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1. 发明授权

US06607597B2 Method and apparatus for deposition of particles on surfaces 有权
标题翻译：用于在表面上沉积颗粒的方法和装置
公开(公告)号：US06607597B2
公开(公告)日：2003-08-19
申请号：US09772688
申请日：2001-01-30
申请人： James J. Sun , Benjamin Y. H. Liu
发明人： James J. Sun , Benjamin Y. H. Liu
IPC分类号： B05C1900
CPC分类号： G01N15/0266 , B05B7/0012 , G01N15/0255 , G01N15/0272 , G01N2015/0261 , G01N2015/0288
摘要： A deposition system is used for depositing particles onto a substrate, such as a wafer in a deposition chamber. The particles are carried in an aerosol that is generated by an atomizer that includes an impaction plate for removing large particles before the aerosol is discharged, and which has an output that is provided through a particle classifier to the deposition chamber. Various branches of flow lines are used such that the aerosol that has classified particles in it, is mixed with a clean dry gas prior to discharge into the deposition chamber, and selectively the aerosol can be directed to the deposition chamber without having the particles classified. The lines carrying the aerosol can be initially connected to a vacuum source that will quickly draw the aerosol closely adjacent to the deposition chamber to avoid delays between deposition cycles.
摘要翻译：沉积系统用于将颗粒沉积到诸如沉积室中的晶片的基底上。颗粒携带在由雾化器产生的气溶胶中，雾化器包括用于在气溶胶排出之前去除大颗粒的撞击板，并且具有通过颗粒分级器提供到沉积室的输出。使用流线的各种分支，使得其中分散颗粒的气溶胶在排放到沉积室之前与清洁的干燥气体混合，并且选择性地将气溶胶引导到沉积室，而不分类颗粒。携带气溶胶的线可以最初连接到真空源，该真空源将快速地将气溶胶紧密地吸附到沉积室附近，以避免沉积循环之间的延迟。

2. 发明授权

US06601777B2 Suspended particle container for an atomizer 失效
标题翻译：用于雾化器的悬浮颗粒容器
公开(公告)号：US06601777B2
公开(公告)日：2003-08-05
申请号：US09772707
申请日：2001-01-30
申请人： James J. Sun , Benjamin Y. H. Liu , Michael J. Rosen
发明人： James J. Sun , Benjamin Y. H. Liu , Michael J. Rosen
IPC分类号： B05B108
CPC分类号： H01L21/6715 , B05B17/0615
摘要： A container for containing a liquid that has suspended particles used for depositing on a substrate is formed of an electrically conductive material, and has a bottom wall. An atomizer for atomizing the liquid and particles to form an aerosol is mounted at an upper end thereof. A bottom wall of the container has a piezoelectric ultrasonic transducer attached to the wall. A high voltage connection to the piezoelectric transducer is in a recess formed by a lower skirt on the container and is mounted in an insulating block in the recess. A cup shaped insulating sleeve slips over the lower portions of the container and shields the high voltage connection from the exterior.
摘要翻译：用于容纳具有用于沉积在基底上的悬浮颗粒的液体的容器由导电材料形成，并且具有底壁。用于雾化液体和颗粒以形成气溶胶的雾化器安装在其上端。容器的底壁具有附接到壁的压电超声换能器。与压电换能器的高压连接在由容器上的下裙部形成的凹部中，并且安装在凹部中的绝缘块中。杯状绝缘套筒滑过容器的下部，并将高压连接从外部屏蔽。

3. 发明授权

US06409839B1 Method and apparatus for vapor generation and film deposition 有权
标题翻译：用于蒸气产生和膜沉积的方法和装置
公开(公告)号：US06409839B1
公开(公告)日：2002-06-25
申请号：US09435515
申请日：1999-11-08
申请人： James J. Sun , Benjamin Y. H. Liu
发明人： James J. Sun , Benjamin Y. H. Liu
IPC分类号： C23C1600
CPC分类号： C23C16/448
摘要： A vapor generator (19, 62) and connected chemical vapor deposition chamber (28) for providing a vapor for operations such as chemical vapor deposition has an atomizer (16, 16A, 38, 50) for forming an aerosol or droplet spray (36, 58, 74, 80) separate from a vaporization chamber (19, 62). The aerosol is passed into a heated vaporization chamber (19, 62) wherein the particles or droplets are flash vaporized and larger droplets are vaporized by direct contact with heated surfaces. The resulting gas/vapor stream is then used for chemical vapor deposition, in a separate chemical vapor deposition chamber (26). The vapor and gas stream is preferably passed through a restricted passageway (22, 44, 68) for mixing before being introduced into the chemical vapor deposition chamber (26).
摘要翻译：用于提供用于诸如化学气相沉积的操作的蒸汽的蒸汽发生器（19,62）和连接的化学气相沉积室（28）具有用于形成气溶胶或液滴喷雾的雾化器（16,16A，38,50） 58,74,80）与蒸发室（19,62）分离。气溶胶通入加热的蒸发室（19,62），其中颗粒或液滴被闪蒸，并且通过与加热的表面直接接触而使较大的液滴蒸发。然后在单独的化学气相沉积室（26）中将所得的气体/蒸气流用于化学气相沉积。蒸汽和气体流优选通过限制通道（22,44,68），以在被引入化学气相沉积室（26）之前进行混合。

4. 发明授权

US06805907B2 Method and apparatus for vapor generation and film deposition 有权
标题翻译：用于蒸气产生和膜沉积的方法和装置
公开(公告)号：US06805907B2
公开(公告)日：2004-10-19
申请号：US10154588
申请日：2002-05-24
申请人： James J. Sun , Benjamin Y. H. Liu
发明人： James J. Sun , Benjamin Y. H. Liu
IPC分类号： C23C1644
CPC分类号： C23C16/448
摘要： A vapor generator (19, 62) and connected chemical vapor deposition chamber (28) for providing a vapor for operations such as chemical vapor deposition has an atomizer (16, 16A, 38, 50) for forming an aerosol or droplet spray (36, 58, 74, 80) separate from a vaporization chamber (19, 62). The aerosol is passed into a heated vaporization chamber (19, 62) wherein the particles or droplets are flash vaporized and larger droplets are vaporized by direct contact with heated surfaces. The resulting gas/vapor stream is then used for chemical vapor deposition, in a separate chemical vapor deposition chamber (26). The vapor and gas stream is preferably passed through a restricted passageway (22, 44, 68) for mixing before being introduced into the chemical vapor deposition chamber (26).
摘要翻译：用于提供用于诸如化学气相沉积的操作的蒸汽的蒸汽发生器（19,62）和连接的化学气相沉积室（28）具有用于形成气溶胶或液滴喷雾的雾化器（16,16A，38,50） 58,74,80）与蒸发室（19,62）分离。气溶胶通入加热的蒸发室（19,62），其中颗粒或液滴被闪蒸，并且通过与加热的表面直接接触而使较大的液滴蒸发。然后在单独的化学气相沉积室（26）中将所得的气体/蒸气流用于化学气相沉积。蒸汽和气体流优选通过限制通道（22,44,68），以在被引入化学气相沉积室（26）之前进行混合。

5. 发明授权

US06364941B2 Compact high efficiency electrostatic precipitator for droplet aerosol collection 失效
标题翻译：紧凑型高效静电除尘器用于液滴气溶胶收集
公开(公告)号：US06364941B2
公开(公告)日：2002-04-02
申请号：US09829386
申请日：2001-04-09
申请人： Benjamin Y. H. Liu , James J. Sun
发明人： Benjamin Y. H. Liu , James J. Sun
IPC分类号： B03C336
CPC分类号： B03C3/41 , B03C3/017 , B03C3/16 , B03C3/70 , B03C2201/10 , F01N3/02 , Y02T10/20 , Y10S55/19
摘要： An electrostatic precipitator has a high voltage electrode including multiple wire segments that are positioned within a surrounding electrically conductive porous media having a central axis and wherein the electrode assembly extends along the central axis. The electrode assembly has a plurality of wire lengths positioned to extend in a direction along the longitudinal axis of the porous media, and the wire segments being arranged to have a substantially longer total length than the length of extension along the longitudinal axis. An aerosol containing droplets is passed into the interior of the porous media, and across the electrode, which is charged with a high voltage. The porous media is at a substantially lower or different voltage from the high voltage electrodes. Flow of the aerosol containing particles charged by the electrode passes through the porous media to the outlet and the charged particles are precipitated by the porous media. Electrostatic shields are provided around high voltage insulators to reduce the likelihood of contamination of the insulators, which causes unsatisfactory current leakage.
摘要翻译：静电除尘器具有包括多个线段的高电压电极，所述多个线段位于具有中心轴线的周围的导电多孔介质内，并且其中电极组件沿着中心轴线延伸。电极组件具有定位成沿着多孔介质的纵向轴线的方向延伸的多个线长度，并且线段布置成具有比沿着纵向轴线的延伸长度更长的总长度。含有液滴的气溶胶被传送到多孔介质的内部，并且穿过充满高电压的电极。多孔介质处于与高压电极基本上较低或不同的电压。由电极装载的含有气溶胶的颗粒的流动通过多孔介质到出口，带电粒子被多孔介质沉淀。在高压绝缘子周围提供静电屏蔽，以减少绝缘子污染的可能性，这导致不令人满意的电流泄漏。

6. 发明授权

US06349668B1 Method and apparatus for thin film deposition on large area substrates 失效
标题翻译：用于薄膜沉积在大面积基板上的方法和装置
公开(公告)号：US06349668B1
公开(公告)日：2002-02-26
申请号：US09067166
申请日：1998-04-27
申请人： James J. Sun , Benjamin Y. H. Liu , Virgil A. Marple
发明人： James J. Sun , Benjamin Y. H. Liu , Virgil A. Marple
IPC分类号： C23C1600
CPC分类号： C23C16/45595 , B05B5/00 , B05B5/03 , B05B7/0012 , B05B13/04 , B05D1/04 , C23C16/4486 , C23C16/453
摘要： A thin film deposition apparatus is used for applying thin films onto substrates, such as large panel displays, as well as integrated circuit devices, and includes a source of an ionized gas that is intermixed with an aerosol prior to deposition. The ionized gas causes the aerosol particles to take on an electrical charge. The aerosol containing the charged particles is concentrated in a virtual impactor and then provided to a shower head or orifice that is used for depositing the aerosol material onto the substrate. The shower head can be moved in a selected pattern to uniformly deposit aerosol particles as a thin film on the substrate.
摘要翻译：使用薄膜沉积装置将薄膜施加到诸如大型面板显示器的基板上，以及集成电路装置，并且包括在沉积之前与气溶胶混合的电离气体源。电离气体导致气溶胶颗粒承受电荷。将含有带电粒子的气溶胶集中在虚拟冲击器中，然后提供到用于将气溶胶材料沉积到基底上的喷头或孔口。淋浴头可以以选定的图案移动，以将作为薄膜的气溶胶颗粒均匀地沉积在基底上。

7. 发明授权

US06527821B2 Automatic condensed oil remover 有权
标题翻译：自动冷凝除油机
公开(公告)号：US06527821B2
公开(公告)日：2003-03-04
申请号：US10086328
申请日：2002-02-28
申请人： Benjamin Y. H. Liu , James J. Sun
发明人： Benjamin Y. H. Liu , James J. Sun
IPC分类号： B01D4642
CPC分类号： B03C3/41 , B03C3/017 , B03C3/16 , B03C3/70 , B03C2201/10 , F01N3/02 , Y02T10/20 , Y10S55/19
摘要： An automatic condensed oil remover for an intercooler of a diesel engine has a flow restrictor that is positioned between the intercooler and the diesel engine, an oil sump in the intercooler, and an oil tube carrying condensed oil from the oil sump to the diesel engine. The flow restrictor creates a pressure drop sufficient to force the oil to flow from the oil sump through the oil tube to the diesel engine.
摘要翻译：用于柴油发动机的中间冷却器的自动冷凝除油器具有位于中间冷却器和柴油发动机之间的限流器，中间冷却器中的油底壳和从油底壳至柴油发动机承载冷凝油的油管。限流器产生足以迫使油从油底壳通过油管流到柴油发动机的压降。

8. 发明授权

US06221136B1 Compact electrostatic precipitator for droplet aerosol collection 有权
标题翻译：用于液滴气溶胶收集的紧凑型静电除尘器
公开(公告)号：US06221136B1
公开(公告)日：2001-04-24
申请号：US09199894
申请日：1998-11-25
申请人： Benjamin Y. H. Liu , James J. Sun
发明人： Benjamin Y. H. Liu , James J. Sun
IPC分类号： B03C3011
CPC分类号： B03C3/41 , B03C3/017 , B03C3/16 , B03C3/70 , B03C2201/10 , F01N3/02 , Y02T10/20 , Y10S55/19
摘要： An electrostatic precipitator has a high voltage electrode including multiple wire segments that are positioned within a surrounding electrically conductive porous media having a central axis and wherein the electrode assembly extends along the central axis. The electrode assembly has a plurality of wire lengths positioned to extend in a direction along the longitudinal axis of the porous media, and the wire segments being arranged to have a substantially longer total length than the length of extension along the longitudinal axis. An aerosol containing droplets is passed into the interior of the porous media, and across the electrode, which is charged with a high voltage. The porous media is at a substantially lower or different voltage from the high voltage electrodes. Flow of the aerosol containing particles charged by the electrode passes through the porous media to the outlet and the charged particles are precipitated by the porous media. Electrostatic shields are provided around high voltage insulators to reduce the likelihood of contamination of the insulators, which causes unsatisfactory current leakage.
摘要翻译：静电除尘器具有包括多个线段的高电压电极，所述多个线段位于具有中心轴线的周围的导电多孔介质内，并且其中电极组件沿着中心轴线延伸。电极组件具有定位成沿着多孔介质的纵向轴线的方向延伸的多个线长度，并且线段布置成具有比沿着纵向轴线的延伸长度更长的总长度。含有液滴的气溶胶被传送到多孔介质的内部，并且穿过充满高电压的电极。多孔介质处于与高压电极基本上较低或不同的电压。由电极装载的含有气溶胶的颗粒的流动通过多孔介质到出口，带电粒子被多孔介质沉淀。在高压绝缘子周围提供静电屏蔽，以减少绝缘子污染的可能性，这导致不令人满意的电流泄漏。

9. 发明授权

US5916640A Method and apparatus for controlled particle deposition on surfaces 失效
标题翻译：在表面上控制颗粒沉积的方法和装置
公开(公告)号：US5916640A
公开(公告)日：1999-06-29
申请号：US706664
申请日：1996-09-06
申请人： Benjamin Y. H. Liu , James J. Sun
发明人： Benjamin Y. H. Liu , James J. Sun
IPC分类号： B05D1/04 , B05B1/26 , B05B5/043 , B05B7/00 , B05B7/30 , B05B17/06 , H01L21/316
CPC分类号： B05B17/0607 , B05B5/043 , B05B7/0012
摘要： An atomizer has a chamber holding a liquid containing particles of a desired material. Aerosol particles are formed by using an aspirating nozzle or ultrasonic vibrator and the aerosol particles are carried in a gas flow. The aerosol particles are treated by increasing the charge on the aerosol particles by contact with a high voltage electrode and the aerosol particles are passed through inertial separator stages to remove large aerosol particles from the flow so they are not discharged from the atomizer.
摘要翻译：雾化器具有容纳含有所需材料颗粒的液体的室。通过使用抽吸喷嘴或超声波振动器形成气溶胶颗粒，并且气溶胶颗粒被携带在气流中。通过与高压电极接触来增加气溶胶颗粒上的电荷来处理气溶胶颗粒，并且气溶胶颗粒通过惯性分离器级以从流中除去大的气溶胶颗粒，使得它们不从雾化器排出。

10. 发明授权

US06746539B2 Scanning deposition head for depositing particles on a wafer 失效
标题翻译：用于在晶片上沉积颗粒的扫描沉积头
公开(公告)号：US06746539B2
公开(公告)日：2004-06-08
申请号：US09772694
申请日：2001-01-30
申请人： James J. Sun , Benjamin Y. H. Liu
发明人： James J. Sun , Benjamin Y. H. Liu
IPC分类号： C23C1600
CPC分类号： H01L21/6715 , C23C18/00 , C30B7/00
摘要： A deposition chamber is formed in a housing that has a substrate carrier on the interior. The substrate carrier is rotatable about a central axis, and a particle deposition head is mounted in the chamber on a support that can be moved linearly along lines that are substantially radial to the central axis of the substrate carrier. The deposition head thus can be moved to different radial positions of a substrate carried on the substrate carrier as the carrier rotates during deposition from the head to provide for a wide variety of deposition patterns on the substrate. The deposition head has a pair of aerosol discharge openings, one being the end of a substantially tubular central passageway and the other being the end of an annular passageway that surrounds the central tubular passageway.
摘要翻译：在壳体中形成沉积室，其在内部具有衬底载体。衬底载体可以围绕中心轴线旋转，并且颗粒沉积头部安装在腔室中的支撑件上，该支撑件可以沿着基本上径向于衬底载体的中心轴线的线性线性移动。因此，当载体在从头部沉积期间旋转时，沉积头可移动到承载在基底载体上的基底的不同的径向位置，以在基底上提供各种各样的沉积图案。沉积头具有一对气溶胶排放口，一个是基本上管状的中央通道的端部，另一个是围绕中心管状通道的环形通道的端部。

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