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    • 4. 发明申请
    • NOZZLE AND METHOD OF MAKING SAME
    • 喷嘴及其制作方法
    • US20120126038A1
    • 2012-05-24
    • US13387550
    • 2010-07-29
    • Barry S. CarpenterJaime B. WilloughbyJennifer J. Sahlin
    • Barry S. CarpenterJaime B. WilloughbyJennifer J. Sahlin
    • B05B1/00B29C35/08C25D1/10
    • F02M61/1833B05B1/06B23P15/16B29C59/00C23C14/14C23C14/58C25D3/12C25D5/48C25D7/00F02M61/168F02M61/1806F02M61/184F02M2200/8069Y10T29/49432Y10T29/49433
    • Nozzle and a method of making the same are disclosed. The method includes the steps of: (a) providing a first material that is capable of undergoing multiphoton reaction; (b) forming a first microstructured pattern in the first material using a multiphoton process; (c) replicating the first microstructured pattern in a second material that is different than the first material to make a first mold that includes a second microstructured pattern in the second material; (d) replicating the second microstructured pattern in a third material different than the first and second materials to make a second mold that includes a third microstructured pattern that includes a plurality of microstructures in the third material; (e) planarizing the third microstructured pattern of the second mold with a layer of a fourth material different than the third material, where the layer exposes tops of the microstructures in the plurality of microstructures in the third microstructured pattern; and (f) removing the third material resulting in a nozzle that includes a plurality of holes in the fourth material, where the holes correspond to the plurality of microstructures in the third microstructured pattern.
    • 公开了喷嘴及其制造方法。 该方法包括以下步骤:(a)提供能够进行多光子反应的第一材料; (b)使用多光子过程在所述第一材料中形成第一微结构图案; (c)以与所述第一材料不同的第二材料复制所述第一微结构图案以制造包括所述第二材料中的第二微结构图案的第一模具; (d)将第二微结构图案复制在不同于第一和第二材料的第三材料中,以制造第二模具,其包括在第三材料中包括多个微结构的第三微结构图案; (e)用不同于第三材料的第四材料层平坦化第二模具的第三微结构图案,其中该层暴露第三微结构图案中的多个微结构中的微结构的顶部; 和(f)去除第三材料,导致在第四材料中包括多个孔的喷嘴,其中孔对应于第三微结构图案中的多个微结构。