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    • 5. 发明申请
    • NOZZLE AND METHOD OF MAKING SAME
    • 喷嘴及其制作方法
    • US20120126038A1
    • 2012-05-24
    • US13387550
    • 2010-07-29
    • Barry S. CarpenterJaime B. WilloughbyJennifer J. Sahlin
    • Barry S. CarpenterJaime B. WilloughbyJennifer J. Sahlin
    • B05B1/00B29C35/08C25D1/10
    • F02M61/1833B05B1/06B23P15/16B29C59/00C23C14/14C23C14/58C25D3/12C25D5/48C25D7/00F02M61/168F02M61/1806F02M61/184F02M2200/8069Y10T29/49432Y10T29/49433
    • Nozzle and a method of making the same are disclosed. The method includes the steps of: (a) providing a first material that is capable of undergoing multiphoton reaction; (b) forming a first microstructured pattern in the first material using a multiphoton process; (c) replicating the first microstructured pattern in a second material that is different than the first material to make a first mold that includes a second microstructured pattern in the second material; (d) replicating the second microstructured pattern in a third material different than the first and second materials to make a second mold that includes a third microstructured pattern that includes a plurality of microstructures in the third material; (e) planarizing the third microstructured pattern of the second mold with a layer of a fourth material different than the third material, where the layer exposes tops of the microstructures in the plurality of microstructures in the third microstructured pattern; and (f) removing the third material resulting in a nozzle that includes a plurality of holes in the fourth material, where the holes correspond to the plurality of microstructures in the third microstructured pattern.
    • 公开了喷嘴及其制造方法。 该方法包括以下步骤:(a)提供能够进行多光子反应的第一材料; (b)使用多光子过程在所述第一材料中形成第一微结构图案; (c)以与所述第一材料不同的第二材料复制所述第一微结构图案以制造包括所述第二材料中的第二微结构图案的第一模具; (d)将第二微结构图案复制在不同于第一和第二材料的第三材料中,以制造第二模具,其包括在第三材料中包括多个微结构的第三微结构图案; (e)用不同于第三材料的第四材料层平坦化第二模具的第三微结构图案,其中该层暴露第三微结构图案中的多个微结构中的微结构的顶部; 和(f)去除第三材料,导致在第四材料中包括多个孔的喷嘴,其中孔对应于第三微结构图案中的多个微结构。
    • 10. 发明授权
    • Packaged optical micro-mechanical device
    • 封装光学微机械装置
    • US06798954B2
    • 2004-09-28
    • US09911950
    • 2001-07-24
    • Barry S. CarpenterKathy L. HagenRobert G. Smith
    • Barry S. CarpenterKathy L. HagenRobert G. Smith
    • G02B635
    • B81B7/007G02B6/4231
    • A packaged optical micro-mechanical device. A die includes one or more optical micro-mechanical devices on a first surface of a substrate. The first surface includes a die reference surface. A package frame includes an aperture and a package frame reference surface proximate the aperture adapted to receive the die reference surface such that the optical micro-mechanical devices are located in the aperture. One or more V-grooves are positioned relative to an optical interface reference plane adjacent to the micro-mechanical devices and terminating adjacent to the aperture. One or more optical fibers are located in the V-grooves optically coupled with one or more of the optical micro-mechanical devices.
    • 封装的光学微机械装置。 模具包括在基板的第一表面上的一个或多个光学微机械装置。 第一表面包括管芯参考表面。 封装框架包括孔和接近孔的封装框架参考表面,其适于接收管芯参考表面,使得光学微机械装置位于孔中。 一个或多个V形槽相对于与微机械装置相邻的光学界面参考平面定位并且邻近孔径终止。 一个或多个光纤位于与一个或多个光学微机械装置光学耦合的V形槽中。