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1. 发明申请

US20110299962A1 Vacuum Processing Apparatus And Vacuum Processing Method 审中-公开
标题翻译：真空加工设备和真空加工方法
公开(公告)号：US20110299962A1
公开(公告)日：2011-12-08
申请号：US13209871
申请日：2011-08-15
申请人： Takeshi OONO , Kenji Nakata , Shoji Okiguchi , Tooru Ueno , Hidehiro Oomae , Shigeharu Minami , Yoshitaka Kai
发明人： Takeshi OONO , Kenji Nakata , Shoji Okiguchi , Tooru Ueno , Hidehiro Oomae , Shigeharu Minami , Yoshitaka Kai
IPC分类号： H01L21/677 , H01L21/673
CPC分类号： H01L21/67167 , H01L21/67745 , Y10S414/136
摘要： A vacuum processing apparatus includes vacuum processing chambers for subjecting a sample to vacuum processing, a vacuum carriage, a switchable chamber, a cassette support for supporting a plurality of cassettes capable of housing samples, and a waiting cassette support for supporting a waiting cassette that differs from the cassettes supported on the cassette support and capable of having a number of samples. An atmospheric carriage enables carrying a sample among a given cassette of the plurality of cassettes or the waiting cassette. A controller effects control for carrying unprocessed and processed samples among the given cassette, the waiting cassette and the vacuum processing chamber, so that a mixture of both processed and unprocessed samples does not exist in the given cassette or the waiting cassette.
摘要翻译：真空处理设备包括用于对样品进行真空处理的真空处理室，真空托架，可切换室，用于支撑多个能够容纳样品的盒的盒支架和用于支撑不同的等待盒的等待盒支架从支撑在盒支架上的盒子并且能够具有多个样品。大气托架能够在多个盒子或等待盒中的给定盒中携带样品。控制器执行控制以在给定的盒式磁带，等待盒和真空处理室之间携带未处理和处理的样品，使得处理的和未处理的样品的混合物不存在于给定的盒式磁带或等待盒中。

2. 发明申请

US20050220575A1 Vacuum processing apparatus and vacuum processing method 有权
标题翻译：真空加工设备和真空加工方法
公开(公告)号：US20050220575A1
公开(公告)日：2005-10-06
申请号：US10874241
申请日：2004-06-24
申请人： Takeshi Oono , Kenji Nakata , Shoji Okiguchi , Tooru Ueno , Hidehiro Oomae , Shigeharu Minami , Yoshitaka Kai
发明人： Takeshi Oono , Kenji Nakata , Shoji Okiguchi , Tooru Ueno , Hidehiro Oomae , Shigeharu Minami , Yoshitaka Kai
IPC分类号： H01L21/3065 , B65G1/00 , H01L21/00 , H01L21/677 , H01L21/68
CPC分类号： H01L21/67167 , H01L21/67745 , Y10S414/136
摘要： The invention provides a vacuum processing apparatus and vacuum processing method capable of improving the yield factor of a product. A vacuum processing apparatus 1 comprises a plurality of vacuum processing chambers 7 for providing vacuum processing to a sample 2, a vacuum carriage means 8 for carrying a sample into and out of the vacuum processing chamber 7, a switchable chamber 9 capable of being switched between atmosphere and vacuum for carrying a sample into and out of the vacuum processing chamber, a cassette supporting means 10 for supporting a plurality of cassettes housing samples, a carriage means 4 capable of moving vertically for taking out a sample from a given cassette on the cassette supporting means, and a control means performing carriage control for carrying the sample in the given cassette via the carriage means, the switchable chamber and the vacuum carriage means into the vacuum processing chamber and for carrying the processed sample out of the vacuum processing chamber, wherein the apparatus is further equipped with a waiting cassette supporting means for supporting a waiting cassette 5 capable of preventing the processed samples and the unprocessed samples from being mixed in a single cassette.
摘要翻译：本发明提供能够提高产品的成品率的真空处理装置和真空处理方法。真空处理装置1包括用于向样品2提供真空处理的多个真空处理室7，用于将样品进出真空处理室7的真空载置装置8，可切换室9 用于将样品携带到真空处理室中的气体和真空;用于支撑容纳样品的多个盒的盒支撑装置10;能够垂直移动的托架装置4，用于从盒上的给定盒带取出样品支撑装置，以及执行托架控制的控制装置，用于将经由所述托架装置，所述可切换室和所述真空托架装置的所述样本运送到所述真空处理室中并将所述经处理的样品运送出所述真空处理室，该装置还配备有用于支撑等待盒式磁带5插头的等待盒支持装置防止处理的样品和未处理的样品在单个盒中混合。

3. 发明授权

US5299305A Method for generating forms and for processing and transferring data among the forms 失效
标题翻译：用于生成表单以及在表单之间处理和传输数据的方法
公开(公告)号：US5299305A
公开(公告)日：1994-03-29
申请号：US780462
申请日：1991-10-22
申请人： Hidehiro Oomae , Hidenari Makino , Atsushi Tanaka , Hideo Sato
发明人： Hidehiro Oomae , Hidenari Makino , Atsushi Tanaka , Hideo Sato
IPC分类号： G06F3/12 , G06F17/21 , G06F17/24 , G06Q10/10 , G06F15/40
CPC分类号： G06F17/211 , G06F17/243
摘要： A method of generating a plurality of forms that are related with one another, and more particularly a man-machine interface at a stage of generating forms, is able to define or correct form-relation definitions at a stage of inputting data in the forms from a standpoint of using the forms. The method is further able to realize definition and correction among forms merely by designating corresponding areas on a screen of a display device. Mutually-related forms are outputted to the display device based on predetermined form definitions, a message for calling upon an operator to perform a selective designation in order to determine an area to be adopted as a data transfer origin and an area to be adopted as a data transfer destination out of areas of the displayed forms is displayed, the area to be adopted as the transfer origin and the area to be adopted as the transfer destination are determined from the coordinate data inputted by the operator, the data loaded in the transfer origin area are transferred to the transfer destination area based on the relationship between the transfer origin area and the transfer destination area and the information relating to the forms, and transferred data are displayed in the transfer destination area.
摘要翻译：一种生成多个相互关联的形式的方法，特别是在生成形式阶段的人机接口，能够在以下形式中输入数据的阶段来定义或修正形式关系定义：使用表单的立场。该方法还能够通过在显示装置的画面上指定相应的区域来实现形式之间的定义和校正。相互关联的形式基于预定的形式定义输出到显示装置，用于呼叫操作者执行选择性指定的消息，以便确定要被采用的区域作为数据传送原点，以及要采用的区域作为数据传送目的地显示在所显示形式的区域之外，将根据由操作员输入的坐标数据确定要被用作传送原点的区域和要被采用作为传送目的地的区域，加载在传送源中的数据区域根据转移起始区域和转移目的地区域之间的关系以及与表单相关的信息被转移到转移目的地区域，并且传送的数据被显示在转移目的地区域中。

4. 发明授权

US08033770B2 Vacuum processing apparatus 有权
标题翻译：真空加工设备
公开(公告)号：US08033770B2
公开(公告)日：2011-10-11
申请号：US12230466
申请日：2008-08-29
申请人： Takeshi Oono , Kenji Nakata , Shoji Okiguchi , Tooru Ueno , Hidehiro Oomae , Shigeharu Minami , Yoshitaka Kai
发明人： Takeshi Oono , Kenji Nakata , Shoji Okiguchi , Tooru Ueno , Hidehiro Oomae , Shigeharu Minami , Yoshitaka Kai
IPC分类号： H01L21/677
CPC分类号： H01L21/67167 , H01L21/67745 , Y10S414/136
摘要： A vacuum processing apparatus includes vacuum processing chambers for subjecting a sample to vacuum processing, a vacuum carriage, a switchable chamber, a cassette support for supporting a plurality of cassettes capable of housing samples, and a waiting cassette support for supporting a waiting cassette that differs from the cassettes supported on the cassette support and capable of having a number of samples. An atmospheric carriage enables carrying a sample among a given cassette of the plurality of cassettes or the waiting cassette. A controller effects control for carrying unprocessed and processed samples among the given cassette, the waiting cassette and the vacuum processing chamber, so that a mixture of both processed and unprocessed samples does not exist in the given cassette or the waiting cassette.
摘要翻译：真空处理设备包括用于对样品进行真空处理的真空处理室，真空托架，可切换室，用于支撑多个能够容纳样品的盒的盒支架和用于支撑不同的等待盒的等待盒支架从支撑在盒支架上的盒子并且能够具有多个样品。大气托架能够在多个盒子或等待盒中的给定盒中携带样品。控制器执行控制以在给定的盒式磁带，等待盒和真空处理室之间携带未处理和处理的样品，使得处理的和未处理的样品的混合物不存在于给定的盒式磁带或等待盒中。

5. 发明申请

US20090010738A1 Vacuum processing apparatus and vacuum processing method 有权
标题翻译：真空加工设备和真空加工方法
公开(公告)号：US20090010738A1
公开(公告)日：2009-01-08
申请号：US12230466
申请日：2008-08-29
申请人： Takeshi Oono , Kenji Nakata , Shoji Okiguchi , Tooru Ueno , Hidehiro Oomae , Shigeharu Minami , Yoshitaka Kai
发明人： Takeshi Oono , Kenji Nakata , Shoji Okiguchi , Tooru Ueno , Hidehiro Oomae , Shigeharu Minami , Yoshitaka Kai
IPC分类号： H01L21/02
CPC分类号： H01L21/67167 , H01L21/67745 , Y10S414/136
摘要： A vacuum processing apparatus includes vacuum processing chambers for subjecting a sample to vacuum processing, a vacuum carriage, a switchable chamber, a cassette support for supporting a plurality of cassettes capable of housing samples, and a waiting cassette support for supporting a waiting cassette that differs from the cassettes supported on the cassette support and capable of having a number of samples. An atmospheric carriage enables carrying a sample among a given cassette of the plurality of cassettes or the waiting cassette. A controller effects control for carrying unprocessed and processed samples among the given cassette, the waiting cassette and the vacuum processing chamber, so that a mixture of both processed and unprocessed samples does not exist in the given cassette or the waiting cassette.
摘要翻译：真空处理设备包括用于对样品进行真空处理的真空处理室，真空托架，可切换室，用于支撑多个能够容纳样品的盒的盒支架和用于支撑不同的等待盒的等待盒支架从支撑在盒支架上的盒子并且能够具有多个样品。大气托架能够在多个盒子或等待盒中的给定盒中携带样品。控制器执行控制以在给定的盒式磁带，等待盒和真空处理室之间携带未处理和处理的样品，使得处理的和未处理的样品的混合物不存在于给定的盒式磁带或等待盒中。

6. 发明授权

US07862289B2 Vacuum processing apparatus and vacuum processing method 有权
标题翻译：真空加工设备和真空加工方法
公开(公告)号：US07862289B2
公开(公告)日：2011-01-04
申请号：US12230467
申请日：2008-08-29
申请人： Takeshi Oono , Kenji Nakata , Shoji Okiguchi , Tooru Ueno , Hidehiro Oomae , Shigeharu Minami , Yoshitaka Kai
发明人： Takeshi Oono , Kenji Nakata , Shoji Okiguchi , Tooru Ueno , Hidehiro Oomae , Shigeharu Minami , Yoshitaka Kai
IPC分类号： B65H85/00
CPC分类号： H01L21/67167 , H01L21/67745 , Y10S414/136
摘要： A vacuum processing apparatus and method in which the apparatus includes vacuum processing chambers for subjecting a sample to vacuum processing, a vacuum carriage, a switchable chamber, a cassette support for supporting a plurality of cassettes capable of housing samples, and a waiting cassette support for supporting a waiting cassette that differs from the cassettes supported on the cassette support and capable of having a number of samples. An atmospheric carriage enables carrying a sample among a given cassette of the plurality of cassettes or the waiting cassette. A controller effects control for carrying unprocessed and processed samples among the given cassette, the waiting cassette and the vacuum processing chamber, so that a mixture of both processed and unprocessed samples does not exist in the given cassette or the waiting cassette.
摘要翻译：一种真空处理装置和方法，其中所述装置包括用于对样品进行真空处理的真空处理室，真空支架，可切换室，用于支撑多个能够容纳样品的盒的盒支架，以及用于支持等同的盒子，其与支撑在盒支架上的盒子不同，并且能够具有多个样品。大气托架能够在多个盒子或等待盒中的给定盒中携带样品。控制器执行控制以在给定的盒式磁带，等待盒和真空处理室之间携带未处理和处理的样品，使得处理的和未处理的样品的混合物不存在于给定的盒式磁带或等待盒中。

7. 发明授权

US07476073B2 Vacuum processing method 有权
标题翻译：真空加工方法
公开(公告)号：US07476073B2
公开(公告)日：2009-01-13
申请号：US10874241
申请日：2004-06-24
申请人： Takeshi Oono , Kenji Nakata , Shoji Okiguchi , Tooru Ueno , Hidehiro Oomae , Shigeharu Minami , Yoshitaka Kai
发明人： Takeshi Oono , Kenji Nakata , Shoji Okiguchi , Tooru Ueno , Hidehiro Oomae , Shigeharu Minami , Yoshitaka Kai
IPC分类号： H01L21/02
CPC分类号： H01L21/67167 , H01L21/67745 , Y10S414/136
摘要： A vacuum processing apparatus and method includes at least one vacuum processing chamber, at least one carriage for carrying the sample from a given cassette into and out of the vacuum processing chamber. A controller performs carriage control for carrying the sample taken out of the given cassette into the vacuum processing chamber, and for carrying the processed sample out of the vacuum processing chamber. A waiting cassette support supports a waiting cassette in which an unprocessed sample from the given cassette or a processed sample from the given cassette after vacuum processing is placed so as to prevent the processed and unprocessed sample from being mixed with each other.
摘要翻译：真空处理装置和方法包括至少一个真空处理室，至少一个托架，用于将来自给定盒的样品运送到真空处理室中。控制器执行托架控制，以将从给定盒取出的样品运送到真空处理室中，并将处理过的样品运送出真空处理室。等待的盒式支架支持等待盒，其中放置了来自给定盒的未处理样品或真空处理后的给定盒的处理样品，以防止处理和未处理的样品彼此混合。

8. 发明授权

US5504676A Slip processing method processing data from slips with varying formats 失效
标题翻译：滑移处理方法处理来自具有不同格式的单据的数据
公开(公告)号：US5504676A
公开(公告)日：1996-04-02
申请号：US249760
申请日：1994-05-26
申请人： Singi Domen , Kaori Kondoh , Koichi Yamano , Shinobu Koizumi , Rie Kobayashi , Koichi Taguchi , Hiroshi Koike , Hidehiro Oomae , Masashi Amano , Hiroyuki Maezawa , Hiroshi Isobe , Ryoichi Sasaki
发明人： Singi Domen , Kaori Kondoh , Koichi Yamano , Shinobu Koizumi , Rie Kobayashi , Koichi Taguchi , Hiroshi Koike , Hidehiro Oomae , Masashi Amano , Hiroyuki Maezawa , Hiroshi Isobe , Ryoichi Sasaki
IPC分类号： G06Q10/10 , G06F17/30
CPC分类号： G06F17/30595 , G06Q40/02 , G06Q40/12
摘要： A slip processing method for simplifying a processing of a job which uses a form of a predetermined format at a frequency of once a long term such as month, quarter or year and in which an input form is changed at a frequency of once per several times of use. The method comprises storing format information of an input form and data information in one file, providing a format of the input form including a plurality of tables each comprising a plurality of items (cells), storing data in corresponding ones of the items, executing a retrieval of the items and a totalization of data in the items with referencing a file which stores the format information and the data of the input form and storing the format information and the data of the input form and the processed information in a form which is transmittable through a network.
摘要翻译：一种滑动处理方法，用于简化使用预定格式的形式的作业的处理，其频率为一年的长期，例如月，季或年，并且其中输入形式以每次一次的频率改变的使用。该方法包括将输入形式和数据信息的格式信息存储在一个文件中，提供输入格式的格式，该格式包括多个表，每个表包括多个项（单元），在对应的项中存储数据，执行通过参考存储格式信息和输入形式的数据的文件来检索项目和数据的总计，并以可传输的形式存储格式信息和输入形式的数据和处理的信息通过网络。

9. 发明申请

US20090003978A1 Vacuum processing apparatus and vacuum processing method 有权
标题翻译：真空加工设备和真空加工方法
公开(公告)号：US20090003978A1
公开(公告)日：2009-01-01
申请号：US12230467
申请日：2008-08-29
申请人： Takeshi Oono , Kenji Nakata , Shoji Okiguchi , Tooru Ueno , Hidehiro Oomae , Shigeharu Minami , Yoshitaka Kai
发明人： Takeshi Oono , Kenji Nakata , Shoji Okiguchi , Tooru Ueno , Hidehiro Oomae , Shigeharu Minami , Yoshitaka Kai
IPC分类号： H01L21/67
CPC分类号： H01L21/67167 , H01L21/67745 , Y10S414/136
摘要： A vacuum processing apparatus and method in which the apparatus includes vacuum processing chambers for subjecting a sample to vacuum processing, a vacuum carriage, a switchable chamber, a cassette support for supporting a plurality of cassettes capable of housing samples, and a waiting cassette support for supporting a waiting cassette that differs from the cassettes supported on the cassette support and capable of having a number of samples. An atmospheric carriage enables carrying a sample among a given cassette of the plurality of cassettes or the waiting cassette. A controller effects control for carrying unprocessed and processed samples among the given cassette, the waiting cassette and the vacuum processing chamber, so that a mixture of both processed and unprocessed samples does not exist in the given cassette or the waiting cassette.
摘要翻译：一种真空处理装置和方法，其中所述装置包括用于对样品进行真空处理的真空处理室，真空支架，可切换室，用于支撑多个能够容纳样品的盒的盒支架，以及用于支持等同的盒子，其与支撑在盒支架上的盒子不同，并且能够具有多个样品。大气托架能够在多个盒子或等待盒中的给定盒中携带样品。控制器执行控制以在给定的盒式磁带，等待盒和真空处理室之间携带未处理和处理的样品，使得处理的和未处理的样品的混合物不存在于给定的盒式磁带或等待盒中。

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