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1. 发明授权

US06959252B2 Method for analyzing in-line QC test parameters 失效
标题翻译：分析在线QC测试参数的方法
公开(公告)号：US06959252B2
公开(公告)日：2005-10-25
申请号：US10604244
申请日：2003-07-03
申请人： Hung-En Tai , Haw-Jyue Luo
发明人： Hung-En Tai , Haw-Jyue Luo
IPC分类号： G01R31/26 , G05B19/418 , G06F19/00
CPC分类号： G05B19/41875 , Y02P90/22
摘要： A method for analyzing in-line QCtest parameters is used to analyze a plurality of lots of products, each lot of products having a lot number and being formed using a plurality of equipments. At least one wafer of each lot of products is tested by at least one in-line QC test item to generate an in-line QC test parameter. The in-line QC test item, a sample test item and a wafer test item related to the in-line QC test item are stored in a database. The database further stores the in-line QC test parameter and data of a plurality of lots of high-yield product stocks, such as various test items and test parameters. The method includes the following steps: analyzing the in-line QC test parameter to determine whether the in-line QC test parameter corresponds to a predetermined spec or not; searching the database to find out the sample test item or the wafer test item related to the in-line QC test item when the in-line QC test parameter does not correspond to the predetermined spec; searching the database to find out the corresponding test parameters of the high-yield product stocks according to the in-line QC test item and the searched sample test item or the wafer test item; and generating a correlation to illustrate the relationship between the in-line QC test item and the sample test item, or the relationship between the in-line QC test item and the wafer test item according to the searched high-yield product stocks.
摘要翻译：用于分析在线QC测试参数的方法用于分析多批产品，每批产品具有批号并且使用多个设备形成。每批产品的至少一个晶片通过至少一个在线QC测试项目进行测试，以生成在线QC测试参数。在线QC测试项目，样品测试项目和与在线QC测试项目相关的晶片测试项目存储在数据库中。数据库进一步存储多个批量的高收益产品库存的在线QC测试参数和数据，例如各种测试项目和测试参数。该方法包括以下步骤：分析在线QC测试参数，以确定在线QC测试参数是否对应于预定规格; 搜索数据库以查找在线QC测试参数不符合预定规格的样品测试项目或与在线QC测试项目相关的晶片测试项目; 搜索数据库，根据在线QC测试项目和搜索到的样品测试项目或晶片测试项目，找出高产量产品库存的相应测试参数; 并产生相关性，以说明根据所搜索的高产量库存，在线QC测试项目和样本测试项目之间的关系，或者在线QC测试项目与晶片测试项目之间的关系。

2. 发明申请

US20050004773A1 METHOD FOR ANALYZING IN-LINE QC TEST PARAMETERS 失效
标题翻译：用于分析在线QC测试参数的方法
公开(公告)号：US20050004773A1
公开(公告)日：2005-01-06
申请号：US10604244
申请日：2003-07-03
申请人： Hung-En Tai , Haw-Jyue Luo
发明人： Hung-En Tai , Haw-Jyue Luo
IPC分类号： G01R31/26 , G05B19/418 , G06F19/00
CPC分类号： G05B19/41875 , Y02P90/22
摘要： A method for analyzing in-line QCtest parameters is used to analyze a plurality of lots of products, each lot of products having a lot number and being formed using a plurality of equipments. At least one wafer of each lot of products is tested by at least one in-line QC test item to generate an in-line QC test parameter. The in-line QC test item, a sample test item and a wafer test item related to the in-line QC test item are stored in a database. The database further stores the in-line QC test parameter and data of a plurality of lots of high-yield product stocks, such as various test items and test parameters. The method includes the following steps: analyzing the in-line QC test parameter to determine whether the in-line QC test parameter corresponds to a predetermined spec or not; searching the database to find out the sample test item or the wafer test item related to the in-line QC test item when the in-line QC test parameter does not correspond to the predetermined spec; searching the database to find out the corresponding test parameters of the high-yield product stocks according to the in-line QC test item and the searched sample test item or the wafer test item; and generating a correlation to illustrate the relationship between the in-line QC test item and the sample test item, or the relationship between the in-line QC test item and the wafer test item according to the searched high-yield product stocks.
摘要翻译：用于分析在线QC测试参数的方法用于分析多批产品，每批产品具有批号并且使用多个设备形成。每批产品的至少一个晶片通过至少一个在线QC测试项目进行测试，以生成在线QC测试参数。在线QC测试项目，样品测试项目和与在线QC测试项目相关的晶片测试项目存储在数据库中。数据库进一步存储多个批量的高收益产品库存的在线QC测试参数和数据，例如各种测试项目和测试参数。该方法包括以下步骤：分析在线QC测试参数，以确定在线QC测试参数是否对应于预定规格; 搜索数据库以查找在线QC测试参数不符合预定规格的样品测试项目或与在线QC测试项目相关的晶片测试项目; 搜索数据库，根据在线QC测试项目和搜索到的样品测试项目或晶片测试项目，找出高产量产品库存的相应测试参数; 并产生相关性，以说明根据所搜索的高产量库存，在线QC测试项目和样本测试项目之间的关系，或者在线QC测试项目与晶片测试项目之间的关系。

3. 发明申请

US20060048010A1 DATA ANALYZING METHOD FOR A FAULT DETECTION AND CLASSIFICATION SYSTEM 审中-公开
标题翻译：用于故障检测和分类系统的数据分析方法
公开(公告)号：US20060048010A1
公开(公告)日：2006-03-02
申请号：US10711179
申请日：2004-08-30
申请人： Hung-En Tai , Haw-Jyue Luo
发明人： Hung-En Tai , Haw-Jyue Luo
IPC分类号： G06F11/00
CPC分类号： G06F11/079 , G05B23/0221 , G06F11/0706
摘要： A data analyzing method for a fault detection and classification system. The method includes extracting a set of raw data from a fault detection and classification system, separating the raw data for generating another set of classified data via a predetermined filtering condition, and utilizing a predetermined statistical method for analyzing the classified data.
摘要翻译：一种故障检测和分类系统的数据分析方法。该方法包括从故障检测和分类系统提取一组原始数据，分离用于经由预定滤波条件生成另一组分类数据的原始数据，并利用预定的统计方法分析分类数据。

4. 发明授权

US06999897B2 Method and related system for semiconductor equipment early warning management 失效
标题翻译：半导体设备预警管理方法及相关系统
公开(公告)号：US06999897B2
公开(公告)日：2006-02-14
申请号：US10708573
申请日：2004-03-11
申请人： Hung-En Tai , Chien-Chung Chen , Haw-Jyue Luo , Sheng-Jen Wang
发明人： Hung-En Tai , Chien-Chung Chen , Haw-Jyue Luo , Sheng-Jen Wang
IPC分类号： G11C7/00
CPC分类号： G05B19/41875 , Y02P90/22
摘要： A method and related system for semiconductor equipment early warning management. The method includes recording process parameters of each piece of equipment, recording equipment parameters when each piece of equipment is processing, evaluating and recording the quality of semiconductor products and corresponding testing parameters, and analyzing a relationship between the corresponding process parameters, the corresponding equipment parameters, and the quality of semiconductor products of each piece of equipment.
摘要翻译：一种半导体设备预警管理方法及相关系统。该方法包括记录每件设备的处理参数，每台设备处理时记录设备参数，评估和记录半导体产品的质量和相应的测试参数，分析相应工艺参数，相应设备参数之间的关系，以及每件设备的半导体产品的质量。

5. 发明申请

US20050203715A1 METHOD AND RELATED SYSTEM FOR SEMICONDUCTOR EQUIPMENT EARLY WARNING MANAGEMENT 失效
标题翻译：用于半导体设备的方法和相关系统早期警告管理
公开(公告)号：US20050203715A1
公开(公告)日：2005-09-15
申请号：US10708573
申请日：2004-03-11
申请人： Hung-En Tai , Chien-Chung Chen , Haw-Jyue Luo , Sheng-Jen Wang
发明人： Hung-En Tai , Chien-Chung Chen , Haw-Jyue Luo , Sheng-Jen Wang
IPC分类号： G06F19/00
CPC分类号： G05B19/41875 , Y02P90/22
摘要： A method and related system for semiconductor equipment early warning management. The method includes recording process parameters of each piece of equipment, recording equipment parameters when each piece of equipment is processing, evaluating and recording the quality of semiconductor products and corresponding testing parameters, and analyzing a relationship between the corresponding process parameters, the corresponding equipment parameters, and the quality of semiconductor products of each piece of equipment.
摘要翻译：一种半导体设备预警管理方法及相关系统。该方法包括记录每件设备的处理参数，每台设备处理时记录设备参数，评估和记录半导体产品的质量和相应的测试参数，分析相应工艺参数，相应设备参数之间的关系，以及每件设备的半导体产品的质量。

6. 发明授权

US06828776B2 Method for analyzing defect inspection parameters 失效
标题翻译：分析缺陷检查参数的方法
公开(公告)号：US06828776B2
公开(公告)日：2004-12-07
申请号：US10604685
申请日：2003-08-11
申请人： Hung-En Tai , Haw-Jyue Luo
发明人： Hung-En Tai , Haw-Jyue Luo
IPC分类号： G01R104
CPC分类号： G01R31/2831
摘要： The claimed invention method is for analyzing defect inspection parameters. The method includes searching for the defect inspection parameters of a plurality of lots of products from a database, classifying the plurality of lots of products into at least a qualified group and a failed group according to the defect inspection parameters, searching for a process step correlated to a defect inspection item from the database, searching for manufacturing equipment through which the qualified group has passed in the process step and the manufacturing equipment through which the failed group has passed in the process step, and determining the manufacturing equipment through which the probability that the failed group having passed which is greater than that of the qualified group.
摘要翻译：所要求发明的方法是用于分析缺陷检查参数。该方法包括从数据库中搜索多批产品的缺陷检查参数，根据缺陷检查参数将多批产品分类为至少一个合格的组和一个失败的组，搜索相关的处理步骤到数据库中的缺陷检查项目，在处理步骤中寻找合格的组已经通过的制造设备和在过程步骤中已经通过的制造设备，并且确定制造设备，通过该设备，失败的群体已经超过合格群体。

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