lee , Jennifer Ai-Ming Leung
发明人： Edward Hin Pong Lee , Jennifer Ai-Ming Leung
IPC分类号： H01L21/00 , H01F30/12 , G01R1/00
CPC分类号： G01R31/06
摘要： Test methods and components are disclosed for testing resistances of helical coils formed in magnetic recording heads. Helical coils in magnetic recording heads include a bottom coil structure, a top coil structure, and connecting structures that electrically connect the top and bottom coil structures. A test component is fabricated on the wafer along with the magnetic recording heads. The test component includes a bottom coil structure connected in series, and includes a top coil structure connected in series which is electrically disconnected from the bottom coil structure. Resistances of the top and bottom coil structures are measured in the test component. A total resistance of a helical coil is also measured. The resistance of the connecting structures in the helical coil may then be determined based on the resistance of the bottom coil structure, the resistance of the top coil structure, and the total resistance of the helical coil.
摘要翻译：公开了用于测试形成在磁记录头中的螺旋线圈的电阻的测试方法和部件。磁记录头中的螺旋线圈包括底部线圈结构，顶部线圈结构以及将顶部和底部线圈结构电连接的连接结构。测试部件与磁记录头一起制造在晶片上。测试部件包括串联连接的底部线圈结构，并且包括与底部线圈结构电气断开的串联连接的顶部线圈结构。在测试部件中测量顶部和底部线圈结构的电阻。还测量螺旋线圈的总电阻。然后可以基于底部线圈结构的电阻，顶部线圈结构的电阻和螺旋线圈的总电阻来确定螺旋线圈中的连接结构的电阻。

3. 发明授权

US08031432B2 Magnetic write head having helical coil with a fin structure for reduced heat induced protrusion 有权
标题翻译：具有螺旋线圈的磁写头，具有用于减少热引起的突起的翅片结构
公开(公告)号：US08031432B2
公开(公告)日：2011-10-04
申请号：US11955277
申请日：2007-12-12
申请人： Wen-Chien David Hsiao , Edward Hin Pong Lee , Jennifer Ai-Ming Leung
发明人： Wen-Chien David Hsiao , Edward Hin Pong Lee , Jennifer Ai-Ming Leung
IPC分类号： G11B5/17 , G11B5/40
CPC分类号： G11B5/3123 , G11B5/3136
摘要： A magnetic write head having a write coil configured to dissipate heat away from the write head to minimize thermal protrusion. The write coil is formed as a helical coil having upper and lower leads that are connected by electrically conductive studs formed therebetween. The first and leads extend beyond the studs to form heat conducting fins that conduct heat away from the write head where it can be dissipated into surrounding structure.
摘要翻译：具有写入线圈的磁写头，该写入线圈构造成从写入头部散发热量以最小化热突起。写入线圈形成为螺旋线圈，其具有通过在它们之间形成的导电柱而连接的上引线和下引线。第一和引线延伸超过螺柱，以形成导热翅片，其将热量从写入头传导到可以被散发到周围结构中。

4. 发明授权

US08453317B2 Magnetic write head fabrication with integrated electrical lapping guides 有权
标题翻译：磁性写头制造与集成电动研磨导轨
公开(公告)号：US08453317B2
公开(公告)日：2013-06-04
申请号：US12904636
申请日：2010-10-14
申请人： Donald Allen , Jennifer Ai-Ming Leung , Aron Pentek , Thomas Roucoux
发明人： Donald Allen , Jennifer Ai-Ming Leung , Aron Pentek , Thomas Roucoux
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3166 , G11B5/3169 , G11B5/6082 , Y10T29/49039 , Y10T29/49041 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： Methods of fabricating magnetic write heads and electrical lapping guides (ELG's) using a split gap deposition process is described. A removal process is performed on a magnetic material to define a main write pole and to define a corresponding ELG for the main write pole. A first non-magnetic gap layer is deposited. A mask and liftoff process is performed to deposit an electrically conductive material on the first gap layer disposed along a front edge of the ELG. A second non-magnetic gap layer is then deposited and a shield is fabricated for the write pole.
摘要翻译：描述了使用分割间隙沉积工艺制造磁性写入头和电气研磨导向器（ELG）的方法。在磁性材料上执行移除过程以限定主写极并且为主写极定义相应的ELG。沉积第一非磁隙层。执行掩模和剥离处理以将导电材料沉积在沿着ELG的前边缘设置的第一间隙层上。然后沉积第二非磁性间隙层，并为写入极制造屏蔽。

5. 发明授权

US07612963B2 Perpendicular magnetic recording head with photoresist dam between write coil and air bearing surface 有权
标题翻译：在写入线圈和空气轴承表面之间具有光刻胶的垂直磁记录头
公开(公告)号：US07612963B2
公开(公告)日：2009-11-03
申请号：US11478925
申请日：2006-06-30
申请人： Donald G. Allen , Edward Hin Pong Lee , Jennifer Ai-Ming Leung
发明人： Donald G. Allen , Edward Hin Pong Lee , Jennifer Ai-Ming Leung
IPC分类号： G11B5/17 , G11B5/31 , G11B5/39
CPC分类号： G11B5/1278 , G11B5/3123 , G11B5/3163
摘要： A magnetic recording head for use in perpendicular magnetic recording having a design that allows the write coil to be manufactured by a damascene process for increased coil pitch and reduced coil resistance. The magnetic write head includes a photoresist dam structure that allows a hard baked photoresist to be formed that does not extend to the air bearing surface (ABS). Since the photoresist dam prevents the hard baked photoresist from reaching the ABS, the damascene process, in which the hard baked photoresist remains in the finished write head, can be used to produce the write head. The use of such a damascene process advantageously allows the space between the coil turns to be reduced, which maximizes the number of turns that can be used and also maximizes the number width to which the coil turns can be constructed, thereby minimizing the electrical resistance of the write coil.
摘要翻译：一种用于垂直磁记录的磁记录头，其具有允许通过镶嵌工艺制造写入线圈以增加线圈间距并减小线圈电阻的设计。磁写头包括光致抗蚀剂阻挡结构，其允许形成不延伸到空气轴承表面（ABS）的硬烘烤光致抗蚀剂。由于光致抗蚀剂防止了硬烘烤的光致抗蚀剂到达ABS，因此可以使用其中硬烧结光致抗蚀剂保留在完成的写头中的镶嵌工艺来产生写头。使用这种镶嵌工艺有利地减小了线圈匝之间的空间，这使得可以使用的匝数最大化，并且还使构造线圈匝数的数量最大化，从而最小化电阻写线圈。

6. 发明申请

US20120094009A1 MAGNETIC WRITE HEAD FABRICATION WITH INTEGRATED ELECTRICAL LAPPING GUIDES 有权
标题翻译：具有集成电气导线指导的磁性写头制造
公开(公告)号：US20120094009A1
公开(公告)日：2012-04-19
申请号：US12904636
申请日：2010-10-14
申请人： Donald Allen , Jennifer Ai-Ming Leung , Aron Pentek , Thomas Roucoux
发明人： Donald Allen , Jennifer Ai-Ming Leung , Aron Pentek , Thomas Roucoux
IPC分类号： C23C16/52 , B05D5/00
CPC分类号： G11B5/3166 , G11B5/3169 , G11B5/6082 , Y10T29/49039 , Y10T29/49041 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： Methods of fabricating magnetic write heads and electrical lapping guides (ELG's) using a split gap deposition process is described. A removal process is performed on a magnetic material to define a main write pole and to define a corresponding ELG for the main write pole. A first non-magnetic gap layer is deposited. A mask and liftoff process is performed to deposit an electrically conductive material on the first gap layer disposed along a front edge of the ELG. A second non-magnetic gap layer is then deposited and a shield is fabricated for the write pole.
摘要翻译：描述了使用分割间隙沉积工艺制造磁性写入头和电气研磨导向器（ELG）的方法。在磁性材料上执行移除过程以限定主写极并且为主写极定义相应的ELG。沉积第一非磁隙层。执行掩模和剥离处理以将导电材料沉积在沿着ELG的前边缘设置的第一间隙层上。然后沉积第二非磁性间隙层，并为写入极制造屏蔽。

7. 发明授权

US07713762B2 Testing the quality of lift-off processes in wafer fabrication 有权
标题翻译：测试晶圆制造中剥离过程的质量
公开(公告)号：US07713762B2
公开(公告)日：2010-05-11
申请号：US11957483
申请日：2007-12-17
申请人： Edward Hin Pong Lee , Jennifer Ai-Ming Leung
发明人： Edward Hin Pong Lee , Jennifer Ai-Ming Leung
IPC分类号： G01R31/26 , H01L21/66
CPC分类号： H01L22/34
摘要： Test methods and components are disclosed for testing the quality of lift-off processes in wafer fabrication. A wafer is populated with one or more test components along with the functional components. These test components are fabricated with holes in an insulation layer that is deposited between conductive layers, where the holes were created by the same or similar lift-off process that is used to fabricate the functional components on the wafer. The test components may then be measured in order to determine the quality of the holes created by the lift-off process. The quality of the lift-off process used to fabricate the functional components may then be determined based on the quality of the holes in the test components.
摘要翻译：公开了用于测试晶片制造中的剥离过程的质量的测试方法和组件。晶片与功能部件一起填充一个或多个测试部件。这些测试部件被制成在绝缘层上的孔，该绝缘层沉积在导电层之间，其中孔是通过用于制造晶片上的功能部件的相同或类似的剥离工艺产生的。然后可以测量测试部件以确定由剥离过程产生的孔的质量。然后可以基于测试部件中的孔的质量来确定用于制造功能部件的剥离过程的质量。

8. 发明申请

US20090154011A1 MAGNETIC WRITE HEAD HAVING HELICAL COIL WITH A FIN STRUCTURE FOR REDUCED HEAT INDUCED PROTRUSION 有权
标题翻译：具有用于减少热诱导的压缩的精细结构的具有螺旋线圈的磁性写头
公开(公告)号：US20090154011A1
公开(公告)日：2009-06-18
申请号：US11955277
申请日：2007-12-12
申请人： Wen-Chien David Hsiao , Edward Hin Lee , Jennifer Ai-Ming Leung
发明人： Wen-Chien David Hsiao , Edward Hin Lee , Jennifer Ai-Ming Leung
IPC分类号： G11B5/17
CPC分类号： G11B5/3123 , G11B5/3136
摘要： A magnetic write head having a write coil configured to dissipate heat away from the write head to minimize thermal protrusion. The write coil is formed as a helical coil having upper and lower leads that are connected by electrically conductive studs formed therebetween. The first and leads extend beyond the studs to form heat conducting fins that conduct heat away from the write head where it can be dissipated into surrounding structure.
摘要翻译：具有写入线圈的磁写头，该写入线圈构造成从写入头部散发热量以最小化热突起。写入线圈形成为螺旋线圈，其具有通过在它们之间形成的导电柱而连接的上引线和下引线。第一和引线延伸超过螺柱，以形成导热翅片，其将热量从写入头传导到可以被散发到周围结构中。

9. 发明申请

US20090153157A1 RESISTANCE MEASUREMENTS OF A HELICAL COIL 有权
标题翻译：螺旋线圈的电阻测量
公开(公告)号：US20090153157A1
公开(公告)日：2009-06-18
申请号：US11957484
申请日：2007-12-17
申请人： Edward Hin Pong Lee , Jennifer Ai-Ming Leung
发明人： Edward Hin Pong Lee , Jennifer Ai-Ming Leung
IPC分类号： G01R27/00
CPC分类号： G01R31/06
摘要： Test methods and components are disclosed for testing resistances of helical coils formed in magnetic recording heads. Helical coils in magnetic recording heads include a bottom coil structure, a top coil structure, and connecting structures that electrically connect the top and bottom coil structures. A test component is fabricated on the wafer along with the magnetic recording heads. The test component includes a bottom coil structure connected in series, and includes a top coil structure connected in series which is electrically disconnected from the bottom coil structure. Resistances of the top and bottom coil structures are measured in the test component. A total resistance of a helical coil is also measured. The resistance of the connecting structures in the helical coil may then be determined based on the resistance of the bottom coil structure, the resistance of the top coil structure, and the total resistance of the helical coil.
摘要翻译：公开了用于测试形成在磁记录头中的螺旋线圈的电阻的测试方法和部件。磁记录头中的螺旋线圈包括底部线圈结构，顶部线圈结构以及将顶部和底部线圈结构电连接的连接结构。测试部件与磁记录头一起制造在晶片上。测试部件包括串联连接的底部线圈结构，并且包括与底部线圈结构电气断开的串联连接的顶部线圈结构。在测试部件中测量顶部和底部线圈结构的电阻。还测量螺旋线圈的总电阻。然后可以基于底部线圈结构的电阻，顶部线圈结构的电阻和螺旋线圈的总电阻来确定螺旋线圈中的连接结构的电阻。

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