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1. 发明授权

US5086227A Secondary ion mass analyzing apparatus 失效
标题翻译：二次离子质量分析装置
公开(公告)号：US5086227A
公开(公告)日：1992-02-04
申请号：US599407
申请日：1990-10-18
申请人： Hiroshi Toita , Hiroshi Hirose , Hifumi Tamura
发明人： Hiroshi Toita , Hiroshi Hirose , Hifumi Tamura
IPC分类号： G01Q60/00 , H01J37/21 , H01J37/252 , H01J49/26
CPC分类号： H01J49/26
摘要： A secondary ion mass analyzing apparatus is suitable for a depth directional analysis of a specimen. The apparatus includes means for forming an image of said secondary ions, an aperture disposed on a position in which the secondary ion image is formed, means for detecting the secondary ions which have passed through the aperture and for converting the detected ions into electrical signals, and means for displaying an image of said aperture based on the electrical signals. In such a manner, the aperture is disposed on the secondary ion image forming position. The image of the aperture is displayed on the image displaying apparatus by using the secondary ions which have passed through the aperture. If the ion image is not formed on the position of the aperture, the contour of the aperture image would be unclear while if the ion image is formed on the position of the aperture, the contour of the aperture image would be clear. Accordingly, by monitoring the clearness of the aperture image, focusing of the ion image upon the aperture position may be determined. Therefore, the secondary ions which have generated from the specimen corresponding to a portion other than the central portion of the primary ion beam can be prevented from being introduced to a mass analyzing portion. A depth directional analysis of the specimen can be accomplished at a high accuracy.

2. 发明授权

US5008537A Composite apparatus with secondary ion mass spectrometry instrument and scanning electron microscope 失效
标题翻译：具有二次离子质谱仪和扫描电子显微镜的复合装置
公开(公告)号：US5008537A
公开(公告)日：1991-04-16
申请号：US409761
申请日：1989-09-20
申请人： Hiroshi Toita , Hifumi Tamura , Issei Tobita , Hiroshi Iwamoto
发明人： Hiroshi Toita , Hifumi Tamura , Issei Tobita , Hiroshi Iwamoto
IPC分类号： H01J37/08 , G01Q10/00 , G01Q30/04 , G01Q30/14 , H01J27/26 , H01J37/147 , H01J37/252 , H01J37/256 , H01J49/26
CPC分类号： H01J27/26 , H01J37/256
摘要： A composite apparatus is disclosed which includes in combination a secondary ion mass spectrometry instrument and a scanning electron microscope. A liquid metal ion source and an ion source other than the liquid metal ion source are installed in the same apparatus so that an ion beam emitted from the liquid metal ion source and an ion beam emitted from the ion source other than the liquid metal ion source are aligned with each other on a primary beam axis which is an optical axis of an irradiating system. The liquid metal ion source is disposed in rear of a primary ion separating device which mass-separates the ion beam emitted from the ion source other than the liquid metal ion source. Further, an electron gun is installed in the same apparatus so that an electron beam emitted from the electron gun is aligned with the ion beam on the primary beam axis.
摘要翻译：公开了一种复合装置，其包括二次离子质谱仪和扫描电子显微镜。液体金属离子源和液体金属离子源以外的离子源安装在同一装置中，使得从液体金属离子源发射的离子束和离子源（液体金属离子源以外）发射的离子束在作为照射系统的光轴的主光束轴上彼此对准。液体金属离子源设置在主离子分离装置的后方，该离子分离装置对离子源发射的液体金属离子源以外的离子束进行质量分离。此外，电子枪安装在相同的装置中，使得从电子枪发射的电子束与主光束轴上的离子束对准。

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