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1. 发明申请

US20120234497A1 DEBONDER TO MANUFACTURE SEMICONDUCTOR AND DEBONDING METHOD THEREOF 审中-公开
标题翻译：制造半导体的制约因素及其制约方法
公开(公告)号：US20120234497A1
公开(公告)日：2012-09-20
申请号：US13418795
申请日：2012-03-13
申请人： Il Young Han , Ho Geon Song , Sang Wook Park , Ji-Seok Hong
发明人： Il Young Han , Ho Geon Song , Sang Wook Park , Ji-Seok Hong
IPC分类号： B32B38/10
CPC分类号： H01L21/67092 , H01L21/6835 , H01L24/16 , H01L24/32 , H01L24/73 , H01L24/799 , H01L24/94 , H01L24/96 , H01L24/98 , H01L25/0652 , H01L2221/6834 , H01L2221/68372 , H01L2221/68381 , H01L2224/16145 , H01L2224/32145 , H01L2224/73204 , H01L2224/7999 , H01L2224/94 , H01L2225/06513 , H01L2225/06541 , H01L2225/06565 , H01L2924/01006 , H01L2924/01033 , H01L2924/12042 , H01L2924/14 , Y10T156/11 , Y10T156/19 , H01L2224/81 , H01L2924/00
摘要： A debonder to manufacture a semiconductor that includes: a stage to support a carrier wafer that is attached to a chip stack assembly by a temporary adhesive layer coated on the surface of the carrier wafer; a chuck arranged above the stage to selectively secure the chip stack assembly; a lifting unit to lift the chuck from the stage; a lateral driving unit to move the chuck laterally with respect to the stage; and a controller to control the lifting unit and the lateral driving unit.
摘要翻译：一种制造半导体的剥离器，包括：支撑通过涂覆在载体晶片的表面上的临时粘合剂层附着到芯片堆叠组件的载体晶片的载物台; 卡盘，布置在平台上方以选择性地固定芯片堆叠组件; 提升装置，用于将卡盘从舞台上抬起; 横向驱动单元，用于相对于所述平台横向移动所述卡盘; 以及控制器，用于控制提升单元和横向驱动单元。

2. 发明授权

US09040884B2 Apparatus for fabricating semiconductor devices 有权
标题翻译：用于制造半导体器件的装置
公开(公告)号：US09040884B2
公开(公告)日：2015-05-26
申请号：US13412674
申请日：2012-03-06
申请人： Il-Young Han , Jae-Sung Kwon , Sang-Wook Park , Won-Keun Kim
发明人： Il-Young Han , Jae-Sung Kwon , Sang-Wook Park , Won-Keun Kim
IPC分类号： H05B6/80 , H01L21/00 , H01L21/263 , H01L21/67
CPC分类号： H01L21/67115 , H01L21/67178 , H01L21/6719 , H05B6/80
摘要： An apparatus for fabricating semiconductor devices includes a chamber having a bottom plane, a side wall and a lid. An irradiating unit is at an interior of the chamber. A substrate mounting unit is between the bottom plane of the chamber and the irradiating unit. The irradiating unit includes an irradiating tube and a hole penetrating the central region of the irradiating tube. The irradiating tube has a hollow disk shape, and a lower surface of the irradiating tube is opened to the substrate mounting unit.
摘要翻译：一种用于制造半导体器件的设备包括具有底平面，侧壁和盖的室。照射单元位于室的内部。基板安装单元位于室的底平面和照射单元之间。照射单元包括照射管和穿透照射管的中心区域的孔。照射管具有中空盘形状，并且照射管的下表面朝向基板安装单元打开。

3. 发明申请

US20090141275A1 ALIGNMENT INSPECTION METHOD AND ALIGNMENT INSPECTION APPARATUS 审中-公开
标题翻译：对准检查方法和对齐检查装置
公开(公告)号：US20090141275A1
公开(公告)日：2009-06-04
申请号：US12327066
申请日：2008-12-03
申请人： Il-Young HAN , Mitsuo Umemoto , Ki-Kwon Jeong , Young-shin Choi
发明人： Il-Young HAN , Mitsuo Umemoto , Ki-Kwon Jeong , Young-shin Choi
IPC分类号： G01B11/00 , B32B37/12
CPC分类号： G01B11/272 , B32B37/06 , B32B37/1018 , B32B38/1841 , B32B41/00 , B32B2310/028 , B32B2457/08
摘要： A method of inspecting the alignment of a second structure with respect to a first structure, including emitting light from a first plane of a first structure to a second plane of a second structure in a first direction perpendicular to the first plane of the first structure, the first plane and the second plane facing each other. The incident light can be reflected from the second plane toward the first plane in a second direction parallel with the first direction. The position of the reflected light can be detected to inspect the alignment of the second structure with respect to the first structure.
摘要翻译：一种检查第二结构相对于第一结构的对准的方法，包括在垂直于第一结构的第一平面的第一方向上将光从第一结构的第一平面发射到第二结构的第二平面，第一平面和第二平面彼此面对。入射光可以在与第一方向平行的第二方向上从第二平面朝向第一平面反射。可以检测反射光的位置，以检查第二结构相对于第一结构的对准。

4. 发明授权

US06535538B1 Surface emitting laser device with monolithically integrated monitor photodetector 失效
标题翻译：具有单片集成显示器光电探测器的表面发射激光器件
公开(公告)号：US06535538B1
公开(公告)日：2003-03-18
申请号：US09705901
申请日：2000-11-06
申请人： Yong Hee Lee , Il Young Han
发明人： Yong Hee Lee , Il Young Han
IPC分类号： H01S500
CPC分类号： H01S5/0264 , H01S5/18311 , H01S5/18333 , H01S5/18338 , H01S5/1835
摘要： Disclosed is a surface emitting laser device with a monolithically integrated monitor photodetector, which is combined with an automatic power control circuit, thereby being capable of more accurately controlling the surface emitting laser output power. A method is also disclosed, which is adapted to fabricate the surface emitting laser device. In accordance with, the present invention, the surface emitting laser device includes insulating layers each sandwiched between an intrinsic semiconductor layer and a doped semiconductor layer in a monitor photodetector adapted to partially absorb light emitted from a surface emitting laser, thereby outputting a detect signal for the light. The insulating layers serve to remove photocurrent resulting from spontaneous emission light emitted from the surface emitting laser. By this configuration, it is possible to accurately control the power of light emitted from the surface emitting laser through a laser window.
摘要翻译：公开了一种具有单片集成监视器光电检测器的表面发射激光器件，其与自动功率控制电路组合，从而能够更精确地控制表面发射激光输出功率。还公开了一种适于制造表面发射激光器件的方法。根据本发明，表面发射激光器件包括在监测光电检测器中夹在本征半导体层和掺杂半导体层之间的绝缘层，其适于部分地吸收从表面发射激光器发射的光，从而输出检测信号，光。绝缘层用于去除从表面发射激光器发射的自发发射光产生的光电流。通过这种结构，可以精确地控制通过激光窗从表面发射激光器发射的光的功率。

5. 发明申请

US20120298656A1 APPARATUS FOR FABRICATING SEMICONDUCTOR DEVICES 有权
标题翻译：用于制造半导体器件的装置
公开(公告)号：US20120298656A1
公开(公告)日：2012-11-29
申请号：US13412674
申请日：2012-03-06
申请人： Il- Young Han , Jae-Sung Kwon , Sang-Wook Park , Won-Keun Kim
发明人： Il- Young Han , Jae-Sung Kwon , Sang-Wook Park , Won-Keun Kim
IPC分类号： H05B6/80
CPC分类号： H01L21/67115 , H01L21/67178 , H01L21/6719 , H05B6/80
摘要： An apparatus for fabricating semiconductor devices includes a chamber having a bottom plane, a side wall and a lid. An irradiating unit is at an interior of the chamber. A substrate mounting unit is between the bottom plane of the chamber and the irradiating unit. The irradiating unit includes an irradiating tube and a hole penetrating the central region of the irradiating tube. The irradiating tube has a hollow disk shape, and a lower surface of the irradiating tube is opened to the substrate mounting unit.
摘要翻译：一种用于制造半导体器件的设备包括具有底平面，侧壁和盖的室。照射单元位于室的内部。基板安装单元位于室的底平面和照射单元之间。照射单元包括照射管和穿透照射管的中心区域的孔。照射管具有中空盘形状，并且照射管的下表面朝向基板安装单元打开。

6. 发明申请

US20090134202A1 REFLOW APPARATUS AND METHOD 审中-公开
标题翻译：回流装置和方法
公开(公告)号：US20090134202A1
公开(公告)日：2009-05-28
申请号：US12324458
申请日：2008-11-26
申请人： Min-Ill KIM , Il-Young HAN , Ki-Kwon JEONG
发明人： Min-Ill KIM , Il-Young HAN , Ki-Kwon JEONG
IPC分类号： B23K37/00 , H05B6/04
CPC分类号： B23K3/0475 , B23K2101/40 , H01L2924/0002 , H05K3/3436 , H01L2924/00
摘要： Provided are a reflow apparatus and method. The reflow apparatus includes a loader unit, a heating unit, an unloader unit, and a moving unit. The loader unit has an input module and an input stacker. Processing objects are stored in vertical stacks in magazines, and a plurality of magazines is stored in the input stacker. The magazines stored in the input stacker are moved to the input module and are introduced into the heating unit by the moving unit. Solder balls provided on the processing objects within the heating unit are quickly processed using an induction heating method. The processing objects that have undergone a reflow process are loaded in a magazine on an output module of the unloader unit and are then stored in an output stacker.
摘要翻译：提供回流装置和方法。回流装置包括加载单元，加热单元，卸载单元和移动单元。装载单元具有输入模块和输入堆垛机。处理对象存储在杂志中的垂直堆栈中，并且多个杂志被存储在输入堆叠器中。存储在输入堆叠器中的杂志被移动到输入模块，并通过移动单元被引入加热单元。使用感应加热方法快速地处理设置在加热单元内的加工对象上的焊球。已经经历回流处理的处理对象被装载在卸载单元的输出模块的仓库中，然后存储在输出堆垛机中。

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