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1. 发明专利

DE102004022569A1 Projection linear coding device has light source and transmission grid and photodetector integrated onto a silicon on quartz substrate 未知
公开(公告)号：DE102004022569A1
公开(公告)日：2004-11-25
申请号：DE102004022569
申请日：2004-05-07
申请人： HARMONIC DRIVE SYSTEMS , HANE KAZUHIRO
发明人： MITAMURA MUNEO , HANE KAZUHIRO , ITO YOSHINORI
IPC分类号： G01D5/347 , G01D5/34 , H01J3/14 , H01L31/167
摘要： A projection linear coder (1) comprises a light source (2), moving and fixed side grids and a photo-detecting raster (4) on a silicon-on-quartz substrate. A transmission grid (3) is formed by a laminate of opaque films forming a pattern on the substrate and is either on the fixed or moving side grid. An independent claim is also included for a device as above on a silicon-on-glass substrate.

2. 发明专利

JP2003240606A PROJECTION ENCODER 审中-公开
公开(公告)号：JP2003240606A
公开(公告)日：2003-08-27
申请号：JP2002042478
申请日：2002-02-20
申请人： HARMONIC DRIVE SYSTEMS , HANE KAZUHIRO
发明人： ITO YOSHINORI , HANE KAZUHIRO
IPC分类号： G01D5/36 , G01D5/347
摘要： PROBLEM TO BE SOLVED: To provide a projection encoder by a three-lattice theory capable of detecting accurately the origin position. SOLUTION: On a translation lattice board 6 of this projection encoder 1, a light transmission lattice group 3 for phase A and phase B signal detection, a photodiode group 4 for phase A and phase B signal detection, and a photodiode group 5 for origin position detection are formed, and on a reflecting grating board 9, a reflecting grating group 7 for phase A and phase B signal detection, and a reflecting grating group 8 for origin position detection are formed. In the photodiode group 5 for origin position detection, a photodiode 5z for phase z and a photodiode 5z' for phase z' are arrayed according to an M-series array pattern, and in the reflecting grating group 8 for origin position detection, a reflecting grating 81 and a non-reflecting grating 82 are arrayed following the same M-series array pattern. The origin position of the translation lattice board 6 can be detected accurately based on a differential signal between the photodiode 5z for the phase z and the photodiode 5z' for the phase z'. COPYRIGHT: (C)2003,JPO

3. 发明专利

DE10307258A1 未知
公开(公告)号：DE10307258A1
公开(公告)日：2003-08-21
申请号：DE10307258
申请日：2003-02-20
申请人： HARMONIC DRIVE SYSTEMS , HANE KAZUHIRO
发明人： ITO YOSHINORI , HANE KAZUHIRO
IPC分类号： G01D5/36 , G01D5/347 , G01B11/00 , H03M1/22
摘要： In a projection encoder based on a triple-grating concept, a light-transmitting grating group 3 for detecting A- and B-phase signals, a photodiode group 4 for detecting A- and B-phase signals, and a photodiode group 5 for detecting a home position are formed on a movable grating plate 6 of a projection linear encoder 1; and a reflecting grating group 7 for detecting A- and B-phase signals, and a reflecting grating group 8 for detecting the home position are formed on a reflecting grating plate 9.

4. 发明专利

JP2000321097A OPTICAL ENCODER 失效
公开(公告)号：JP2000321097A
公开(公告)日：2000-11-24
申请号：JP13076199
申请日：1999-05-12
申请人： HARMONIC DRIVE SYSTEMS
发明人： ITO YOSHINORI , HANE KAZUHIRO
IPC分类号： G01D5/36
摘要： PROBLEM TO BE SOLVED: To provide an optical encoder which uses a reflecting lattice and a light transmission-type lattice, which is based on the theory of three lattices, which is small and compact and whose resolution is high. SOLUTION: In this optical linear encoder 1, light from an LED 2 passes a light transmission moving lattice 31 formed on a semiconductor moving plate 3 so as to be then reflected by a reflecting grating 41 on a reflecting grating plate 4. A reflected grating image is detected by a lattice-shaped photodiode 32 formed on the semiconductor moving plate 3. The moving lattice 31 and the photodiode 32 are formed on a common semiconductor substrate, and lens effect is obtained by the lattice-shaped photodiode 32. As a result, a lens optical system is not required, and the encoder which is small and compact can be realized. In addition, on the basis of the theory of three lattices, whether the interval between the reflecting grating and the moving grating is wide or narrow and a change in the interval do not have a bad influence on the detecting accuracy of the encoder. As a result, the components can be attached simply, and the restriction on the mounting position of the components is relaxed.

5. 发明专利

DE10159855A1 未知
公开(公告)号：DE10159855A1
公开(公告)日：2003-12-04
申请号：DE10159855
申请日：2001-12-06
申请人： HARMONIC DRIVE SYSTEMS
发明人： ITO YOSHINORI , HANE KAZUHIRO
IPC分类号： G01D5/347 , H03M1/22

6. 发明专利

JP2002236034A OPTICAL ENCODER 失效
公开(公告)号：JP2002236034A
公开(公告)日：2002-08-23
申请号：JP2001089232
申请日：2001-03-27
申请人： HARMONIC DRIVE SYSTEMS
发明人： ITO YOSHINORI , HANE KAZUHIRO
IPC分类号： G01D5/36
摘要： PROBLEM TO BE SOLVED: To realize a small and compact optical encoder having a high resolu tion. SOLUTION: In a light source-integrated type semiconductor moving plate unit 10 of the optical linear encoder, a light from surface light emitting diodes 14 and 15 passes through light transmission type mobile gratings 17 and 18, formed on a semiconductor moving plate 12 and is reflected on a reflection grating of a reflection grating plate. The resulting image of the reflection grating is detected by grating-like photodiodes 19 and 20 formed on the semiconductor moving plate 12. The mobile gratings 17 and 18 and the photodiodes 19 and 20 are incorporated into a common semiconductor board 12, and the surface light-emitting diodes 14 and 15 are arranged close by on the side of the rear of the semiconductor board 12. Thus a smaller and compact thin optical type encoder can be realized. Use of the surface light emitting diodes 14 and 15 can secure the quantity of light received by the photo detectors 19 and 20, unlike a spot light source, and eliminates the matching of optical axes, thereby high accuracy detection can be expected.

7. 发明专利

JP2002258170A WAVELENGTH VARIABLE OPTICAL FIBER FILTER 失效
公开(公告)号：JP2002258170A
公开(公告)日：2002-09-11
申请号：JP2001061283
申请日：2001-03-06
申请人： HANE KAZUHIRO , MIMAKI DENSHI BUHIN KK
发明人： HANE KAZUHIRO , KUMAZAKI HIRONORI , KASASHIMA TOSHIYUKI , HARA KEIICHI , ODA KOICHI , YAMAMORI ASUKA
IPC分类号： G02B6/00 , G02B5/18 , G02B26/00
摘要： PROBLEM TO BE SOLVED: To realize a more concrete constitution of a wavelength variable optical fiber filter which makes it possible to easily obtain a large displacement quantity in the optical axis direction of an optical fiber and is small in size and is simple. SOLUTION: The wavelength variable optical fiber filter which is constituted by fixing the core section of an optical fiber removed of its clad section and provided with a grating structure in this core section to a first optical fiber fixing sleeve and a second optical fiber fixing sleeve and varies the wavelengths by mechanically exerting tension to the first optical fiber fixing sleeve and the second optical fiber fixing sleeve by a cylindrical actuator, thereby changing the grating periods of the segment removed of the clad section of the optical fiber is realized.

8. 发明专利

JP2001091864A WAVELENGTH VARIABLE OPTICAL PARTS 失效
公开(公告)号：JP2001091864A
公开(公告)日：2001-04-06
申请号：JP27127499
申请日：1999-09-24
申请人： HANE KAZUHIRO , MIMAKI DENSHI BUHIN KK
发明人： HANE KAZUHIRO , TANAKA NORIYUKI , YAMAMORI ASUKA
IPC分类号： G02B26/00 , G02B6/12
摘要： PROBLEM TO BE SOLVED: To provide tunable wavelength variable optical parts which have a grating structure and for which the parts using glass fibers are developed and to solve the problems associated with such parts that the displacement to stress impression is extremely small and when the large displacement is attempted to be obtained, the increase in the size of the device and the breaking of the fibers are resulted. SOLUTION: Optical waveguides having gratings are bent in a direction perpendicular to the longitudinal direction of cores, by which the grating portions are elongated and contracted and the small-sized and simple wavelength variable optical parts capable of more easily changing Bragg wavelength rather than the prior parallel pulling in the longitudinal direction of the cores are obtained.

9. 发明专利

JP2000088515A DISPLACEMENT, VELOCITY SENSOR USING THIN FILM OPTICAL SENSOR WHICH CAN TRANSMIT LASER LIGHT 失效
公开(公告)号：JP2000088515A
公开(公告)日：2000-03-31
申请号：JP27667198
申请日：1998-09-11
申请人： HANE KAZUHIRO , MIMAKI DENSHI BUHIN KK
发明人： HANE KAZUHIRO , SASAKI MINORU , YOSHIKAWA NAOMIKI
IPC分类号： G01P3/36 , G01B9/02 , G01S17/58
摘要： PROBLEM TO BE SOLVED: To realize a stable displacement, velocity sensor having a wide measuring range which uses interference wherein influence due to instability of alignment of optical components is little, size is reduced at the same time, assembling in an actuator or a precise apparatus is enabled, inertia is small, high speed operation is possible, and coupling loss is small, by unifying optical components in a body, and simplifying the constitution of mechanical movement mechanism for adjusting optical path difference. SOLUTION: By using a thin film optical sensor FS capable of transmitting a laser light, a standing wave is generated on an optical axis. The standing wave optical signal is made possible to be measured by the thin film optical sensor FS. By using a parallel light having a large beam diameter, a measuring range is enlarged, and use is facilitated. An optical system is made suitable for a structure which is simplified and miniaturized. Therefore a displacement, velocity sensor using laser interference can be realized which has simple constitution without needing to arrange a signal line on a moving object whose displacement, velocity is to be measured.

10. 发明专利

JP2000088514A LASER INTERFEROMETER USING THIN FILM OPTICAL SENSOR WHICH CAN TRANSMIT LASER LIGHT, AND DISPLACEMENT, VELOCITY SENSOR USING THE SAME 失效
公开(公告)号：JP2000088514A
公开(公告)日：2000-03-31
申请号：JP27666998
申请日：1998-09-11
申请人： HANE KAZUHIRO
发明人： HANE KAZUHIRO , SASAKI MINORU
IPC分类号： G01P3/36 , G01B9/02 , G01S17/58
摘要： PROBLEM TO BE SOLVED: To realize a stable interferometer having a wide measuring range wherein influence due to instability of alignment of optical components is little, size is reduced at the same time, assembling in an actuator or a precise apparatus is enabled, inertia is small, high speed operation is possible, and coupling loss is small, by unifying optical components in a body, and simplifying the constitution of mechanical movement mechanism for adjusting optical path difference. SOLUTION: In this interferometer, a thin film optical sensor FS capable of transmitting a laser light is used, a standing wave due to a combined wave of a laser light of a laser light source and a reflected laser light from a mirror is formed in the space between the laser light source and the mirror, the thin film optical sensor FS is arranged intersecting the standing wave, and a spatial interference fringes of the standing wave is detected. By using the interferometer, a displacement, velocity sensor is realized. Thus a parallel light having a large beam diameter can be used, and a measuring range is enlarged, so that a laser interferometer suitable for integration of each element can be constituted.

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