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    • 10. 发明授权
    • Imaging apparatus and method for manufacturing the same
    • 成像装置及其制造方法
    • US07534059B2
    • 2009-05-19
    • US10558944
    • 2004-05-26
    • Hiroshi Nishizawa
    • Hiroshi Nishizawa
    • G03D17/00
    • H04N5/2254H04N5/2257
    • An imaging apparatus includes: a three-dimensional substrate in which a partition wall (11) having an opening (10a) at a central portion is formed so as to cross an inner cavity; an optical filter (5) that is fixed on a first flat surface (12) of both surfaces of the partition wall so as to cover the opening; a semiconductor imaging device (4) that is face-down mounted on a second flat surface (13) of the partition wall with an imaging area (4a) facing the opening; and an optical system for forming images that is installed on a side of the optical filter in the inner cavity of the three-dimensional substrate. The opening of the partition wall is dosed on both sides with the optical filter and the semiconductor imaging device so as to form a cavity. An air passage (12a) for allowing communication between the cavity and an exterior of the three-dimensional substrate is formed on the first flat surface, and has a labyrinth structure that causes a flow rate of air passing through the air passage to vary depending on a location in the air passage. This allows air circulation between the exterior and a cavity enclosed by a semiconductor imaging device and an optical filter, while suppressing the entry of foreign matter from the exterior into the cavity via an airflow caused by expansion/contraction of air.
    • 一种成像装置包括:三维基板,其中在中心部分具有开口(10a)的分隔壁(11)形成为穿过内腔; 固定在分隔壁的两面的第一平面(12)上以覆盖开口的滤光器(5); 半导体成像装置(4),面向下安装在所述分隔壁的第二平面(13)上,具有面向所述开口的成像区域(4a) 以及用于形成安装在三维基板的内腔中的滤光器侧的图像的光学系统。 分隔壁的开口在两侧配有滤光器和半导体成像装置以形成空腔。 在第一平面上形成有用于使空腔与三维基板的外部连通的空气通道(12a),并具有迷宫式结构,使得通过空气通路的空气的流量根据 空气通道中的一个位置。 这允许外部和由半导体成像装置和滤光器包围的空腔之间的空气循环,同时抑制异物通过由空气膨胀/收缩引起的气流从外部进入空腔。