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1. 发明申请

WO2006110864A2 METHOD FOR IMPROVING SURFACE ROUGHNESS DURING ELECTRO-POLISHING 审中-公开
标题翻译：在电抛光过程中改善表面粗糙度的方法
公开(公告)号：WO2006110864A2
公开(公告)日：2006-10-19
申请号：PCT/US2006/013804
申请日：2006-04-12
申请人： ACM RESEARCH, INC. , WANG, Hui , HO, Fredrick , WANG, Jian
发明人： WANG, Hui , HO, Fredrick , WANG, Jian
IPC分类号： C25D3/02
CPC分类号： C25F7/00 , B23H5/08 , B24B37/04 , B24B57/02
摘要： A surface is electropolished using a stream of electrolyte. A nozzle is used to apply the stream of electrolyte to the surface. The nozzle has an insulator wall and a partial electrode. The insulator wall and the partial electrode form a flow channel for the stream of electrolyte. The stream of electrolyte contacts the insulator wall and the partial electrode when the stream of electrolyte flows through the flow channel formed by the insulator wall and the partial electrode. The insulator wall is less electrically conductive than the partial electrode. A power supply is connected to the partial electrode. The power supply is configured to apply a charge to the stream of electrolyte through the partial electrode when the stream of electrolyte flows through the flow channel formed by the insulator wall and the partial electrode.
摘要翻译：使用电解质流对表面进行电抛光。使用喷嘴将电解液流施加到表面。喷嘴具有绝缘体壁和部分电极。绝缘体壁和部分电极形成用于电解质流的流动通道。当电解质流过由绝缘体壁和部分电极形成的流动通道时，电解质流与绝缘体壁和部分电极接触。绝缘体壁比部分电极导电性差。电源连接到部分电极。电源构造成当电解质流流过由绝缘体壁和部分电极形成的流动通道时，通过部分电极向电解质流施加电荷。

2. 发明申请

WO2006110864A3 METHOD FOR IMPROVING SURFACE ROUGHNESS DURING ELECTRO-POLISHING 审中-公开
标题翻译：在电抛光过程中改善表面粗糙度的方法
公开(公告)号：WO2006110864A3
公开(公告)日：2008-09-25
申请号：PCT/US2006013804
申请日：2006-04-12
申请人： ACM RES INC , WANG HUI , HO FREDRICK , WANG JIAN
发明人： WANG HUI , HO FREDRICK , WANG JIAN
IPC分类号： C25D3/02
CPC分类号： C25F7/00 , B23H5/08 , B24B37/04 , B24B57/02
摘要： A surface is electropolished using a stream of electrolyte. A nozzle is used to apply the stream of electrolyte to the surface. The nozzle has an insulator wall and a partial electrode. The insulator wall and the partial electrode form a flow channel for the stream of electrolyte. The stream of electrolyte contacts the insulator wall and the partial electrode when the stream of electrolyte flows through the flow channel formed by the insulator wall and the partial electrode. The insulator wall is less electrically conductive than the partial electrode. A power supply is connected to the partial electrode. The power supply is configured to apply a charge to the stream of electrolyte through the partial electrode when the stream of electrolyte flows through the flow channel formed by the insulator wall and the partial electrode.
摘要翻译：使用电解质流对表面进行电抛光。使用喷嘴将电解液流施加到表面。喷嘴具有绝缘体壁和部分电极。绝缘体壁和部分电极形成用于电解质流的流动通道。当电解质流过由绝缘体壁和部分电极形成的流动通道时，电解质流与绝缘体壁和部分电极接触。绝缘体壁比部分电极导电性差。电源连接到部分电极。电源构造成当电解质流流过由绝缘体壁和部分电极形成的流动通道时，通过部分电极向电解质流施加电荷。

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