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    • 6. 发明授权
    • Semiconductor device
    • 半导体器件
    • US07696607B2
    • 2010-04-13
    • US11889210
    • 2007-08-09
    • Hikari SanoMasao TakahashiHiroshige HiranoKoji Takemura
    • Hikari SanoMasao TakahashiHiroshige HiranoKoji Takemura
    • H01L23/544
    • H01L23/585H01L21/78H01L2924/0002H01L2924/00
    • A semiconductor device includes: a circuit region having a function element formed on a semiconductor substrate; a scribe region located between the circuit region and another circuit region formed spaced from the circuit region, the scribe region including a cutting region and non-cutting regions provided at both sides of the cutting region; a first interlayer insulating film formed in the scribe region on the semiconductor substrate; a first dummy pattern made of conductive material and formed in the first interlayer insulating film in the cutting region; and a second dummy pattern made of conductive material and formed in the first interlayer insulating film in each of the non-cutting regions. The ratio, per unit area, of the area of the first dummy pattern to the area of the cutting region is lower than the ratio, per unit area, of the area of the second dummy pattern to the area of the non-cutting regions.
    • 半导体器件包括:具有形成在半导体衬底上的功能元件的电路区域; 位于所述电路区域和与所述电路区域间隔开的另一电路区域之间的划线区域,所述划线区域包括切割区域和设置在所述切割区域两侧的非切割区域; 形成在半导体衬底上的划线区域中的第一层间绝缘膜; 由导电材料制成并形成在切割区域中的第一层间绝缘膜中的第一虚设图形; 以及由导电材料制成并形成在每个非切割区域中的第一层间绝缘膜中的第二虚设图案。 第一虚设图形的面积与切割区域的面积的单位面积的比率低于第二虚拟图案的面积与非切割区域的面积的每单位面积的比率。
    • 10. 发明申请
    • OPTICAL DEVICE, METHOD OF MANUFACTURING THE SAME, AND ELECTRONIC APPARATUS
    • 光学装置,其制造方法和电子装置
    • US20110169118A1
    • 2011-07-14
    • US13004354
    • 2011-01-11
    • Hikari SANO
    • Hikari SANO
    • H01L31/0232H01L31/18
    • H01L27/14618H01L27/14625H01L27/14683H01L2224/13
    • The present invention is has an object of providing an optical device miniaturized while maintaining bonding strength between a semiconductor substrate and a light-transmissive plate, reducing possibility of warpage, and maintaining yields and design flexibility, a method of manufacturing the optical device, and an electronic apparatus. The optical device according to the present invention includes a semiconductor substrate having one surface in which a light-receiving element is formed; and a light-transmissive plate provided above the semiconductor substrate so as to cover the light-receiving element. The semiconductor substrate and the light-transmissive plate are partially bonded above a light-receiving unit of the semiconductor substrate. The light-receiving element is formed in the light-receiving unit.
    • 本发明的目的是提供一种小型化的光学装置,同时保持半导体基板和透光板之间的结合强度,降低翘曲的可能性,并且保持屈服和设计灵活性,制造光学装置的方法和 电子仪器 根据本发明的光学装置包括其中形成有光接收元件的一个表面的半导体衬底; 以及设置在半导体衬底上方以覆盖光接收元件的透光板。 半导体衬底和透光板部分地接合在半导体衬底的光接收单元的上方。 光接收元件形成在光接收单元中。