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1. 发明专利

DE102004022569A1 Projection linear coding device has light source and transmission grid and photodetector integrated onto a silicon on quartz substrate 未知
公开(公告)号：DE102004022569A1
公开(公告)日：2004-11-25
申请号：DE102004022569
申请日：2004-05-07
申请人： HARMONIC DRIVE SYSTEMS , HANE KAZUHIRO
发明人： MITAMURA MUNEO , HANE KAZUHIRO , ITO YOSHINORI
IPC分类号： G01D5/347 , G01D5/34 , H01J3/14 , H01L31/167
摘要： A projection linear coder (1) comprises a light source (2), moving and fixed side grids and a photo-detecting raster (4) on a silicon-on-quartz substrate. A transmission grid (3) is formed by a laminate of opaque films forming a pattern on the substrate and is either on the fixed or moving side grid. An independent claim is also included for a device as above on a silicon-on-glass substrate.

2. 发明专利

DE10307258A1 未知
公开(公告)号：DE10307258A1
公开(公告)日：2003-08-21
申请号：DE10307258
申请日：2003-02-20
申请人： HARMONIC DRIVE SYSTEMS , HANE KAZUHIRO
发明人： ITO YOSHINORI , HANE KAZUHIRO
IPC分类号： G01D5/36 , G01D5/347 , G01B11/00 , H03M1/22
摘要： In a projection encoder based on a triple-grating concept, a light-transmitting grating group 3 for detecting A- and B-phase signals, a photodiode group 4 for detecting A- and B-phase signals, and a photodiode group 5 for detecting a home position are formed on a movable grating plate 6 of a projection linear encoder 1; and a reflecting grating group 7 for detecting A- and B-phase signals, and a reflecting grating group 8 for detecting the home position are formed on a reflecting grating plate 9.

3. 发明申请

WO2010064776A1 TRANSMISSION DIFFRACTION DEVICE FOR HIGH DIFFRACTION ORDER AND METHOD OF FABRICATING THE SAME 审中-公开
标题翻译：用于高折射率的传输差分装置及其制造方法
公开(公告)号：WO2010064776A1
公开(公告)日：2010-06-10
申请号：PCT/KR2009/004749
申请日：2009-08-26
申请人： GWANGJU INSTITUTE OF SCIENCE AND TECHNOLOGY , LEE, Sun-Kyu , WOO, Do-Kyun , JOO, Jae-Young , LEE, Cha-Bum , HANE, Kazuhiro
发明人： LEE, Sun-Kyu , WOO, Do-Kyun , JOO, Jae-Young , LEE, Cha-Bum , HANE, Kazuhiro
IPC分类号： G02B5/18
CPC分类号： G02B5/1857 , G02B5/1861 , G02B5/1866
摘要： A transmission diffraction device having a high diffraction order and a method of fabricating the same are provided. The diffraction device includes a light transmissible body, and at least one V-shaped groove formed in the light transmissible body. The V-shaped groove includes reflection and refraction planes. This diffraction device produces high-order diffracted light. As the diffraction order of the diffracted light becomes higher, the resolving power of the diffraction device can be improved.
摘要翻译：提供具有高衍射级的透射衍射装置及其制造方法。衍射装置包括透光体和形成在透光体中的至少一个V形槽。 V形槽包括反射和折射平面。该衍射装置产生高阶衍射光。随着衍射光的衍射级变高，可以提高衍射装置的分辨能力。

4. 发明专利

JP2003240606A PROJECTION ENCODER 审中-公开
公开(公告)号：JP2003240606A
公开(公告)日：2003-08-27
申请号：JP2002042478
申请日：2002-02-20
申请人： HARMONIC DRIVE SYSTEMS , HANE KAZUHIRO
发明人： ITO YOSHINORI , HANE KAZUHIRO
IPC分类号： G01D5/36 , G01D5/347
摘要： PROBLEM TO BE SOLVED: To provide a projection encoder by a three-lattice theory capable of detecting accurately the origin position. SOLUTION: On a translation lattice board 6 of this projection encoder 1, a light transmission lattice group 3 for phase A and phase B signal detection, a photodiode group 4 for phase A and phase B signal detection, and a photodiode group 5 for origin position detection are formed, and on a reflecting grating board 9, a reflecting grating group 7 for phase A and phase B signal detection, and a reflecting grating group 8 for origin position detection are formed. In the photodiode group 5 for origin position detection, a photodiode 5z for phase z and a photodiode 5z' for phase z' are arrayed according to an M-series array pattern, and in the reflecting grating group 8 for origin position detection, a reflecting grating 81 and a non-reflecting grating 82 are arrayed following the same M-series array pattern. The origin position of the translation lattice board 6 can be detected accurately based on a differential signal between the photodiode 5z for the phase z and the photodiode 5z' for the phase z'. COPYRIGHT: (C)2003,JPO

5. 发明专利

JP2002258170A WAVELENGTH VARIABLE OPTICAL FIBER FILTER 失效
公开(公告)号：JP2002258170A
公开(公告)日：2002-09-11
申请号：JP2001061283
申请日：2001-03-06
申请人： HANE KAZUHIRO , MIMAKI DENSHI BUHIN KK
发明人： HANE KAZUHIRO , KUMAZAKI HIRONORI , KASASHIMA TOSHIYUKI , HARA KEIICHI , ODA KOICHI , YAMAMORI ASUKA
IPC分类号： G02B6/00 , G02B5/18 , G02B26/00
摘要： PROBLEM TO BE SOLVED: To realize a more concrete constitution of a wavelength variable optical fiber filter which makes it possible to easily obtain a large displacement quantity in the optical axis direction of an optical fiber and is small in size and is simple. SOLUTION: The wavelength variable optical fiber filter which is constituted by fixing the core section of an optical fiber removed of its clad section and provided with a grating structure in this core section to a first optical fiber fixing sleeve and a second optical fiber fixing sleeve and varies the wavelengths by mechanically exerting tension to the first optical fiber fixing sleeve and the second optical fiber fixing sleeve by a cylindrical actuator, thereby changing the grating periods of the segment removed of the clad section of the optical fiber is realized.

6. 发明专利

JP2000088514A LASER INTERFEROMETER USING THIN FILM OPTICAL SENSOR WHICH CAN TRANSMIT LASER LIGHT, AND DISPLACEMENT, VELOCITY SENSOR USING THE SAME 失效
公开(公告)号：JP2000088514A
公开(公告)日：2000-03-31
申请号：JP27666998
申请日：1998-09-11
申请人： HANE KAZUHIRO
发明人： HANE KAZUHIRO , SASAKI MINORU
IPC分类号： G01P3/36 , G01B9/02 , G01S17/58
摘要： PROBLEM TO BE SOLVED: To realize a stable interferometer having a wide measuring range wherein influence due to instability of alignment of optical components is little, size is reduced at the same time, assembling in an actuator or a precise apparatus is enabled, inertia is small, high speed operation is possible, and coupling loss is small, by unifying optical components in a body, and simplifying the constitution of mechanical movement mechanism for adjusting optical path difference. SOLUTION: In this interferometer, a thin film optical sensor FS capable of transmitting a laser light is used, a standing wave due to a combined wave of a laser light of a laser light source and a reflected laser light from a mirror is formed in the space between the laser light source and the mirror, the thin film optical sensor FS is arranged intersecting the standing wave, and a spatial interference fringes of the standing wave is detected. By using the interferometer, a displacement, velocity sensor is realized. Thus a parallel light having a large beam diameter can be used, and a measuring range is enlarged, so that a laser interferometer suitable for integration of each element can be constituted.

7. 发明专利

JP2001091864A WAVELENGTH VARIABLE OPTICAL PARTS 失效
公开(公告)号：JP2001091864A
公开(公告)日：2001-04-06
申请号：JP27127499
申请日：1999-09-24
申请人： HANE KAZUHIRO , MIMAKI DENSHI BUHIN KK
发明人： HANE KAZUHIRO , TANAKA NORIYUKI , YAMAMORI ASUKA
IPC分类号： G02B26/00 , G02B6/12
摘要： PROBLEM TO BE SOLVED: To provide tunable wavelength variable optical parts which have a grating structure and for which the parts using glass fibers are developed and to solve the problems associated with such parts that the displacement to stress impression is extremely small and when the large displacement is attempted to be obtained, the increase in the size of the device and the breaking of the fibers are resulted. SOLUTION: Optical waveguides having gratings are bent in a direction perpendicular to the longitudinal direction of cores, by which the grating portions are elongated and contracted and the small-sized and simple wavelength variable optical parts capable of more easily changing Bragg wavelength rather than the prior parallel pulling in the longitudinal direction of the cores are obtained.

8. 发明专利

JP2000088515A DISPLACEMENT, VELOCITY SENSOR USING THIN FILM OPTICAL SENSOR WHICH CAN TRANSMIT LASER LIGHT 失效
公开(公告)号：JP2000088515A
公开(公告)日：2000-03-31
申请号：JP27667198
申请日：1998-09-11
申请人： HANE KAZUHIRO , MIMAKI DENSHI BUHIN KK
发明人： HANE KAZUHIRO , SASAKI MINORU , YOSHIKAWA NAOMIKI
IPC分类号： G01P3/36 , G01B9/02 , G01S17/58
摘要： PROBLEM TO BE SOLVED: To realize a stable displacement, velocity sensor having a wide measuring range which uses interference wherein influence due to instability of alignment of optical components is little, size is reduced at the same time, assembling in an actuator or a precise apparatus is enabled, inertia is small, high speed operation is possible, and coupling loss is small, by unifying optical components in a body, and simplifying the constitution of mechanical movement mechanism for adjusting optical path difference. SOLUTION: By using a thin film optical sensor FS capable of transmitting a laser light, a standing wave is generated on an optical axis. The standing wave optical signal is made possible to be measured by the thin film optical sensor FS. By using a parallel light having a large beam diameter, a measuring range is enlarged, and use is facilitated. An optical system is made suitable for a structure which is simplified and miniaturized. Therefore a displacement, velocity sensor using laser interference can be realized which has simple constitution without needing to arrange a signal line on a moving object whose displacement, velocity is to be measured.

9. 发明专利

JP2003236799A RESIST FILM FORMING METHOD BY SPRAY COATING, AND RESIST FILM FORMING DEVICE BY USING THE METHOD 审中-公开
公开(公告)号：JP2003236799A
公开(公告)日：2003-08-26
申请号：JP2002042703
申请日：2002-02-20
申请人： SASAKI MINORU , HANE KAZUHIRO
发明人： SASAKI MINORU , HANE KAZUHIRO
IPC分类号： G03F7/26 , B05B7/04 , B05C9/12 , B05D1/02 , B81C1/00 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To solve such problems with a resist film formed on a sample of three-dimensional structure by spray coating that since a large number of pores are formed in the resist film though a cut is not produced at a projected part, the quality thereof cannot be used in the post-process of a photo lithography, and that if the sample is increased in area or has deep irregularities and includes sharp narrow structures, it becomes difficult to coat a resist without producing the cut and pores. SOLUTION: A specified time after a film is formed on the sample of three- dimensional structure by spray coating, a measure is taken to promote the diffusive movement of resist agent on the sample. Thus the local uniformities of the pores included in the resist film of the sample and a film thickness can be corrected so that the film can be used for finishing the lithography. COPYRIGHT: (C)2003,JPO

10. 发明专利

JP2002258169A WAVELENGTH VARIABLE OPTICAL FIBER FILTER 失效
公开(公告)号：JP2002258169A
公开(公告)日：2002-09-11
申请号：JP2001061282
申请日：2001-03-06
申请人： HANE KAZUHIRO , MIMAKI DENSHI BUHIN KK
发明人： HANE KAZUHIRO , KUMAZAKI HIRONORI , KASASHIMA TOSHIYUKI , HARA KEIICHI , ODA KOICHI , YAMAMORI ASUKA
IPC分类号： G02B6/00 , G02B6/02 , G02B6/10 , G02B26/00
摘要： PROBLEM TO BE SOLVED: To realize a more concrete constitution of a wavelength variable optical fiber filter which makes it possible to easily obtain a large displacement quantity in the optical axis direction of an optical fiber and is small in size and is simple. SOLUTION: The wavelength variable optical fiber filter is provided with an optical fiber fixing substrate having a first optical fiber fixing section provided with a grating structure in the core section of the optical fiber from which the clad section is removed and a second optical fiber fixing section supported at the first optical fiber fixing section across a beam The core section of the optical fiber adjacent to the segment removed of the clad section of the optical fiber is fixed to the first optical fiber fixing section and second optical fiber fixing section of the optical fiber fixing substrate and tension is mechanically exerted to the second optical fiber fixing section, thereby, the wavelength variable optical fiber filter to vary the wavelengths by changing the grating periods is realized.

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