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1. 发明授权

US07353710B2 Pressure sensor device with surface acoustic wave elements 失效
标题翻译：带声表面波元件的压力传感器
公开(公告)号：US07353710B2
公开(公告)日：2008-04-08
申请号：US10580899
申请日：2004-11-26
申请人： Akira Oikawa , Kaoru Matsuo , Hiroshi Tachioka
发明人： Akira Oikawa , Kaoru Matsuo , Hiroshi Tachioka
IPC分类号： G01L11/00
CPC分类号： G01L9/0025
摘要： Thickness of a pressure-detecting piezoelectric substrate (2) that is thinner than that of a supporting piezoelectric substrate (3) and that has a surface acoustic wave element for pressure detection (7a) on its lower surface is mounted on the supporting piezoelectric substrate (3) having a surface acoustic wave element for reference (4a) on its upper surface. A sealing member (5) is provided between the supporting piezoelectric substrate (3) and the pressure-detecting piezoelectric substrate (1). The surface acoustic wave element for pressure detection (7a) and the surface acoustic wave element for reference (4a) can be disposed in a space (S) enclosed with the pressure-detecting piezoelectric substrate (1) and the sealing member (5). It is possible to provide a small-sized pressure sensor device (1) that can perform temperature compensation and that has high reliability.
摘要翻译：压力检测用压电基板（2）的厚度比支撑压电基板（3）薄，并且在其下表面具有用于压力检测的表面声波元件（7a）的厚度安装在支撑压电基板（3）在其上表面具有用于参考的表面声波元件（4a）。密封构件（5）设置在支撑压电基板（3）和压力检测用压电基板（1）之间。用于压力检测的表面声波元件（7a）和用于参考的表面声波元件（4a）可以设置在由压力检测压电基板（1）和密封构件（5）包围的空间（S）中）。可以提供能够进行温度补偿且具有高可靠性的小型压力传感器装置（1）。

2. 发明申请

US20070107522A1 Pressure sensor device 失效
标题翻译：压力传感器装置
公开(公告)号：US20070107522A1
公开(公告)日：2007-05-17
申请号：US10580899
申请日：2004-11-26
申请人： Akira Oikawa , Kaoru Matsuo , Hiroshi Tachioka
发明人： Akira Oikawa , Kaoru Matsuo , Hiroshi Tachioka
IPC分类号： G01L9/00
CPC分类号： G01L9/0025
摘要： Thickness of a pressure-detecting piezoelectric substrate (2) that is thinner than that of a supporting piezoelectric substrate (3) and that has a surface acoustic wave element for pressure detection (7a) on its lower surface is mounted on the supporting piezoelectric substrate (3) having a surface acoustic wave element for reference (4a) on its upper surface. A sealing member (5) is provided between the supporting piezoelectric substrate (3) and the pressure-detecting piezoelectric substrate (1). The surface acoustic wave element for pressure detection (7a) and the surface acoustic wave element for reference (4a) can be disposed in a space (S) enclosed with the pressure-detecting piezoelectric substrate (1) and the sealing member (5). It is possible to provide a small-sized pressure sensor device (1) that can perform temperature compensation and that has high reliability.
摘要翻译：压力检测用压电基板（2）的厚度比支撑压电基板（3）薄，并且在其下表面具有用于压力检测的表面声波元件（7a）的厚度安装在支撑压电基板（3）在其上表面具有用于参考的表面声波元件（4a）。密封构件（5）设置在支撑压电基板（3）和压力检测用压电基板（1）之间。用于压力检测的表面声波元件（7a）和用于参考的表面声波元件（4a）可以设置在由压力检测压电基板（1）和密封构件（5）包围的空间（S）中）。可以提供能够进行温度补偿且具有高可靠性的小型压力传感器装置（1）。

3. 发明授权

US07392706B2 Pressure sensor device 有权
标题翻译：压力传感器装置
公开(公告)号：US07392706B2
公开(公告)日：2008-07-01
申请号：US10580633
申请日：2004-11-26
申请人： Kazuhisa Momose , Kaoru Matsuo , Shinichi Shimokihara , Hisayuki Inoue , Masashi Kamada , Hiroshi Tachioka , Kouichi Maruta , Hiroshi Oka
发明人： Kazuhisa Momose , Kaoru Matsuo , Shinichi Shimokihara , Hisayuki Inoue , Masashi Kamada , Hiroshi Tachioka , Kouichi Maruta , Hiroshi Oka
IPC分类号： G01L7/00
CPC分类号： B60C23/0408 , G01L9/0025
摘要： A sensor substrate 1 having on its lower surface a surface acoustic wave element 2 for detecting pressure is mounted on a supporting substrate 6 through a sealing member 4 surrounding a sensor section 2. A sealing space S is formed by the sensor substrate 1, the supporting substrate 6, and the sealing member 4, and the surface acoustic wave element 2 for detecting pressure is sealed hermetically in the sealing space S. Reliability can be enhanced by protecting the surface acoustic wave element 2 from the external environment.
摘要翻译：在其下表面上具有用于检测压力的表面声波元件2的传感器基板1通过围绕传感器部分2的密封构件4安装在支撑基板6上。密封空间S由传感器基板1，支撑基板6和密封部件4形成，用于检测压力的表面声波元件2密封地密封在密封空间S中。可以通过保护表面来增强可靠性声波元件2来自外部环境。

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