会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 2. 发明申请
    • CHEMICAL VAPOR DEPOSITION OF SILICON ON TO SUBSTRATES
    • 化学蒸气沉积到基底上
    • WO2004079031A3
    • 2004-12-16
    • PCT/US2004006764
    • 2004-03-05
    • RESTEK CORPSMITH DAVID ABBOTTBARONE GARY AHIGGINS MARTIN EKENDALL BRUCE R FLAVRICH DAVID J
    • SMITH DAVID ABBOTTBARONE GARY AHIGGINS MARTIN EKENDALL BRUCE R FLAVRICH DAVID J
    • C23C16/24C23C16/44C23C16/455B32B9/04C23C8/02
    • C23C16/4408B32B9/04C09D1/00C09D5/08C09D5/084C23C16/24C23C16/4401C23C16/45523
    • A method of passivating the surface of a substrate to protect the surface against corrosion, the surface effects on a vacuum environment, or both. The substrate surface is placed in a treatment environment and is first dehydrated and then the environment is evacuated. A silicon hydride gas is introduced into the treatment environment, which may be heated prior to the introduction of the gas. The substrate and silicon hydride gas contained therein are heated, if the treatment environment was not already heated prior to the introduction of the gas and pressurized to decompose the gas. A layer of silicon is deposited on the substrate surface. The duration of the silicon depositing step is controlled to prevent the formation of silicon dust in the treatment environment. The substrate is then cooled and held at a cooled temperature to optimize surface conditions for subsequent depositions, and the treatment environment is purged with an inert gas to remove the silicon hydride gas. The substrate is cycled through the silicon depositing step until the surface of the substrate is covered with a layer of silicon. The treatment environment is then evacuated and the substrate cooled to room temperature.
    • 钝化基板表面以保护表面免受腐蚀,表面对真空环境的影响或两者的方法。 将基材表面放置在处理环境中,并首先脱水,然后将环境抽真空。 将氢化硅气体引入处理环境中,其可以在引入气体之前被加热。 如果在引入气体之前处理环境未被加热并加压以分解气体,则其中包含的基板和氢化硅气体被加热。 在衬底表面上沉积一层硅。 控制硅沉积步骤的持续时间以防止在处理环境中形成硅粉尘。 然后将基底冷却并保持在冷却的温度下,以优化随后沉积的表面条件,并且用惰性气体吹扫处理环境以除去氢化硅气体。 衬底通过硅沉积步骤循环,直到衬底的表面被一层硅覆盖。 然后将处理环境抽真空并将基材冷却至室温。