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    • 2. 发明申请
    • Inspection apparatus for thin film transistor substrate
    • 薄膜晶体管基板检测装置
    • US20060186335A1
    • 2006-08-24
    • US11328177
    • 2006-01-10
    • Ho-seok ChoiSergey AntonovHyeong-min AhnJeong-su HaLemiachine VassiliMi-jeong Song
    • Ho-seok ChoiSergey AntonovHyeong-min AhnJeong-su HaLemiachine VassiliMi-jeong Song
    • G01N23/00G21K7/00
    • G01N23/00G01R31/307G09G3/006Y10S345/904
    • An inspection apparatus for a TFT substrate formed with a plurality of pixels, includes a reference substrate being opposite to and spaced from the TFT substrate and formed with a plurality of reference patterns corresponding to the pixels, a power supply to supply power to both a predetermined number of the pixels and the corresponding reference pattern to form an electric field in a space between the TFT substrate and the reference substrate, an electron beam emitter to emit an electron beam to travel from a first side to a second side of the space, an electron beam detector to detect the electron beam emitted from the electron beam emitter and passed through the space, and a controller to determine whether the TFT substrate includes a defective pixel based on a location of the electron beam detected by the electron beam detector. Thus, the inspection apparatus can correctly and quickly inspect the TFT substrate for defects in a low vacuum state regardless a size of the TFT substrate.
    • 一种用于形成有多个像素的TFT基板的检查装置,包括与TFT基板相对并且与TFT基板隔开的基准基板,并且形成有与像素对应的多个基准图案,供给两个预定的 像素数和相应的参考图案,以在TFT基板和参考基板之间的空间中形成电场,发射电子束从空间的第一侧移动到第二侧的电子束发射器, 电子束检测器,用于检测从电子束发射器发射并通过空间的电子束,以及控制器,用于基于由电子束检测器检测到的电子束的位置来确定TFT基板是否包括缺陷像素。 因此,与TFT基板的尺寸无关地,检查装置可以正确且快速地检查TFT基板中的低真空状态的缺陷。
    • 5. 发明授权
    • Apparatus and method for inspecting screen of displaying device
    • 显示装置屏幕检测装置及方法
    • US06690818B2
    • 2004-02-10
    • US09765409
    • 2001-01-22
    • Hyeong-min Ahn
    • Hyeong-min Ahn
    • G06K900
    • G06T7/001G06T2207/30121H04N17/04
    • An apparatus and a method for inspecting an image, synchronizing a pattern frame synchronizing signal and an image frame synchronizing signal to initiate grabbing an inspection pattern, where the pattern frame synchronizing signal and the image frame synchronizing signal have different frequencies. With this configuration, where the frequencies of the pattern frame synchronizing signal and the image frame synchronizing signal are not identical, since grabbing an image of the inspection pattern is initiated by synchronizing the image frame synchronizing signal with the pattern frame synchronizing signal, the noise inserted into the image of the inspection pattern becomes regular, thereby resulting in enhancing the reliability of the image inspection.
    • 用于检查图像的装置和方法,使图案帧同步信号和图像帧同步信号同步,以开始抓取检查图案,其中图案帧同步信号和图像帧同步信号具有不同的频率。 利用这种配置,其中图案帧同步信号和图像帧同步信号的频率不相同,因为通过使图像帧同步信号与图形帧同步信号同步来捕获检查图案的图像,因此插入的噪声 检查图案的图像变得规则,从而提高图像检查的可靠性。
    • 10. 发明授权
    • Inspection apparatus for thin film transistor substrate
    • 薄膜晶体管基板检测装置
    • US07362123B2
    • 2008-04-22
    • US11328177
    • 2006-01-10
    • Ho-seok ChoiSergey AntonovHyeong-min AhnJeong-su HaLemjachine VassiliMi-jeong Song
    • Ho-seok ChoiSergey AntonovHyeong-min AhnJeong-su HaLemjachine VassiliMi-jeong Song
    • G01R31/26G01R31/302
    • G01N23/00G01R31/307G09G3/006Y10S345/904
    • An inspection apparatus for a TFT substrate formed with a plurality of pixels, includes a reference substrate being opposite to and spaced from the TFT substrate and formed with a plurality of reference patterns corresponding to the pixels, a power supply to supply power to both a predetermined number of the pixels and the corresponding reference pattern to form an electric field in a space between the TFT substrate and the reference substrate, an electron beam emitter to emit an electron beam to travel from a first side to a second side of the space, an electron beam detector to detect the electron beam emitted from the electron beam emitter and passed through the space, and a controller to determine whether the TFT substrate includes a defective pixel based on a location of the electron beam detected by the electron beam detector. Thus, the inspection apparatus can correctly and quickly inspect the TFT substrate for defects in a low vacuum state regardless a size of the TFT substrate.
    • 一种用于形成有多个像素的TFT基板的检查装置,包括与TFT基板相对并且与TFT基板隔开的基准基板,并且形成有与像素对应的多个基准图案,供给两个预定的 像素数和相应的参考图案,以在TFT基板和参考基板之间的空间中形成电场,发射电子束从空间的第一侧移动到第二侧的电子束发射器, 电子束检测器,用于检测从电子束发射器发射并通过空间的电子束,以及控制器,用于基于由电子束检测器检测到的电子束的位置来确定TFT基板是否包括缺陷像素。 因此,与TFT基板的尺寸无关地,检查装置可以正确且快速地检查TFT基板中的低真空状态的缺陷。