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    • 3. 发明授权
    • Recyclable formwork
    • 可回收模板
    • US09074378B2
    • 2015-07-07
    • US14236449
    • 2012-08-03
    • Masahiro HayasakiShigeyuki NishijimaHideyuki Yamamoto
    • Masahiro HayasakiShigeyuki NishijimaHideyuki Yamamoto
    • E04G9/05E04G9/10G01K1/14G01K1/02E04G9/06B28B17/00B28B7/42E04G9/02
    • E04G9/05B28B7/42B28B17/0063E04G9/06E04G9/10E04G2009/028G01K1/024G01K1/143
    • A recyclable formwork can suitably detect temperature of concrete cast contacting with the formwork in a field without spoiling the other functions of the formwork. The recyclable formwork is provided with: a main unit (1) including a plurality of ribs (3) and (4); a case (7) being housed between the ribs (3) and (4), the case (7) being fixed on a non-contact surface (1a); and a circuit housed in the case (7). A through-hole (16) is opened at a position corresponding to where the case (7) is fixed, the through-hole (16) penetrating the main unit (1) from the non-contact surface (1a) to a contact surface (2). A sensor-housing case (17) is provided with a lower portion of the case (7), the sensor-housing case (17) being inserted into the through-hole (16), a bottom face of the sensor-housing case (17) facing concrete. And, a concrete temperature-detecting sensor (19) for detecting surface temperature of the concrete is housed in the sensor-housing case (17).
    • 可回收的模板可以适当地检测在一个领域与模板接触的混凝土浇铸温度,而不会破坏模板的其他功能。 可回收模板设置有:包括多个肋(3)和(4)的主单元(1); 壳体(7)容纳在所述肋(3)和(4)之间,所述壳体(7)固定在非接触表面(1a)上; 和容纳在壳体(7)中的电路。 在与壳体(7)固定的位置对应的通孔(16)中,从非接触面(1a)穿过主体单元(1)的通孔(16)到接触面 (2)。 传感器外壳(17)设置有壳体(7)的下部,传感器外壳(17)插入通孔(16)中,传感器外壳的底面 17)面对混凝土。 并且,用于检测混凝土的表面温度的混凝土温度检测传感器(19)容纳在传感器外壳(17)中。
    • 6. 发明申请
    • DEGREASING COMPOSITION AND PRODUCTION METHOD THEREOF
    • 退火组合物及其生产方法
    • US20120115766A1
    • 2012-05-10
    • US13375095
    • 2010-05-31
    • Naruhiko NojimaYusaku IshiharaHideyuki Yamamoto
    • Naruhiko NojimaYusaku IshiharaHideyuki Yamamoto
    • C23G1/28
    • C23G1/14C11D3/201C11D7/06C11D7/14C11D7/261C11D7/5022
    • As a method for producing a degreasing composition in the form of a slurry, crystallization of the composition during low-temperature storage being suppressed and the composition being used for preparing a cleaning liquid having little environmental impact, provided is a method including a step of obtaining a slurry by mixing a first liquid and a powdery silicate having a particle diameter ranging from 0.2 mm to 10 mm, wherein the first liquid contains an alkaline component composed of at least one of sodium hydroxide and potassium hydroxide, an alcohol having three or fewer carbon atoms, and water; and the degreasing composition contains, with respect to the total composition, 10 mass % to 60 mass % of the alkaline component, 0.1 mass % to 5 mass % of the alcohol, 1 mass % to 50 mass % of the silicate, and 20 mass % to 50 mass % of water including hydration water of the silicate, and contains no chelating agent.
    • 作为浆料形式的脱脂组合物的制造方法,可以抑制低温保存时的组合物的结晶化和用于制备环境影响小的清洗液的组合物,是包括以下步骤的方法: 通过混合第一液体和粒径范围为0.2mm至10mm的粉状硅酸盐的浆料,其中第一液体含有由氢氧化钠和氢氧化钾中的至少一种组成的碱性组分,具有三个或更少碳的醇 原子和水; 脱脂组合物相对于总成分含有10质量%〜60质量%的碱成分,0.1质量%〜5质量%的醇,1质量%〜50质量%的硅酸盐和20质量% 含水量为50〜50质量%的硅酸盐水合水,不含螯合剂。
    • 9. 发明申请
    • Etching apparatus, method for measuring self-bias voltage, and method for monitoring etching apparatus
    • 蚀刻装置,自偏压测定方法以及蚀刻装置的监视方法
    • US20070217118A1
    • 2007-09-20
    • US11506791
    • 2006-08-21
    • Shoji IkuharaHideyuki YamamotoDaisuke ShiraishiAkira Kagoshima
    • Shoji IkuharaHideyuki YamamotoDaisuke ShiraishiAkira Kagoshima
    • H01T23/00
    • H01L21/6833H02N13/00
    • The invention provides a means for estimating a self-bias voltage under arbitrary etching conditions via a simple procedure. The present invention provides a method for measuring self-bias voltage of an etching apparatus comprising an electrostatic chuck mechanism 1 and 10 for chucking a sample 2, a mechanism 13 and 14 for supplying cooling gas 12 to a rear surface of the sample 2 and controlling the pressure thereof, and a means for measuring the relative force of electrostatic chuck of the sample based on the rear surface pressure control status of the sample 2 being processed, wherein the relative force of electrostatic chuck of the sample and the electrostatic chuck voltage corresponding to the force of electrostatic chuck are acquired based on the rear surface pressure control of the sample 2 when high-frequency bias power is applied to the sample 2 being processed, and the relative force of electrostatic chuck of the sample and the electrostatic chuck voltage corresponding to the force of electrostatic chuck are acquired based on the rear surface pressure control status of the sample when high-frequency bias power is not applied to the sample being processed, and the self-bias voltage is estimated using the acquired forces of electrostatic chuck and the electrostatic chuck voltages corresponding to the two statuses.
    • 本发明提供了一种用于通过简单的过程在任意蚀刻条件下估计自偏压的装置。 本发明提供了一种用于测量蚀刻装置的自偏压的方法,该蚀刻装置包括用于夹持样品2的静电卡盘机构1和10,用于将冷却气体12供应到样品2的后表面的机构13和14,并且控制 其压力,以及用于根据正在处理的样品2的背面压力控制状态来测量样品的静电卡盘的相对力的装置,其中样品的静电卡盘的相对力和对应于 当对待处理的样品2施加高频偏置功率时,基于样品2的背面压力控制获取静电卡盘的力,并且将样品的静电卡盘与静电卡盘电压的相对力对应于 基于高频时样品的背面压力控制状态获取静电卡盘的力 y偏压功率不会被施加到正在处理的样品,并且使用所获取的静电卡盘的力和对应于两种状态的静电卡盘电压来估计自偏压。