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    • 1. 发明授权
    • Pressure sensor device with surface acoustic wave elements
    • 带声表面波元件的压力传感器
    • US07353710B2
    • 2008-04-08
    • US10580899
    • 2004-11-26
    • Akira OikawaKaoru MatsuoHiroshi Tachioka
    • Akira OikawaKaoru MatsuoHiroshi Tachioka
    • G01L11/00
    • G01L9/0025
    • Thickness of a pressure-detecting piezoelectric substrate (2) that is thinner than that of a supporting piezoelectric substrate (3) and that has a surface acoustic wave element for pressure detection (7a) on its lower surface is mounted on the supporting piezoelectric substrate (3) having a surface acoustic wave element for reference (4a) on its upper surface. A sealing member (5) is provided between the supporting piezoelectric substrate (3) and the pressure-detecting piezoelectric substrate (1). The surface acoustic wave element for pressure detection (7a) and the surface acoustic wave element for reference (4a) can be disposed in a space (S) enclosed with the pressure-detecting piezoelectric substrate (1) and the sealing member (5). It is possible to provide a small-sized pressure sensor device (1) that can perform temperature compensation and that has high reliability.
    • 压力检测用压电基板(2)的厚度比支撑压电基板(3)薄,并且在其下表面具有用于压力检测的表面声波元件(7a)的厚度安装在支撑压电基板 (3)在其上表面具有用于参考的表面声波元件(4a)。 密封构件(5)设置在支撑压电基板(3)和压力检测用压电基板(1)之间。 用于压力检测的表面声波元件(7a)和用于参考的表面声波元件(4a)可以设置在由压力检测压电基板(1)和密封构件(5)包围的空间(S)中 )。 可以提供能够进行温度补偿且具有高可靠性的小型压力传感器装置(1)。
    • 2. 发明申请
    • Pressure sensor device
    • 压力传感器装置
    • US20070107522A1
    • 2007-05-17
    • US10580899
    • 2004-11-26
    • Akira OikawaKaoru MatsuoHiroshi Tachioka
    • Akira OikawaKaoru MatsuoHiroshi Tachioka
    • G01L9/00
    • G01L9/0025
    • Thickness of a pressure-detecting piezoelectric substrate (2) that is thinner than that of a supporting piezoelectric substrate (3) and that has a surface acoustic wave element for pressure detection (7a) on its lower surface is mounted on the supporting piezoelectric substrate (3) having a surface acoustic wave element for reference (4a) on its upper surface. A sealing member (5) is provided between the supporting piezoelectric substrate (3) and the pressure-detecting piezoelectric substrate (1). The surface acoustic wave element for pressure detection (7a) and the surface acoustic wave element for reference (4a) can be disposed in a space (S) enclosed with the pressure-detecting piezoelectric substrate (1) and the sealing member (5). It is possible to provide a small-sized pressure sensor device (1) that can perform temperature compensation and that has high reliability.
    • 压力检测用压电基板(2)的厚度比支撑压电基板(3)薄,并且在其下表面具有用于压力检测的表面声波元件(7a)的厚度安装在支撑压电基板 (3)在其上表面具有用于参考的表面声波元件(4a)。 密封构件(5)设置在支撑压电基板(3)和压力检测用压电基板(1)之间。 用于压力检测的表面声波元件(7a)和用于参考的表面声波元件(4a)可以设置在由压力检测压电基板(1)和密封构件(5)包围的空间(S)中 )。 可以提供能够进行温度补偿且具有高可靠性的小型压力传感器装置(1)。