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1. 发明授权

US07155083B2 Monolithic waveguide/MEMS switch 有权
标题翻译：单片波导/ MEMS开关
公开(公告)号：US07155083B2
公开(公告)日：2006-12-26
申请号：US11478189
申请日：2006-06-29
申请人： Frieder Heinrich Baumann , Ho Bun Chan , Dan T. Fuchs , Howard Roy Stuart
发明人： Frieder Heinrich Baumann , Ho Bun Chan , Dan T. Fuchs , Howard Roy Stuart
IPC分类号： G02B6/35 , G02B6/12 , G02B1/01
CPC分类号： G02B6/29395 , G02B6/12007 , G02B6/12019 , G02B6/122 , G02B6/2861 , G02B6/29349 , G02B6/29352 , G02B6/3516 , G02B6/3546 , G02B6/3548 , G02B6/356 , G02B6/357 , G02B6/3584 , G02B6/3596 , G02B2006/12104 , G02B2006/12145 , G02B2006/12147 , G02B2006/12159
摘要： A monolithic waveguide/MEMS switch is disclosed that has a waveguide portion and a MEMS mirror portion fabricated on a single substrate, such as a as a silicon-on-insulator wafer. The monolithic waveguide/MEMS switch adjusts the phase of an optical signal by varying the position of one or more moveable mirrors. The mirror portion includes a mirror having a reflective surface that is attached to at least one MEMS actuator to achieve in-plane motion of the mirror (moves parallel to a plane of said at least one waveguide). In one implementation, the MEMS actuator is embodied as a known comb drive actuator. The phase adjustment techniques of the present invention may be employed in various optical devices, including wavelength selective optical switches that support multiple optical channels.
摘要翻译：公开了一种单片波导/ MEMS开关，其具有制造在单个衬底（例如绝缘体上硅晶片）上的波导部分和MEMS镜部分。单片波导/ MEMS开关通过改变一个或多个可移动反射镜的位置来调节光信号的相位。反射镜部分包括具有反射表面的反射镜，该反射表面附接到至少一个MEMS致动器以实现反射镜的平面内运动（平行于所述至少一个波导的平面移动）。在一个实现中，MEMS致动器被实现为已知的梳状驱动致动器。本发明的相位调整技术可以用在各种光学装置中，包括支持多个光通道的波长选择光开关。

2. 发明授权

US07212693B2 Optical substance analyzer 有权
标题翻译：光学物质分析仪
公开(公告)号：US07212693B2
公开(公告)日：2007-05-01
申请号：US10743253
申请日：2003-12-22
申请人： Dustin W. Carr , Ho Bun Chan , Alex T. Tran
发明人： Dustin W. Carr , Ho Bun Chan , Alex T. Tran
IPC分类号： G02B6/00
CPC分类号： G01N21/774 , G01N21/45 , G01N21/7746 , G01N33/54366 , G01N33/569 , G01N2021/7709 , G01N2021/7779 , G01N2021/7793
摘要： A portable waveguide sensor having one or more gratings. In one embodiment, the sensor has a waveguide, wherein a plurality of grooves imprinted onto the waveguide form a Bragg grating. The surface of the grooves has a functional layer adapted to bind a substance of interest, e.g., a biological pathogen. When the pathogen binds to the functional layer, the binding shifts the spectral reflection band corresponding to the Bragg grating such that a probe light previously reflected by the grating now passes through the grating, thereby indicating the presence of the pathogen. In another embodiment, the sensor has a Mach-Zehnder interferometer (MZI), one arm of which has a resonator formed by two Bragg gratings. The surface of the resonator between the gratings has a functional layer whereas the Bragg gratings themselves do not have such a layer.
摘要翻译：具有一个或多个光栅的便携式波导传感器。在一个实施例中，传感器具有波导，其中印在波导上的多个凹槽形成布拉格光栅。凹槽的表面具有适于结合感兴趣物质的功能层，例如生物病原体。当病原体与功能层结合时，结合移动对应于布拉格光栅的光谱反射带，使得光栅以前反射的探针光线现在通过光栅，从而指示病原体的存在。在另一个实施例中，传感器具有马赫 - 曾德干涉仪（MZI），其一个臂具有由两个布拉格光栅形成的谐振器。光栅之间的谐振器的表面具有功能层，而布拉格光栅本身不具有这样的层。

3. 发明授权

US07149378B2 Monolithic waveguide/MEMS switch 有权
标题翻译：单片波导/ MEMS开关
公开(公告)号：US07149378B2
公开(公告)日：2006-12-12
申请号：US10746566
申请日：2003-12-24
申请人： Frieder Heinrich Baumann , Ho Bun Chan , Dan T. Fuchs , Howard Roy Stuart
发明人： Frieder Heinrich Baumann , Ho Bun Chan , Dan T. Fuchs , Howard Roy Stuart
IPC分类号： G02B6/35 , G02B6/12 , G02F1/01
CPC分类号： G02B6/29395 , G02B6/12007 , G02B6/12019 , G02B6/122 , G02B6/2861 , G02B6/29349 , G02B6/29352 , G02B6/3516 , G02B6/3546 , G02B6/3548 , G02B6/356 , G02B6/357 , G02B6/3584 , G02B6/3596 , G02B2006/12104 , G02B2006/12145 , G02B2006/12147 , G02B2006/12159
摘要： A monolithic waveguide/MEMS switch is disclosed that has a waveguide portion and a MEMS mirror portion fabricated on a single substrate, such as a as a silicon-on-insulator wafer. The monolithic waveguide/MEMS switch adjusts the phase of an optical signal by varying the position of one or more moveable mirrors. The mirror portion includes a mirror having a reflective surface that is attached to at least one MEMS actuator to achieve in-plane motion of the mirror (moves parallel to a plane of said at least one waveguide). In one implementation, the MEMS actuator is embodied as a known comb drive actuator. The phase adjustment techniques of the present invention may be employed in various optical devices, including wavelength selective optical switches that support multiple optical channels.
摘要翻译：公开了一种单片波导/ MEMS开关，其具有制造在单个衬底（例如绝缘体上硅晶片）上的波导部分和MEMS镜部分。单片波导/ MEMS开关通过改变一个或多个可移动反射镜的位置来调节光信号的相位。反射镜部分包括具有反射表面的反射镜，该反射表面附接到至少一个MEMS致动器以实现反射镜的平面内运动（平行于所述至少一个波导的平面移动）。在一个实现中，MEMS致动器被实现为已知的梳状驱动致动器。本发明的相位调整技术可以用在各种光学装置中，包括支持多个光通道的波长选择光开关。

4. 发明授权

US07122872B2 Control of stress in metal films by controlling the atmosphere during film deposition 有权
标题翻译：通过控制膜沉积过程中的气氛来控制金属膜中的应力
公开(公告)号：US07122872B2
公开(公告)日：2006-10-17
申请号：US10441458
申请日：2003-05-20
申请人： James F. Bailey , Ho Bun Chan , Louis T. Gomez , Martin Haueis
发明人： James F. Bailey , Ho Bun Chan , Louis T. Gomez , Martin Haueis
IPC分类号： H01L21/14
CPC分类号： B81B3/0072 , B81C2201/017 , H01L21/2855
摘要： Materials such as titanium are vapor-deposited in the presence of, e.g., oxygen to form a film on a substrate, such as to provide an adhesion layer between a silicon movable structure in an optical MEMS device and a gold layer serving as a reflecting surface. The resulting film contains titanium and oxygen. Varying the conditions under which the film is deposited varies the intrinsic stress of the film, which varies the change in substrate shape caused by the presence of the film. A film having a desired intrinsic stress may be obtained by control of the oxygen partial pressure when the film is deposited. In one embodiment, the oxygen partial pressure in the atmosphere present during titanium deposition is greater than about 2×10−7 Torr, and preferably between about 1×10−6 Torr and about 2×10−6 Torr.
摘要翻译：诸如钛的材料在例如氧的存在下气相沉积以在衬底上形成膜，以便在光学MEMS器件中的硅可移动结构和用作反射表面的金层之间提供粘附层。所得膜含有钛和氧。改变沉积膜的条件改变膜的固有应力，这改变了由于膜的存在引起的衬底形状的变化。具有期望的固有应力的膜可以通过控制膜沉积时的氧分压来获得。在一个实施例中，在钛沉积期间存在的气氛中的氧分压大于约2×10 -7乇，优选约1×10 -6乇至约2×10乇， SUP> -6 Torr。

5. 发明授权

US06933004B2 Control of stress in metal films by controlling the temperature during film deposition 失效
标题翻译：通过控制膜沉积过程中的温度来控制金属膜中的应力
公开(公告)号：US06933004B2
公开(公告)日：2005-08-23
申请号：US10441457
申请日：2003-05-20
申请人： Ho Bun Chan , Martin Haueis
发明人： Ho Bun Chan , Martin Haueis
IPC分类号： B32B15/00 , B81B3/00 , B81C1/00 , C23C14/16 , C23C14/54 , C23C16/40 , C23C16/44 , C23C16/46
CPC分类号： C23C14/541 , B81C1/00666 , B81C2201/017 , C23C14/16 , G02B6/3518 , Y10T428/12674 , Y10T428/12806 , Y10T428/24917
摘要： Materials such as titanium are vapor-deposited to form a film on a substrate while the substrate is thermally coupled to a temperature-controlling thermal source. Varying the temperature conditions of the substrate when the film is deposited varies the intrinsic stress of the film, which varies the change in substrate shape caused by the presence of the film. A film having a desired intrinsic stress may be obtained by control of the substrate temperature when the film is deposited. A stress-controlled titanium film may be used, for example, as an adhesion layer between a silicon movable structure in an optical MEMS device and a gold layer serving as a reflecting surface.
摘要翻译：气相沉积诸如钛的材料以在衬底上热耦合到温度控制热源的同时在衬底上形成膜。当沉积膜时，改变衬底的温度条件改变了膜的固有应力，这改变了由膜的存在引起的衬底形状的变化。具有期望的固有应力的膜可以通过在沉积膜时控制衬底温度来获得。可以使用应力控制的钛膜，例如作为光学MEMS器件中的硅可移动结构和用作反射表面的金层之间的粘合层。

6. 发明授权

US06993219B2 Waveguide/MEMS switch 有权
标题翻译：波导/ MEMS开关
公开(公告)号：US06993219B2
公开(公告)日：2006-01-31
申请号：US10387852
申请日：2003-03-13
申请人： Vladimir A. Aksyuk , Ho Bun Chan , Dan Fuchs , Dennis S. Greywall , Maria E. Simon
发明人： Vladimir A. Aksyuk , Ho Bun Chan , Dan Fuchs , Dennis S. Greywall , Maria E. Simon
IPC分类号： G02B6/35
CPC分类号： G02B6/3516 , G02B6/2821 , G02B6/3518 , G02B6/3546 , G02B6/357 , G02B6/358 , G02B6/3596
摘要： A waveguide/MEMS switch adapted to redirect optical signals between output ports based on a phase shift change generated by motion of one or more movable MEMS mirrors incorporated therein. Advantageously, such a switch has a relatively high switching speed and low power consumption. A switch according to one embodiment of the invention includes a planar waveguide device and a planar MEMS device. The MEMS device implements in-plane (i.e., parallel to the plane of that device) translation of the mirrors. As a result, in certain embodiments of the switch, the waveguide and MEMS devices are connected into a compact planar assembly.
摘要翻译：一种波导/ MEMS开关，其适于基于由其中结合的一个或多个可移动MEMS镜的运动产生的相移变化在输出端口之间重定向光信号。有利地，这种开关具有相对高的开关速度和低功耗。根据本发明的一个实施例的开关包括平面波导器件和平面MEMS器件。 MEMS器件实现了反射镜的平面（即平行于该器件的平面）平移。结果，在开关的某些实施例中，波导和MEMS器件被连接到紧凑的平面组件中。

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