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    • 1. 发明专利
    • Process control monitor for interferometric modulator
    • 干涉仪调制器的过程控制监视器
    • JP2008046603A
    • 2008-02-28
    • JP2007150880
    • 2007-06-06
    • Idc Llcアイディーシー、エルエルシー
    • CUMMINGS WILLIAM JGALLY BRIAN J
    • B81C99/00G02B26/08G09F9/00
    • B81C99/004B81B2201/042G01N21/55G01N21/9501G02B26/001
    • PROBLEM TO BE SOLVED: To provide a process control monitor for interferometric modulators for reasons that errors can occur during the manufacturing of MEMS devices, that detecting the errors and the source of the errors can present a problem in the quality control and optimization of MEMS devices, and that accordingly there is a need for structures and methods for monitoring manufacturing processes and their results. SOLUTION: Process control monitors 100, 102, 104 are disclosed that are produced using at least some of the same process steps used to manufacture a MEMS device 108. Analysis of the process control monitors 100, 102, 104 can provide information regarding properties of the MEMS device 108 and components or sub-components in the device. This information can be used to identify errors in processing or to optimize the MEMS device 108. In some embodiments, analysis of the process control monitors 100, 102, 104 may utilize optical measurements. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:为了在MEMS器件制造过程中发生错误的原因提供干涉式调制器的过程控制监视器,检测误差和误差源可能会导致质量控制和优化中的问题 的MEMS器件,因此,需要用于监测制造工艺及其结果的结构和方法。 公开了使用用于制造MEMS器件108的至少一些相同工艺步骤生产的过程控制监视器100,102,104。过程控制监视器100,102,104的分析可以提供关于 MEMS器件108的特性以及器件中的部件或子部件。 该信息可用于识别处理中的错误或优化MEMS器件108.在一些实施例中,过程控制监视器100,102,104的分析可以利用光学测量。 版权所有(C)2008,JPO&INPIT
    • 3. 发明专利
    • Process control monitor regarding interferometric modulator
    • 关于干涉仪调制器的过程控制监视器
    • JP2007301719A
    • 2007-11-22
    • JP2007150861
    • 2007-06-06
    • Idc Llcアイディーシー、エルエルシー
    • CUMMINGS WILLIAM JGALLY BRIAN J
    • B81C99/00
    • B81C99/004B81B2201/042G01N21/55G01N21/9501G02B26/001
    • PROBLEM TO BE SOLVED: To provide a process control monitor regarding an interferometric modulator. SOLUTION: Process control monitors 100, 102 and 104 manufactured by using at least a part of the same process step as that used for manufacturing a MEMS device 108 are disclosed. By analyzing the process control monitors 100, 102 and 104, information on properties of the MEMS device 108 and components or sub components in the device 108 can be provided. The information can be used to identify an error in processing or optimize the MEMS device 108. In some embodiments, optical measured values can be used in the analysis of the process control monitors 100, 102 and 104. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:提供关于干涉式调制器的过程控制监视器。 解决方案:公开了通过使用与用于制造MEMS器件108的工艺步骤相同的工艺步骤的至少一部分制造的工艺控制监视器100,102和104。 通过分析过程控制监视器100,102和104,可以提供关于MEMS设备108的属性和设备108中的组件或子组件的信息。 该信息可用于识别处理或优化MEMS器件108中的错误。在一些实施例中,光学测量值可用于过程控制监视器100,102和104的分析。(C) 2008年,日本特许厅和INPIT
    • 4. 发明专利
    • Apparatus and method for reducing perceived color shift
    • 减少感知色差的装置和方法
    • JP2006113559A
    • 2006-04-27
    • JP2005260607
    • 2005-09-08
    • Idc Llcアイディーシー、エルエルシー
    • GALLY BRIAN JKOTHARI MANISH
    • G02B26/00G09F9/00G09F9/30G09G3/34
    • G02B26/001G02B5/20
    • PROBLEM TO BE SOLVED: To provide an apparatus and a method for reducing a perceived color shift. SOLUTION: An apparatus and a method for reducing perceived color shift as a function of a viewing angle is disclosed. One embodiment is a display device that includes a color light modulator and a color filter. The filter is configured to filter wavelengths of light that would be perceived as color shifted light when reflected by the modulator at an off-axis viewing angle. Another embodiment includes a color light modulator and a color light source configured to provide light having a spectral content that lacks the wavelengths that would be perceived as color shifted light by a view of the display at an off-axis viewing angle. Another embodiment is a method of making such display devices. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种减少感知色移的装置和方法。 公开了一种用于减少感知色移作为视角的函数的装置和方法。 一个实施例是包括彩色调制器和滤色器的显示装置。 滤光器被配置为滤除在离轴观察角度被调制器反射时被感知为偏移光的光的波长。 另一个实施例包括彩色光调制器和彩色光源,其被配置为提供具有光谱含量的光,所述光谱内容缺乏通过视轴处于离轴视角的显示器的视觉而被感知为偏移光的波长。 另一实施例是制造这种显示装置的方法。 版权所有(C)2006,JPO&NCIPI
    • 9. 发明专利
    • System and method of reducing color shift in display
    • 减少彩色显示的系统和方法
    • JP2006099061A
    • 2006-04-13
    • JP2005226115
    • 2005-08-04
    • Idc Llcアイディーシー、エルエルシー
    • SAMPSELL JEFFREY B
    • G02B26/02
    • G02B26/001
    • PROBLEM TO BE SOLVED: To reduce color shift that may be seen as the viewing angle or light ange changes in a display using MEMS (Microelectromechanical systems). SOLUTION: In an interferometric modulator display 100, a light source 102 transmits light from a range of locations that include, for example, locations 104 or 106. The interferometric modulator display 100 includes an array of interferometric light modulators 110a, 110b, and 110c. The display 100 may include thousands or millions of modulators. Each of the light modulators 110a, 110b, and 110c includes a pair of mirrors 112 and 114. The mirrors 112 and 114 are positioned substantially parallel to each other and are spaced apart at a distance 116 so as to define an optical cavity therebetween. The color of light that is reflected from the optical cavity is at least partly determined by the distance 116. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:为了减少在使用MEMS(微机电系统)的显示器中视角或光线发生变化时可能会看到的色偏。 解决方案:在干涉式调制器显示器100中,光源102透射来自包括例如位置104或106的一系列位置的光。干涉式调制器显示器100包括干涉式光调制器110a,110b, 和110c。 显示器100可以包括数千或数百万个调制器。 光调制器110a,110b和110c中的每一个包括一对反射镜112和114.反射镜112和114基本上彼此平行地定位并且在距离116处间隔开,以便在它们之间限定光腔。 从光腔反射的光的颜色至少部分地由距离116决定。版权所有(C)2006,JPO&NCIPI
    • 10. 发明专利
    • Portable type etching chamber
    • 便携式蚀刻室
    • JP2006099055A
    • 2006-04-13
    • JP2005218128
    • 2005-07-28
    • Idc Llcアイディーシー、エルエルシー
    • CUMMINGS WILLIAM JARBUCKLE BRIAN WFLOYD PHILIP D
    • G02B26/08B81C99/00
    • H01L21/67069
    • PROBLEM TO BE SOLVED: To provide a system and method for a portable type etching chamber, and a method for using them, especially a method for etching a microelectromechanical (MEMS) system substrate like an optical interferometric modulator substrate. SOLUTION: An etching chamber is constituted so as to support the MEMS substrate inside the chamber. The etching chamber is constituted so as to be moved to an etching station containing a steam or gas phase etching agent source, a purge gas source and/or a vacuum source and to be attached thereto. The portable etching chamber facilitate a process for etching the MEMS substrate held therein. For example, the MEMS substrate in such an etching chamber can be etched by connecting the chamber to the etching station and exposing the MEMS substrate to an etching agent for etching the MEMS substrate. The substrate can be conveyed to/from the etching station inside the portable type etching chamber. In a preferred embodiment, the MEMS substrate is an optical interferometric modulator, and the etching agent is XFe 2 . COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供便携式蚀刻室的系统和方法及其使用方法,特别是用于蚀刻诸如光学干涉式调制器基板的微机电(MEMS)系统基板的方法。 解决方案:蚀刻室被构造成在室内支撑MEMS基板。 蚀刻室被构造成移动到包含蒸汽或气相蚀刻剂源,吹扫气体源和/或真空源并附接到其的蚀刻站。 便携式蚀刻室促进蚀刻保持在其中的MEMS基板的工艺。 例如,可以通过将腔室连接到蚀刻站并将MEMS衬底暴露于用于蚀刻MEMS衬底的蚀刻剂来蚀刻这种蚀刻室中的MEMS衬底。 衬底可以被输送到便携式蚀刻室内的蚀刻工位。 在优选实施例中,MEMS衬底是光学干涉式调制器,并且蚀刻剂是XFe 2 。 版权所有(C)2006,JPO&NCIPI