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    • 7. 发明申请
    • PHOTOACOUSTIC METHOD WITH A MEASURING LIGHT HAVING A PREDETERMINED WAVELENGTH RANGE FOR THE DETERMINATION OF PROPERTIES OF AN INHOMOGENEOUS SAMPLE
    • US20200326274A1
    • 2020-10-15
    • US16756348
    • 2018-10-26
    • HUMBOLDT-UNIVERSITÄT ZU BERLIN
    • Raphael SCHLESINGERJan-Ferenc KISCHKATHermann VON LILIENFELD-TOAL
    • G01N21/17A61B5/145
    • The invention relates to a photoacoustic method comprising a measurement light having a predefined wavelength range for determining properties of an inhomogeneous sample, the sample having a mean absorption length μ from the range of 1 to 100 micrometers for the predefined wavelength range, the method comprising the following steps: a) radiating at least one measurement light pulse having a predefined pulse duration and a predefined intensity onto a measurement area of the area F with √F>>μ in the surface of the inhomogeneous sample; b) detecting at least one pressure transient at the measurement area, the pressure transient resulting from the absorption of the at least one measurement light pulse in the inhomogeneous sample with production of a pressure wave propagating to the measurement area; c) calculating a value for the energy density absorbed by the sample during the pulse duration from the curve of the at least one pressure transient at the start and at the end of the at least one measurement light pulse; characterized by d) repetition of steps a) to c) for different angles of incidence of the measurement light with respect to the normal of the measurement area, the energy density values determined in c) each being indicated with the angle of incidence; e) modeling the inhomogeneous sample as a stack of layers, each layer being assigned at least a layer thickness and an absorption coefficient, at least one absorption coefficient of a layer being a fitting parameter; f) performing a fitting procedure for the fitting parameters of the stack of layers, the division of the energy density values indicated with the angle of incidence into contributions of the individual layers being varied by variation of the fitting parameters until a predefined consistency criterion is met; g) reading out the fitted fitting parameters as values at least for the depth-resolved absorption coefficient of the inhomogeneous sample.
    • 8. 发明授权
    • Methods and fabrication tools for fabricating optical devices
    • 用于制造光学器件的方法和制造工具
    • US09052597B2
    • 2015-06-09
    • US13856621
    • 2013-04-04
    • HUMBOLDT-UNIVERSITÄT zu BERLINKARLSRUHER INSTITUT FÜR TECHNOLOGIE
    • Andreas SchellJoachim FischerJohannes KaschkeOliver BensonMartin Wegener
    • G03F7/20G03F7/00G02B6/138
    • G03F7/20G02B6/138G03F7/0005
    • An embodiment of the present invention relates to a method of fabricating an optical device, the method comprising the steps of: depositing a photoresist layer on a carrier, said photoresist layer containing at least one optical component, determining the position of the at least one optical component inside the photoresist layer before exposing the photoresist layer to a first radiation, said first radiation being capable of transforming the photoresist layer from an unmodified state to a modified state, elaborating a device pattern based on the position of the at least one optical component, and fabricating the elaborated device pattern by locally exposing the photoresist layer to the first radiation and locally transforming the photoresist layer from the unmodified state to the modified state.
    • 本发明的实施例涉及一种制造光学器件的方法,所述方法包括以下步骤:在载体上沉积光致抗蚀剂层,所述光致抗蚀剂层包含至少一个光学部件,确定所述至少一个光学器件的位置 在将光致抗蚀剂层暴露于第一辐射之前,光致抗蚀剂层内部的部件,所述第一辐射能够将光致抗蚀剂层从未修改状态转变到修改状态,基于至少一个光学部件的位置来详细描述器件图案, 以及通过将所述光致抗蚀剂层局部暴露于所述第一辐射并将所述光致抗蚀剂层局部地从所述未修改状态转变为所述修改状态来制造所述精细化的器件图案。
    • 10. 发明申请
    • WAVEGUIDE ARRANGEMENT
    • 波形安排
    • US20160187579A1
    • 2016-06-30
    • US14650711
    • 2013-11-26
    • HUMBOLDT-UNIVERSITÄT ZU BERLINFORSCHUNGSVERBUND BERLIN E.V.
    • Rico HENZEAndreas THIESOliver BENSON
    • G02B6/122G02B6/136
    • The invention relates to a waveguide arrangement (10) comprising a substrate (20) and at least one strip-shaped waveguide made of a wave-guiding layer material (30). The strip waveguide extends strip-like in a longitudinal direction and can guide waves in its longitudinal direction so that the wave propagation direction corresponds to the longitudinal direction of the strip waveguide. The refractive index of the substrate (20) is greater than the refractive index of the layer material (30). In order to guide waves vertically, the strip waveguide forms a waveguide bridge (60) which is located above a recess (100) in the substrate (20) and which is at least partially spatially separated from the substrate (20) there.
    • 本发明涉及一种波导装置(10),其包括基板(20)和由波导层材料(30)制成的至少一个条形波导。 带状波导沿纵向方向延伸成条状,并且可以在其纵向方向上引导波,使得波传播方向对应于条形波导的纵向方向。 基板(20)的折射率大于层材料(30)的折射率。 为了垂直地引导波浪,带状波导形成位于基底(20)中的凹部(100)上方并且至少部分空间上与基底(20)分离的波导桥(60)。