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    • 4. 发明授权
    • Device for production of a plasma sheet
    • 用于制造等离子体片的装置
    • US07574974B2
    • 2009-08-18
    • US10516998
    • 2003-06-03
    • Thierry Léon LagardeAna LacosteJacques PelletierYves Alban-Marie Arnal
    • Thierry Léon LagardeAna LacosteJacques PelletierYves Alban-Marie Arnal
    • C23C16/00C23F1/00H01L21/306
    • H01J37/32211H01J37/32192H01J37/32678H05H1/46
    • The invention relates to a device for the production of a plasma (16) within a housing comprising means for the generation of energy in the microwave spectrum, for the excitation of the plasma, said means comprise at least one basic plasma excitation device with a coaxial applicator (4) of microwave energy, one of the ends of which is connected to a production source (7) of microwave energy, the other end (8) of which is directed to the gas to be excited within the housing. The device is characterised in that each basic plasma excitation device is arranged in the wall (3) of the housing, each applicator (4) having a central core (5) which is essentially flush with the wall of the housing. The central core and the thickness of the wall (3) of the housing are separated by a space (6) coaxial to the central core, said space being totally filled, at least at the end of each applicator, by a dielectric material (14), such that said material is essentially flush with the level of the wall of the housing.
    • 本发明涉及一种用于在壳体内生产等离子体(16)的装置,包括用于在微波光谱中产生能量的装置,用于激发等离子体,所述装置包括至少一个具有同轴的等离子体激发装置 微波能量的施加器(4),其一端连接到微波能量的生产源(7),另一端(8)被引导到在壳体内被激发的气体。 该装置的特征在于,每个基本等离子体激发装置布置在壳体的壁(3)中,每个施加器(4)具有基本上与壳体的壁齐平的中心芯(5)。 壳体的壁(3)的中心芯和厚度由与中心芯同轴的空间(6)分开,所述空间至少在每个施加器的端部由介电材料(14)完全填充 ),使得所述材料基本上与壳体的壁的水平面齐平。
    • 5. 发明申请
    • Electron source
    • 电子源
    • US20050062387A1
    • 2005-03-24
    • US10497894
    • 2002-12-06
    • Ana LacosteJacques PelletierYves Arnal
    • Ana LacosteJacques PelletierYves Arnal
    • H05H1/46H01J3/02H01J37/077H01J17/26H01J27/16
    • H01J37/077H01J3/025H01J2237/0041
    • The invention concerns a source supplying an adjustable energy electron beam, comprising a plasma chamber (P) consisting of an enclosure (1) having an inner surface of a first value (S1) and an extraction gate (2) having a surface of a second value (S2), the gate potential being different from that of the enclosure and adjustable. The invention is characterized in that the plasma is excited and confined in multipolar or multidipolar magnetic structures, the ratio of the second value (S2) over the first value (S1) being close to: D=1/β {square root}2πcme/mi exp (−½), wherein: β is the proportion of electrons of the plasma P, me the electron mass, and mi is the mass of positively charged ions.
    • 本发明涉及提供可调节能量电子束的源,包括由具有第一值(S1)的内表面的外壳(1)和具有第二值的表面的抽出栅极(2)组成的等离子体室(P) 值(S2),门电位与外壳不同,可调。 本发明的特征在于,等离子体被激发并限制在多极或多极磁结构中,第二值(S2)超过第一值(S1)的比接近于:D = 1 /β(平方根)2picme / mi exp(-½),其中:β是等离子体P的电子比例,me是电子质量,mi是带正电荷的离子的质量。
    • 7. 发明授权
    • Method and device for exciting a plasma using microwaves at the
electronic cyclotronic resonance
    • 在电子回旋共振下使用微波激发等离子体的方法和装置
    • US4745337A
    • 1988-05-17
    • US871107
    • 1986-06-05
    • Michel PichotJacques PelletierYves Arnal
    • Michel PichotJacques PelletierYves Arnal
    • H01J37/32H05H1/11H05H1/18H05H1/46H01J27/00B23K9/00
    • H01J37/32623H01J37/32678H01J37/32688H05H1/11H05H1/18H05H1/46
    • Method and device for exciting a plasma using microwaves at the electronic cyclotronic resonance.The device for exciting a gaseous medium by microwaves comprises at least a co-axial structure for introducing the microwave power inside a multipolar confinement structure and at least one antenna coupled to said co-axial structure for the localized introduction of the microwave energy inside said multipolar magnetic confinement structure which comprises a set of permanent magnets creating a network of surfaces having a constant magnetic field and presenting locally an intensity which corresponds to the electronic cyclotronic resonance, and said antenna being positioned on said network of surfaces of constant magnetic field in an area of intensity corresponding to the electronic cyclotronic resonance.The invention finds an application in the creation of a homogenous, isotropic plasma of large volume and high density, which is free of fields in the area of use.
    • 在电子回旋共振下使用微波激发等离子体的方法和装置。 用于通过微波激发气体介质的装置包括用于将微波功率引入多极限制结构内的至少一个同轴结构和耦合到所述同轴结构的至少一个天线,用于将微波能量局部引入所述多极 磁约束结构,其包括一组永磁体,其形成具有恒定磁场的表面网络,并且局部呈现对应于电子回旋共振的强度,并且所述天线位于所述恒定磁场的表面网络上的区域 的强度对应于电子回旋共振。 本发明可以应用于产生大体积,高密度的均质,各向同性的等离子体,其在使用领域中没有现场。
    • 8. 发明授权
    • Device for forming a web of parallel threads
    • 用于形成平行线的网的装置
    • US4249981A
    • 1981-02-10
    • US973533
    • 1978-12-26
    • Jacques PelletierRegis Berliet
    • Jacques PelletierRegis Berliet
    • D04H3/045D04H3/04
    • D04H3/045
    • The invention relates to a device for producing weft webs consisting of parallel spaced threads, in which at least one weft thread is fed around positioning, holding and advancing elements which consist of continuous endless belts which support a plurality of juxtaposed blocks which have a length corresponding substantially to the desired spacing between two consecutive weft threads. The blocks are in contact with one another in the rectilinear portions of the endless belt and spaced in the curved portion as they pass around drive rollers. At least one reciprocating thread guide has a free end which passes between the blocks in the curved portion of each endless belt, to feed thread between the blocks.
    • 本发明涉及一种用于生产纬线的装置,其由平行隔开的螺纹组成,其中至少一根纬纱被供给围绕定位,保持和前进的元件,所述元件由连续的环形带组成,所述连续环形带支撑多个并列的块, 基本上达到两条连续纬纱之间的所需间距。 这些块在环形带的直线部分中彼此接触,并且当其绕过驱动辊时在弯曲部分间隔开。 至少一个往复导纱器具有自由端,该自由端在每个环形带的弯曲部分中的块之间通过,以在块之间供给线。