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1. 发明授权

US08613287B2 Apparatus for preventing stiction of MEMS microstructure 有权
标题翻译：用于防止MEMS微结构静止的装置
公开(公告)号：US08613287B2
公开(公告)日：2013-12-24
申请号：US12672993
申请日：2008-04-14
申请人： Chang Han Je , Myung Lae Lee , Sung Hae Jung , Gunn Hwang , Chang Auck Choi
发明人： Chang Han Je , Myung Lae Lee , Sung Hae Jung , Gunn Hwang , Chang Auck Choi
IPC分类号： B08B3/00
CPC分类号： B81B3/001 , B81C2201/115
摘要： An apparatus for preventing stiction of a three-dimensional MEMS (microelectromechanical system) microstructure, the apparatus including: a substrate; and a plurality of micro projections formed on a top surface of the substrate with a predetermined height in such a way that a cleaning solution flowing out from the microstructure disposed thereabove is discharged.
摘要翻译：一种用于防止三维MEMS（微机电系统）微结构静止的装置，该装置包括：基板; 以及多个微型突起以预定的高度形成在基板的顶表面上，使得从布置在其上方的微结构流出的清洗溶液被排出。

2. 发明授权

US08490683B2 Flat plate type micro heat transport device 有权
标题翻译：平板式微型传热装置
公开(公告)号：US08490683B2
公开(公告)日：2013-07-23
申请号：US12744669
申请日：2008-04-21
申请人： Seok Hwan Moon , Gunn Hwang
发明人： Seok Hwan Moon , Gunn Hwang
IPC分类号： F28D15/00 , F28F7/00 , H05K7/20
CPC分类号： F28D15/0233 , F28D15/046 , H01L23/427 , H01L2924/0002 , H01L2924/00
摘要： There is provided a flat plate type micro heat transport device formed of two plates coupled with each other to be opposite to each other, each of the plates includes: a reservoir formed to store a moving fluid charged via an inlet; a evaporator formed separated from the reservoir to generate vapor having latent heat by vaporizing the moving fluid; a vapor flow path formed to be connected to the evaporator, through which the vapor having latent heat is transported; a condenser formed to be connected to the vapor flow path and to condense the vapor having latent heat; and a liquid flow path formed to be connected to the condenser and the evaporator and separately from the vapor flow path to transport a liquid obtained by condensing the vapor. The device may efficiently control heat with respect to portable electronic devices by effectively transporting heat generated by a heat source.
摘要翻译：提供了一种平板型微型热输送装置，它由彼此相互耦合的彼此相对的两个板形成，每个板包括：储存器，其形成为储存通过入口装入的移动流体; 蒸发器，其与所述储存器分离以通过汽化所述移动流体产生具有潜热的蒸汽; 形成为连接到蒸发器的蒸汽流动路径，通过该蒸汽流动具有潜热的蒸气被输送; 冷凝器，形成为连接到蒸汽流动路径并冷凝具有潜热的蒸汽; 以及液体流路，其形成为连接到冷凝器和蒸发器并且与蒸汽流动路径分离以输送通过冷凝蒸气获得的液体。该设备可以通过有效地传输由热源产生的热量来有效地控制相对于便携式电子设备的热量。

3. 发明申请

US20110079372A1 HEAT TRANSFER DEVICE WITH FUNCTIONS OF POWER GENERATION 审中-公开
标题翻译：具有发电功能的传热装置
公开(公告)号：US20110079372A1
公开(公告)日：2011-04-07
申请号：US12990146
申请日：2008-12-11
申请人： Seok Hwan Moon , Gunn Hwang
发明人： Seok Hwan Moon , Gunn Hwang
IPC分类号： F28D15/04
CPC分类号： F28D15/046 , F28D15/0233 , F28F2245/00 , H02N2/18
摘要： Provided is a heat transfer device which has a function of generating power through vibration of capillary grooves having a thin piezoelectric film deposited thereon, in addition to a heat transfer function of discharging heat transferred from a heating element to the outside.
摘要翻译：本发明提供一种传热装置，除了具有将从加热元件传递到外部的热量的传热功能之外，还具有通过其上沉积有薄压电薄膜的毛细管槽的振动产生动力的功能。

4. 发明申请

US20100243214A1 FLAT PLATE TYPE MICRO HEAT TRANSPORT DEVICE 有权
标题翻译：平板式微型热交换装置
公开(公告)号：US20100243214A1
公开(公告)日：2010-09-30
申请号：US12744669
申请日：2008-04-21
申请人： Seok Hwan Moon , Gunn Hwang
发明人： Seok Hwan Moon , Gunn Hwang
IPC分类号： F28D15/04
CPC分类号： F28D15/0233 , F28D15/046 , H01L23/427 , H01L2924/0002 , H01L2924/00
摘要： There is provided a flat plate type micro heat transport device formed of two plates coupled with each other to be opposite to each other, each of which includes: a reservoir formed to store a moving fluid charged via an inlet; a evaporator formed separated from the reservoir to generate vapor having latent heat by vaporizing the moving fluid; a vapor flow path formed to be connected to the evaporator, through which the vapor having latent heat is transported; a condenser formed to be connected to the vapor flow path and to condense the vapor having latent heat; and a liquid flow path formed to be connected to the condenser and the evaporator and separately from the vapor flow path to transport a liquid obtained by condensing the vapor. The device may efficiently control heat with respect to portable electronic devices by effectively transportring heat generated by a heat source.
摘要翻译：提供了一种平板式微型热输送装置，它由彼此相互耦合的彼此相对的两个板形成，每个板彼此相对，包括：储存器，其形成为储存通过入口充电的移动流体; 蒸发器，其与所述储存器分离以通过汽化所述移动流体产生具有潜热的蒸汽; 形成为连接到蒸发器的蒸汽流动路径，通过该蒸汽流动具有潜热的蒸气被输送; 冷凝器，形成为连接到蒸汽流动路径并冷凝具有潜热的蒸汽; 以及液体流路，其形成为连接到冷凝器和蒸发器并且与蒸汽流动路径分离以输送通过冷凝蒸气获得的液体。该装置可以通过有效地传输由热源产生的热来有效地控制相对于便携式电子设备的热量。

5. 发明申请

US20100012300A1 HEAT UNIFORMING DEVICE FOR ELECTRONIC APPARATUS 审中-公开
标题翻译：电子装置加热均匀装置
公开(公告)号：US20100012300A1
公开(公告)日：2010-01-21
申请号：US12442110
申请日：2007-07-20
申请人： Seok-Hwan Moon , Gunn Hwang
发明人： Seok-Hwan Moon , Gunn Hwang
IPC分类号： F28D15/04 , H05K7/20
CPC分类号： H01L23/427 , F28D15/0233 , F28D15/0266 , F28D15/046 , H01L2924/0002 , H01L2924/00
摘要： Provided is a heat uniforming device for an electronic apparatus, which improves the flow and circulation of operating fluid through evaporation and condensation using capillary attraction. The heat uniforming device for the electronic apparatus includes: an evaporation unit comprised of a planar first plate including a first multi-channel capillary region for evaporating an externally injected operating fluid due to heat transmitted from a heating source; and a condensation unit comprised of a planar second plate including a second multi-channel capillary region for condensing vapor supplied from the evaporation unit and a return region having a fluid path that communicates with all channels of the second multi-channel capillary region.
摘要翻译：提供一种用于电子设备的热均匀装置，其通过使用毛细吸引的蒸发和冷凝来改善工作流体的流动和循环。电子设备的热均匀装置包括：蒸发单元，包括平面第一板，其包括第一多通道毛细管区域，用于从由加热源传递的热量蒸发外部喷射的工作流体; 以及冷凝单元，其包括平面第二板，所述平面第二板包括用于冷凝从所述蒸发单元供应的蒸气的第二多通道毛细管区域和具有与所述第二多通道毛细管区域的所有通道连通的流体路径的返回区域。

6. 发明申请

US20100009514A1 METHOD OF FABRICATING MICRO-VERTICAL STRUCTURE 失效
标题翻译：微观结构的制作方法
公开(公告)号：US20100009514A1
公开(公告)日：2010-01-14
申请号：US12417114
申请日：2009-04-02
申请人： Myung Lae LEE , Jong Hyun Lee , Sung Sik Yun , Dae Hun Jeong , Gunn Hwang , Chang Auck Choi , Chang Han Je , Jae Yong An
发明人： Myung Lae LEE , Jong Hyun Lee , Sung Sik Yun , Dae Hun Jeong , Gunn Hwang , Chang Auck Choi , Chang Han Je , Jae Yong An
IPC分类号： H01L21/306
CPC分类号： B81C1/00619 , B81C1/00626 , B81C2201/0132 , B81C2201/0133
摘要： A method of fabricating a micro-vertical structure is provided. The method includes bonding a second crystalline silicon (Si) substrate onto a first crystalline Si substrate by interposing an insulating layer pattern and a cavity, etching the second crystalline Si substrate using a deep reactive ion etch (DRIE) process along a [111] crystal plane vertical to the second crystalline Si substrate, and etching an etched vertical surface of the second crystalline Si substrate using a crystalline wet etching process to improve the surface roughness and flatness of the etched vertical surface. As a result, no morphological defects occur on the etched vertical surface. Also, footings do not occur at an etch end-point due to the insulating layer pattern. In addition, the micro-vertical structure does not float in the air but is fixed to the first crystalline Si substrate, thereby facilitating subsequent processes.
摘要翻译：提供一种制造微垂直结构的方法。该方法包括通过插入绝缘层图案和空腔将第二晶体硅（Si）衬底接合到第一晶体Si衬底上，使用沿[111]晶体的深反应离子蚀刻（DRIE）工艺蚀刻第二晶体Si衬底垂直于第二晶体Si衬底，并且使用结晶湿蚀刻工艺蚀刻第二晶体Si衬底的蚀刻垂直表面，以改善蚀刻垂直表面的表面粗糙度和平坦度。结果，蚀刻的垂直表面上没有形成形态缺陷。此外，由于绝缘层图案，在蚀刻终点处不发生基脚。此外，微垂直结构不会浮在空气中，而是固定在第一晶体Si衬底上，从而有助于后续工艺。

7. 发明申请

US20090056448A1 BIDIRECTIONAL READOUT CIRCUIT FOR DETECTING DIRECTION AND AMPLITUDE OF CAPACITIVE MEMS ACCELEROMETERS 有权
标题翻译：用于检测电容式MEMS加速度计的方向和幅度的双向读出电路
公开(公告)号：US20090056448A1
公开(公告)日：2009-03-05
申请号：US12168025
申请日：2008-07-03
申请人： Sung Sik LEE , Ji Man Park , Myung Lae Lee , Sung Hae Jung , Chang Han Je , Gunn Hwang , Chang Auck Choi
发明人： Sung Sik LEE , Ji Man Park , Myung Lae Lee , Sung Hae Jung , Chang Han Je , Gunn Hwang , Chang Auck Choi
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P13/04
摘要： There is provided a bidirectional readout circuit for detecting direction and amplitude of an oscillation sensed at a capacitive microelectromechanical system (MEMS) accelerometer, the bidirectional readout circuit converting capacitance changes of the capacitive MEMS accelerometer into a time change amount by using high resolution capacitance-to-time conversion technology and outputting the time change amount as the direction and the amplitude of the oscillation by using time-to-digital conversion (TDC) technology, thereby detecting not only the amplitude of the oscillation but also the direction thereof, which is capable of being applied to various MEMS sensors.
摘要翻译：提供了一种用于检测在电容式微机电系统（MEMS）加速度计处感测的振荡的方向和振幅的双向读出电路，双向读出电路通过使用高分辨率电容 - 电容将电容式MEMS加速度计的电容变化转换为时变量时间转换技术，并且通过使用时间 - 数字转换（TDC）技术输出时间变化量作为振荡的方向和振幅，从而不仅检测振荡的振幅，而且检测其方向，这是能够被应用于各种MEMS传感器。

8. 发明申请

US20080185128A1 Flat Plate-Type Heat Pipe 审中-公开
标题翻译：平板式热管
公开(公告)号：US20080185128A1
公开(公告)日：2008-08-07
申请号：US11815364
申请日：2006-01-10
申请人： Seok Hwan Moon , Gunn Hwang , Sang Choon Ko , Sung Weon Kang , Chang Auck Choi
发明人： Seok Hwan Moon , Gunn Hwang , Sang Choon Ko , Sung Weon Kang , Chang Auck Choi
IPC分类号： F28D15/02
CPC分类号： F28D15/046 , F28D15/0233 , F28F1/022
摘要： Provided is a flat plate-type heat pipe formed of a flat pipe having a predetermined through-hole formed therein and a plurality of grooves extending from an inner surface of the through-hole in a longitudinal direction so that, while the interior of the heat pipe is in a vacuum state, heat in the heat pipe is discharged to the exterior due to a phase change of between liquid and gaseous states of working fluid and the working fluid flows by a capillary force produced from the plurality of grooves, whereby it is possible to obtain a strong capillary force and an excellent cooling effect while it is manufactured through a simple process.
摘要翻译：本发明提供一种平面型热管，其由具有形成在其中的预定通孔的扁平管形成，以及沿着纵向方向从通孔的内表面延伸的多个槽，使得在热的内部管处于真空状态，由于工作流体的液态和气态之间的相变，热管中的热量被排出到外部，并且工作流体由多个槽产生的毛细管力流动，由此可以通过简单的工艺制造而获得强的毛细管力和优异的冷却效果。

9. 发明申请

US20070256814A1 Loop Type Micro Heat Transport Device 有权
标题翻译：环型微型传热装置
公开(公告)号：US20070256814A1
公开(公告)日：2007-11-08
申请号：US11577233
申请日：2005-12-09
申请人： Seok Hwan Moon , Gunn Hwang , Sung Weon Kang , Chang Auck Choi
发明人： Seok Hwan Moon , Gunn Hwang , Sung Weon Kang , Chang Auck Choi
IPC分类号： G06F1/20
CPC分类号： H05K7/20336 , H01L23/427 , H01L2924/0002 , H01L2924/00
摘要： Provided is a loop type micro heat transport device including: a lower plate having a reservoir for storing operating fluid at its upper surface, an evaporating part spaced apart from the reservoir to evaporate the operating fluid, and a condensing part for condensing vapor evaporated from the evaporating part; and an upper plate engaged with an upper surface of the lower plate and formed at a position corresponding to the evaporating part and the condensing part, and including a vapor space having a vapor line through which the vapor evaporated from the evaporating part is transported to the condensing part, wherein the operating fluid is circulated through the reservoir, the evaporating part, and the condensing part. Therefore, it is possible to remarkably improve productivity since its simple structure helps to make the manufacture simple, as well as to improve cooling performance and enabling long distance heat transport.
摘要翻译：本发明提供一种环型微热输送装置，其特征在于，具有：下板，其具有用于在其上表面存储工作流体的储存器，与所述储存器间隔开的蒸发部，蒸发所述工作流体;以及冷凝部，蒸发部分以及与所述下板的上表面接合并形成在与所述蒸发部和所述冷凝部对应的位置的上板，并且包括具有蒸气管的蒸气空间，蒸发部蒸发的蒸汽通过所述蒸气管路被输送到所述蒸发部冷凝部件，其中工作流体循环通过储存器，蒸发部件和冷凝部件。因此，由于其简单的结构有助于使制造简单，并且提高冷却性能并且能够进行长距离的热输送，因此可以显着提高生产率。

10. 发明申请

US20070130769A1 Micro heat pipe with pligonal cross-section manufactured via extrusion or drawing 审中-公开
标题翻译：通过挤出或拉伸制造的具有普通截面的微型热管
公开(公告)号：US20070130769A1
公开(公告)日：2007-06-14
申请号：US11701610
申请日：2007-02-01
申请人： Seok Moon , Ho Yun , Sang Ko , Gunn Hwang , Tae Choy , Chi Jun , Youn Kim
发明人： Seok Moon , Ho Yun , Sang Ko , Gunn Hwang , Tae Choy , Chi Jun , Youn Kim
IPC分类号： B23P6/00
CPC分类号： B23P15/26 , B21C23/085 , B21C37/151 , B21C37/155 , B23P2700/09 , F28D15/0233 , F28D2015/0225 , F28F1/022 , H01L23/427 , H01L2924/0002 , Y10T29/49353 , H01L2924/00
摘要： A method for fabricating a metal micro heat pipe with a polygonal cross-section to allow working fluid to flow by capillary force generated at edges of the polygonal of the micro heat pipe. The polygonal cross-section is formed of a single metal layer via a single drawing process. The micro heat pipe is formed of a single metal plate.
摘要翻译：一种用于制造具有多边形横截面的金属微热管的方法，以允许工作流体通过在微热管的多边形的边缘处产生的毛细管力流动。多边形横截面通过单个拉丝工艺由单个金属层形成。微热管由单个金属板形成。

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