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    • 2. 发明申请
    • CHEMICAL DELIVERY SYSTEM
    • 化学输送系统
    • WO2012148802A3
    • 2013-03-21
    • PCT/US2012034375
    • 2012-04-20
    • APPLIED MATERIALS INCJOSEPHSON MARCEL ECARLSON DAVID KJUMPER STEVESANCHEZ ERROL ANTONIO C
    • JOSEPHSON MARCEL ECARLSON DAVID KJUMPER STEVESANCHEZ ERROL ANTONIO C
    • H01L21/02
    • G05D7/0641Y10T137/4259Y10T137/6416Y10T137/7043Y10T137/8593
    • Embodiments of chemical delivery systems disclosed herein may include an enclosure; a first compartment disposed within the enclosure and having a plurality of first conduits to carry a first set of chemical species, the first compartment further having a first draw opening and a first exhaust opening to facilitate flow of a purge gas through the first compartment; and a second compartment disposed within the enclosure and having a plurality of second conduits to carry a second set of chemical species, the second compartment further having a second draw opening and a second exhaust opening to facilitate flow of the purge gas through the second compartment, wherein the first set of chemical species is different than the second set of chemical species, and wherein a draw velocity of the purge gas through the second compartment is higher than the draw velocity of the purge gas through the first compartment.
    • 本文公开的化学品递送系统的实施例可以包括外壳; 设置在所述外壳内并具有多个第一导管以承载第一组化学物质的第一隔室,所述第一隔室还具有第一抽吸开口和第一排气口,以促进吹扫气体流过所述第一隔室; 以及设置在所述外壳内并且具有多个第二导管以携带第二组化学物质的第二隔室,所述第二隔室还具有第二牵引开口和第二排气口,以促进所述吹扫气体流过所述第二隔室, 其中所述第一组化学物质不同于所述第二组化学物质,并且其中通过所述第二隔室的吹扫气体的抽吸速度高于通过所述第一隔室的吹扫气体的抽吸速度。