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1. 发明授权

US08307782B2 Deposition apparatus and deposition method 失效
标题翻译：沉积设备和沉积方法
公开(公告)号：US08307782B2
公开(公告)日：2012-11-13
申请号：US12343263
申请日：2008-12-23
申请人： Kazuhito Nishimura , Hideki Sasaoka
发明人： Kazuhito Nishimura , Hideki Sasaoka
IPC分类号： C23C16/455 , H01L21/02
CPC分类号： C23C16/503 , C23C16/4586 , C23C16/463 , H01J37/32009 , H01J37/32541 , H01J2237/2001 , H01L21/67109
摘要： A deposition apparatus includes: a first electrode for placing a processing object; a second electrode for generating plasma with the first electrode, the second electrode being opposed to the first electrode; and a cooling part for cooling the processing object, wherein between the processing object and the cooling part, as compared with a thermal resistance between a central part of the processing object and the cooling part, a thermal resistance between a peripheral part peripheral to the central part and the cooling part is small.
摘要翻译：沉积设备包括：用于放置处理对象的第一电极; 用于利用所述第一电极产生等离子体的第二电极，所述第二电极与所述第一电极相对; 以及用于冷却处理对象的冷却部件，其中在处理对象和冷却部件之间，与处理对象的中心部分和冷却部件之间的热阻相比，中央部分周边部分之间的热电阻部分和冷却部分很小。

2. 发明授权

US07935548B2 Deposition apparatus and deposition method 有权
标题翻译：沉积设备和沉积方法
公开(公告)号：US07935548B2
公开(公告)日：2011-05-03
申请号：US12334832
申请日：2008-12-15
申请人： Kazuhito Nishimura , Hideki Sasaoka
发明人： Kazuhito Nishimura , Hideki Sasaoka
IPC分类号： H01L21/66 , H01L21/62
CPC分类号： C23C16/4586 , C23C16/463
摘要： A deposition apparatus includes: a first electrode for placing a processing object; a second electrode for generating plasma with the first electrode, the second electrode being opposed to the first electrode; and a heat flow control heat transfer part for drawing heat from the processing object to generate a heat flow from a central area to a peripheral area of the processing object.
摘要翻译：沉积设备包括：用于放置处理对象的第一电极; 用于利用所述第一电极产生等离子体的第二电极，所述第二电极与所述第一电极相对; 以及热流控制传热部，用于从处理对象抽出热量，以产生从处理对象的中心区域到周边区域的热流。

3. 发明授权

US07755271B2 Field emission electrode, manufacturing method thereof, and electronic device 失效
标题翻译：场发射电极，其制造方法和电子器件
公开(公告)号：US07755271B2
公开(公告)日：2010-07-13
申请号：US11287838
申请日：2005-11-28
申请人： Kazuhito Nishimura , Hideki Sasaoka
发明人： Kazuhito Nishimura , Hideki Sasaoka
IPC分类号： H01J1/62 , H01J63/04
CPC分类号： H01J1/3048 , H01J2201/30457
摘要： An electron emission film having a pattern of diamond in X-ray diffraction and formed of a plurality of diamond fine grains having a grain diameter of 5 nm to 10 nm is formed on a substrate. The electron emission film can restrict the field intensity to a low level when it causes an emission current to flow, and has a uniform electron emission characteristic.
摘要翻译：在基板上形成具有X射线衍射中的金刚石图案和由多个粒径为5nm〜10nm的金刚石细晶粒形成的电子发射膜。当电子发射膜导致发射电流流动时，电子发射膜可以将场强限制在低水平，并且具有均匀的电子发射特性。

4. 发明申请

US20090088040A1 FIELD EMISSION ELECTRODE, A MANUFACTURING METHOD THEREOF, AND A MANUFACTURING APPARATUS THEREOF 有权
标题翻译：现场排放电极及其制造方法及其制造方法
公开(公告)号：US20090088040A1
公开(公告)日：2009-04-02
申请号：US12239061
申请日：2008-09-26
申请人： Kazuhito NISHIMURA , Hideki Sasaoka
发明人： Kazuhito NISHIMURA , Hideki Sasaoka
IPC分类号： H01J9/12
CPC分类号： H01J1/304 , H01J9/025 , H01J2201/30453 , H01J2201/30457
摘要： A method of manufacturing a field emission electrode includes humidification processing to absorb water at a surface of an electron emission film emitting electrons as a result of application of a voltage, and voltage application processing to apply an aging voltage between the humidified electron emission film and an electrode provided facing the electron emission film.
摘要翻译：一种制造场致发射电极的方法包括：加湿处理，以吸收作为施加电压的结果发射电子的电子发射膜的表面的水;以及电压施加处理，以在加湿的电子发射膜和面向电子发射膜设置的电极。

5. 发明授权

US06281814B1 Data conversion method, data converter, and program storage medium 有权
标题翻译：数据转换方法，数据转换器和程序存储介质
公开(公告)号：US06281814B1
公开(公告)日：2001-08-28
申请号：US09485042
申请日：2000-02-01
申请人： Hideki Sasaoka , Hirohiko Kazato , Takashi Noma
发明人： Hideki Sasaoka , Hirohiko Kazato , Takashi Noma
IPC分类号： H03M700
CPC分类号： G06F17/148
摘要： A peak detecting section 121 detects the maximum values (peaks) of frequency distributions, at intervals of unit times, from the wavelet intensity signal output from an intensity computing section 113. More specifically, giving attention to frequency distributions of the wavelet intensity signal as the transform result obtained by a signal converting section 110 at predetermined time intervals, the peak detecting section 121 detects the peaks (maximum values) of the frequency intensity distributions at intervals of unit times (predetermined time intervals). Changes in various frequency features over time which are contained in the time-series signal obtained by a wavelet transform of the time-series signal can be quantitatively grasped more accurately.
摘要翻译：峰值检测部分121从强度计算部分113输出的小波强度信号中以单位时间间隔检测频率分布的最大值（峰值）。更具体地，注意小波强度信号的频率分布为以预定的时间间隔变换由信号转换部分110获得的结果，峰值检测部分121以单位时间（预定时间间隔）的间隔检测频率强度分布的峰值（最大值）。随时间变化的各种频率特征被包含在通过时间序列信号的小波变换获得的时间序列信号中，可以更精确地定量地掌握。

6. 发明申请

US20100219744A1 FIELD EMISSION ELECTRODE, MANUFACTURING METHOD THEREOF, AND ELECTRONIC DEVICE 有权
标题翻译：场发射电极，其制造方法和电子器件
公开(公告)号：US20100219744A1
公开(公告)日：2010-09-02
申请号：US12779583
申请日：2010-05-13
申请人： Kazuhito NISHIMURA , Hideki Sasaoka
发明人： Kazuhito NISHIMURA , Hideki Sasaoka
IPC分类号： H01J1/62 , H01J1/02
CPC分类号： H01J1/3048 , H01J2201/30457
摘要： An electron emission film having a pattern of diamond in X-ray diffraction and formed of a plurality of diamond fine grains having a grain diameter of 5 nm to 10 nm is formed on a substrate. The electron emission film can restrict the field intensity to a low level when it causes an emission current to flow, and has a uniform electron emission characteristic.
摘要翻译：在基板上形成具有X射线衍射中的金刚石图案和由多个粒径为5nm〜10nm的金刚石细晶粒形成的电子发射膜。当电子发射膜导致发射电流流动时，电子发射膜可以将场强限制在低水平，并且具有均匀的电子发射特性。

7. 发明申请

US20090169769A1 DEPOSITION APPARATUS AND DEPOSITION METHOD 失效
标题翻译：沉积装置和沉积方法
公开(公告)号：US20090169769A1
公开(公告)日：2009-07-02
申请号：US12343263
申请日：2008-12-23
申请人： Kazuhito Nishimura , Hideki Sasaoka
发明人： Kazuhito Nishimura , Hideki Sasaoka
IPC分类号： C23C16/00 , H05H1/24
CPC分类号： C23C16/503 , C23C16/4586 , C23C16/463 , H01J37/32009 , H01J37/32541 , H01J2237/2001 , H01L21/67109
摘要： A deposition apparatus includes: a first electrode for placing a processing object; a second electrode for generating plasma with the first electrode, the second electrode being opposed to the first electrode; and a cooling part for cooling the processing object, wherein between the processing object and the cooling part, as compared with a thermal resistance between a central part of the processing object and the cooling part, a thermal resistance between a peripheral part peripheral to the central part and the cooling part is small.
摘要翻译：沉积设备包括：用于放置处理对象的第一电极; 用于利用所述第一电极产生等离子体的第二电极，所述第二电极与所述第一电极相对; 以及用于冷却处理对象的冷却部件，其中在处理对象和冷却部件之间，与处理对象的中心部分和冷却部件之间的热阻相比，中央部分周边部分之间的热电阻部分和冷却部分很小。

8. 发明申请

US20080226838A1 Plasma CVD apparatus and film deposition method 审中-公开
标题翻译：等离子体CVD装置和膜沉积方法
公开(公告)号：US20080226838A1
公开(公告)日：2008-09-18
申请号：US12004679
申请日：2007-12-21
申请人： Kazuhito Nishimura , Hideki Sasaoka
发明人： Kazuhito Nishimura , Hideki Sasaoka
IPC分类号： C23C16/513 , C23C16/54
CPC分类号： C23C16/4586 , C23C16/0272 , C23C16/26 , C23C16/45565 , C23C16/45578 , C23C16/4558 , C23C16/4585 , C23C16/503 , C23C16/52 , H01J37/32018 , H01J37/32027 , H01J37/3244 , H01J2237/3321
摘要： A plasma CVD apparatus includes a first electrode which is disposed in a reacting furnace and on which a substrate is mounted, a second electrode that is disposed above and opposite the first electrode and generates plasma with the first electrode, and a first gas supply nozzle that is disposed at a height between a height of the first electrode in the reacting furnace and a height of the second electrode, and has a plurality of ejection ports formed and arranged in such a way as to surround an area between the first electrode and the second electrode where plasma is generated.
摘要翻译：等离子体CVD装置包括设置在反应炉中并且其上安装有基板的第一电极，设置在第一电极上方并与第一电极相对的第二电极，并且与第一电极产生等离子体，以及第一气体供给喷嘴，设置在反应炉中的第一电极的高度和第二电极的高度之间的高度处，并且具有多个喷射口，其形成和布置成围绕第一电极和第二电极之间的区域产生等离子体的电极。

9. 发明申请

US20060113891A1 Field emission electrode, manufacturing method thereof, and electronic device 失效
标题翻译：场发射电极，其制造方法和电子器件
公开(公告)号：US20060113891A1
公开(公告)日：2006-06-01
申请号：US11287838
申请日：2005-11-28
申请人： Kazuhito Nishimura , Hideki Sasaoka
发明人： Kazuhito Nishimura , Hideki Sasaoka
IPC分类号： H01J63/04 , H01J1/62
CPC分类号： H01J1/3048 , H01J2201/30457
摘要： An electron emission film having a pattern of diamond in X-ray diffraction and formed of a plurality of diamond fine grains having a grain diameter of 5 nm to 10 nm is formed on a substrate. The electron emission film can restrict the field intensity to a low level when it causes an emission current to flow, and has a uniform electron emission characteristic.
摘要翻译：在基板上形成具有X射线衍射中的金刚石图案和由多个粒径为5nm〜10nm的金刚石细晶粒形成的电子发射膜。当电子发射膜导致发射电流流动时，电子发射膜可以将场强限制在低水平，并且具有均匀的电子发射特性。

10. 发明授权

US07812512B2 Field emission electrode, method and apparatus of manufacturing the same by carrying a humidification process and an aging process 有权
标题翻译：场致发射电极，通过进行加湿处理和老化处理来制造其的方法和装置
公开(公告)号：US07812512B2
公开(公告)日：2010-10-12
申请号：US12239061
申请日：2008-09-26
申请人： Kazuhito Nishimura , Hideki Sasaoka
发明人： Kazuhito Nishimura , Hideki Sasaoka
IPC分类号： H01J1/30 , H01J1/304 , H01J9/02 , H01J9/44
CPC分类号： H01J1/304 , H01J9/025 , H01J2201/30453 , H01J2201/30457
摘要： A method of manufacturing a field emission electrode includes humidification processing to absorb water at a surface of an electron emission film emitting electrons as a result of application of a voltage, and voltage application processing to apply an aging voltage between the humidified electron emission film and an electrode provided facing the electron emission film.
摘要翻译：制造场致发射电极的方法包括加湿处理，以吸收作为施加电压的结果发射电子的电子发射膜的表面的水;以及电压施加处理，以在加湿的电子发射膜和面向电子发射膜设置的电极。

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