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    • 3. 发明授权
    • Bipolar plasma source, plasma sheet source, and effusion cell utilizing a bipolar plasma source
    • 双极等离子体源,血浆片源和使用双极型血浆源的积液细胞
    • US06444945B1
    • 2002-09-03
    • US09818680
    • 2001-03-28
    • Peter MaschwitzJaime Li
    • Peter MaschwitzJaime Li
    • B23K1000
    • C23C14/243H01J37/32009H01J37/32596H05H1/46H05H2001/466
    • A plasma source includes a structure made up of two hollow cathode shapes connected to a bipolar AC power supply. The bipolar power supply alternately drives one hollow cathode to a negative voltage while the opposite hollow cathode is driven to a positive voltage. As one of the two hollow cathode shapes is driven negative, the hollow cathode discharge forms within the corresponding cavity. The other cathode then forms an anode, causing electrons to escape the plasma and travel to the other side, completing the electric circuit. The plasma generator thus formed may be used as a heat source for an effusion cell to form a plasma from a reactant gas, or to increase the reactivity of gas situated between a vacuum deposition source and a substrate to be coated.
    • 等离子体源包括由连接到双极性AC电源的两个空心阴极形状构成的结构。 双极电源交替地将一个空心阴极驱动到负电压,而将相对的空心阴极驱动到正电压。 由于两个空心阴极形状之一被驱动为负极,所以在相应的空腔内形成空心阴极放电。 另一个阴极然后形成阳极,使电子逃离等离子体并行进到另一侧,完成电路。 如此形成的等离子体发生器可以用作积液单元的热源,以形成来自反应气体的等离子体,或者增加位于真空沉积源和要被涂覆的基底之间的气体的反应性。