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    • 1. 发明授权
    • Method and apparatus for deposition of particles on surfaces
    • 用于在表面上沉积颗粒的方法和装置
    • US06607597B2
    • 2003-08-19
    • US09772688
    • 2001-01-30
    • James J. SunBenjamin Y. H. Liu
    • James J. SunBenjamin Y. H. Liu
    • B05C1900
    • G01N15/0266B05B7/0012G01N15/0255G01N15/0272G01N2015/0261G01N2015/0288
    • A deposition system is used for depositing particles onto a substrate, such as a wafer in a deposition chamber. The particles are carried in an aerosol that is generated by an atomizer that includes an impaction plate for removing large particles before the aerosol is discharged, and which has an output that is provided through a particle classifier to the deposition chamber. Various branches of flow lines are used such that the aerosol that has classified particles in it, is mixed with a clean dry gas prior to discharge into the deposition chamber, and selectively the aerosol can be directed to the deposition chamber without having the particles classified. The lines carrying the aerosol can be initially connected to a vacuum source that will quickly draw the aerosol closely adjacent to the deposition chamber to avoid delays between deposition cycles.
    • 沉积系统用于将颗粒沉积到诸如沉积室中的晶片的基底上。 颗粒携带在由雾化器产生的气溶胶中,雾化器包括用于在气溶胶排出之前去除大颗粒的撞击板,并且具有通过颗粒分级器提供到沉积室的输出。 使用流线的各种分支,使得其中分散颗粒的气溶胶在排放到沉积室之前与清洁的干燥气体混合,并且选择性地将气溶胶引导到沉积室,而不分类颗粒。 携带气溶胶的线可以最初连接到真空源,该真空源将快速地将气溶胶紧密地吸附到沉积室附近,以避免沉积循环之间的延迟。
    • 3. 发明授权
    • Method and apparatus for vapor generation and film deposition
    • 用于蒸气产生和膜沉积的方法和装置
    • US06409839B1
    • 2002-06-25
    • US09435515
    • 1999-11-08
    • James J. SunBenjamin Y. H. Liu
    • James J. SunBenjamin Y. H. Liu
    • C23C1600
    • C23C16/448
    • A vapor generator (19, 62) and connected chemical vapor deposition chamber (28) for providing a vapor for operations such as chemical vapor deposition has an atomizer (16, 16A, 38, 50) for forming an aerosol or droplet spray (36, 58, 74, 80) separate from a vaporization chamber (19, 62). The aerosol is passed into a heated vaporization chamber (19, 62) wherein the particles or droplets are flash vaporized and larger droplets are vaporized by direct contact with heated surfaces. The resulting gas/vapor stream is then used for chemical vapor deposition, in a separate chemical vapor deposition chamber (26). The vapor and gas stream is preferably passed through a restricted passageway (22, 44, 68) for mixing before being introduced into the chemical vapor deposition chamber (26).
    • 用于提供用于诸如化学气相沉积的操作的蒸汽的蒸汽发生器(19,62)和连接的化学气相沉积室(28)具有用于形成气溶胶或液滴喷雾的雾化器(16,16A,38,50) 58,74,80)与蒸发室(19,62)分离。 气溶胶通入加热的蒸发室(19,62),其中颗粒或液滴被闪蒸,并且通过与加热的表面直接接触而使较大的液滴蒸发。 然后在单独的化学气相沉积室(26)中将所得的气体/蒸气流用于化学气相沉积。 蒸汽和气体流优选通过限制通道(22,44,68),以在被引入化学气相沉积室(26)之前进行混合。
    • 4. 发明授权
    • Method and apparatus for vapor generation and film deposition
    • 用于蒸气产生和膜沉积的方法和装置
    • US06805907B2
    • 2004-10-19
    • US10154588
    • 2002-05-24
    • James J. SunBenjamin Y. H. Liu
    • James J. SunBenjamin Y. H. Liu
    • C23C1644
    • C23C16/448
    • A vapor generator (19, 62) and connected chemical vapor deposition chamber (28) for providing a vapor for operations such as chemical vapor deposition has an atomizer (16, 16A, 38, 50) for forming an aerosol or droplet spray (36, 58, 74, 80) separate from a vaporization chamber (19, 62). The aerosol is passed into a heated vaporization chamber (19, 62) wherein the particles or droplets are flash vaporized and larger droplets are vaporized by direct contact with heated surfaces. The resulting gas/vapor stream is then used for chemical vapor deposition, in a separate chemical vapor deposition chamber (26). The vapor and gas stream is preferably passed through a restricted passageway (22, 44, 68) for mixing before being introduced into the chemical vapor deposition chamber (26).
    • 用于提供用于诸如化学气相沉积的操作的蒸汽的蒸汽发生器(19,62)和连接的化学气相沉积室(28)具有用于形成气溶胶或液滴喷雾的雾化器(16,16A,38,50) 58,74,80)与蒸发室(19,62)分离。 气溶胶通入加热的蒸发室(19,62),其中颗粒或液滴被闪蒸,并且通过与加热的表面直接接触而使较大的液滴蒸发。 然后在单独的化学气相沉积室(26)中将所得的气体/蒸气流用于化学气相沉积。 蒸汽和气体流优选通过限制通道(22,44,68),以在被引入化学气相沉积室(26)之前进行混合。
    • 5. 发明授权
    • Compact high efficiency electrostatic precipitator for droplet aerosol collection
    • 紧凑型高效静电除尘器用于液滴气溶胶收集
    • US06364941B2
    • 2002-04-02
    • US09829386
    • 2001-04-09
    • Benjamin Y. H. LiuJames J. Sun
    • Benjamin Y. H. LiuJames J. Sun
    • B03C336
    • B03C3/41B03C3/017B03C3/16B03C3/70B03C2201/10F01N3/02Y02T10/20Y10S55/19
    • An electrostatic precipitator has a high voltage electrode including multiple wire segments that are positioned within a surrounding electrically conductive porous media having a central axis and wherein the electrode assembly extends along the central axis. The electrode assembly has a plurality of wire lengths positioned to extend in a direction along the longitudinal axis of the porous media, and the wire segments being arranged to have a substantially longer total length than the length of extension along the longitudinal axis. An aerosol containing droplets is passed into the interior of the porous media, and across the electrode, which is charged with a high voltage. The porous media is at a substantially lower or different voltage from the high voltage electrodes. Flow of the aerosol containing particles charged by the electrode passes through the porous media to the outlet and the charged particles are precipitated by the porous media. Electrostatic shields are provided around high voltage insulators to reduce the likelihood of contamination of the insulators, which causes unsatisfactory current leakage.
    • 静电除尘器具有包括多个线段的高电压电极,所述多个线段位于具有中心轴线的周围的导电多孔介质内,并且其中电极组件沿着中心轴线延伸。 电极组件具有定位成沿着多孔介质的纵向轴线的方向延伸的多个线长度,并且线段布置成具有比沿着纵向轴线的延伸长度更长的总长度。 含有液滴的气溶胶被传送到多孔介质的内部,并且穿过充满高电压的电极。 多孔介质处于与高压电极基本上较低或不同的电压。 由电极装载的含有气溶胶的颗粒的流动通过多孔介质到出口,带电粒子被多孔介质沉淀。 在高压绝缘子周围提供静电屏蔽,以减少绝缘子污染的可能性,这导致不令人满意的电流泄漏。
    • 8. 发明授权
    • Compact electrostatic precipitator for droplet aerosol collection
    • 用于液滴气溶胶收集的紧凑型静电除尘器
    • US06221136B1
    • 2001-04-24
    • US09199894
    • 1998-11-25
    • Benjamin Y. H. LiuJames J. Sun
    • Benjamin Y. H. LiuJames J. Sun
    • B03C3011
    • B03C3/41B03C3/017B03C3/16B03C3/70B03C2201/10F01N3/02Y02T10/20Y10S55/19
    • An electrostatic precipitator has a high voltage electrode including multiple wire segments that are positioned within a surrounding electrically conductive porous media having a central axis and wherein the electrode assembly extends along the central axis. The electrode assembly has a plurality of wire lengths positioned to extend in a direction along the longitudinal axis of the porous media, and the wire segments being arranged to have a substantially longer total length than the length of extension along the longitudinal axis. An aerosol containing droplets is passed into the interior of the porous media, and across the electrode, which is charged with a high voltage. The porous media is at a substantially lower or different voltage from the high voltage electrodes. Flow of the aerosol containing particles charged by the electrode passes through the porous media to the outlet and the charged particles are precipitated by the porous media. Electrostatic shields are provided around high voltage insulators to reduce the likelihood of contamination of the insulators, which causes unsatisfactory current leakage.
    • 静电除尘器具有包括多个线段的高电压电极,所述多个线段位于具有中心轴线的周围的导电多孔介质内,并且其中电极组件沿着中心轴线延伸。 电极组件具有定位成沿着多孔介质的纵向轴线的方向延伸的多个线长度,并且线段布置成具有比沿着纵向轴线的延伸长度更长的总长度。 含有液滴的气溶胶被传送到多孔介质的内部,并且穿过充满高电压的电极。 多孔介质处于与高压电极基本上较低或不同的电压。 由电极装载的含有气溶胶的颗粒的流动通过多孔介质到出口,带电粒子被多孔介质沉淀。 在高压绝缘子周围提供静电屏蔽,以减少绝缘子污染的可能性,这导致不令人满意的电流泄漏。
    • 10. 发明授权
    • Scanning deposition head for depositing particles on a wafer
    • 用于在晶片上沉积颗粒的扫描沉积头
    • US06746539B2
    • 2004-06-08
    • US09772694
    • 2001-01-30
    • James J. SunBenjamin Y. H. Liu
    • James J. SunBenjamin Y. H. Liu
    • C23C1600
    • H01L21/6715C23C18/00C30B7/00
    • A deposition chamber is formed in a housing that has a substrate carrier on the interior. The substrate carrier is rotatable about a central axis, and a particle deposition head is mounted in the chamber on a support that can be moved linearly along lines that are substantially radial to the central axis of the substrate carrier. The deposition head thus can be moved to different radial positions of a substrate carried on the substrate carrier as the carrier rotates during deposition from the head to provide for a wide variety of deposition patterns on the substrate. The deposition head has a pair of aerosol discharge openings, one being the end of a substantially tubular central passageway and the other being the end of an annular passageway that surrounds the central tubular passageway.
    • 在壳体中形成沉积室,其在内部具有衬底载体。 衬底载体可以围绕中心轴线旋转,并且颗粒沉积头部安装在腔室中的支撑件上,该支撑件可以沿着基本上径向于衬底载体的中心轴线的线性线性移动。 因此,当载体在从头部沉积期间旋转时,沉积头可移动到承载在基底载体上的基底的不同的径向位置,以在基底上提供各种各样的沉积图案。 沉积头具有一对气溶胶排放口,一个是基本上管状的中央通道的端部,另一个是围绕中心管状通道的环形通道的端部。