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    • 1. 发明授权
    • Semiconductor device having an enlarged space area surrounding an isolation trench for reducing thermal resistance and improving heat dissipation
    • 半导体器件具有围绕隔离沟槽的扩大的空间区域,用于降低热阻并改善散热
    • US08018006B2
    • 2011-09-13
    • US12759188
    • 2010-04-13
    • Mitsuru AraiShinichiro WadaHideaki Nonami
    • Mitsuru AraiShinichiro WadaHideaki Nonami
    • H01L21/70
    • H01L21/84H01L27/1203H01L29/0692H01L29/7317H01L29/732
    • A semiconductor device includes a lower substrate, a thin semiconductor layer and an insulating layer formed between the lower substrate and the semiconductor layer. An active transistor area is formed with a base formed along a surface of the semiconductor layer, an emitter region formed in the base, a buried collector in the thin semiconductor layer to contact the insulating layer, a collector contacting the buried collector, and emitter, collector and base contacts. The active transistor area is configured to operate at an emitter current at least in the order of mA (milli-ampere). An isolation trench extends through the semiconductor layer to the insulating layer and surrounds the active transistor area with a distance in the order of μm (micron) from the active transistor area and with a space area of more than 50 μm2 between the active transistor area and the isolation trench.
    • 半导体器件包括下基板,薄半导体层和形成在下基板和半导体层之间的绝缘层。 有源晶体管区域形成有沿着半导体层的表面形成的基底,形成在基底中的发射极区域,薄的半导体层中的与绝缘层接触的掩埋集电极,与埋入集电极接触的集电极和发射极, 收集器和基座触点。 有源晶体管区域被配置为以至少大约数毫安(毫安)的发射极电流工作。 隔离沟槽延伸穿过半导体层到绝缘层并且围绕有源晶体管区域,距离有源晶体管区域的距离为μm(微米),并且在有源晶体管区域与有源晶体管区域之间具有大于50μm2的空间区域 隔离沟。
    • 7. 发明申请
    • SEMICONDUCTOR DEVICE
    • 半导体器件
    • US20100314712A1
    • 2010-12-16
    • US12759188
    • 2010-04-13
    • Mitsuru AraiShinichiro WadaHideaki Nonami
    • Mitsuru AraiShinichiro WadaHideaki Nonami
    • H01L29/73
    • H01L21/84H01L27/1203H01L29/0692H01L29/7317H01L29/732
    • A semiconductor device includes a lower substrate, a thin semiconductor layer and an insulating layer formed between the lower substrate and the semiconductor layer. An active transistor area is formed with a base formed along a surface of the semiconductor layer, an emitter region formed in the base, a buried collector in the thin semiconductor layer to contact the insulating layer, a collector contacting the buried collector, and emitter, collector and base contacts. The active transistor area is configured to operate at an emitter current at least in the order of mA (milli-ampere). An isolation trench extends through the semiconductor layer to the insulating layer and surrounds the active transistor area with a distance in the order of μm (micron) from the active transistor area and with a space area of more than 50 μm2 between the active transistor area and the isolation trench.
    • 半导体器件包括下基板,薄半导体层和形成在下基板和半导体层之间的绝缘层。 有源晶体管区域形成有沿着半导体层的表面形成的基底,形成在基底中的发射极区域,薄的半导体层中的与绝缘层接触的掩埋集电极,与埋入集电极接触的集电极和发射极, 收集器和基座触点。 有源晶体管区域被配置为以至少大约数毫安(毫安)的发射极电流工作。 隔离沟槽延伸穿过半导体层到绝缘层并且围绕有源晶体管区域,距离有源晶体管区域的距离为μm(微米),并且在有源晶体管区域与有源晶体管区域之间具有大于50μm2的空间区域 隔离沟。