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    • 8. 发明授权
    • Fully embedded micromechanical device, system on chip and method for manufacturing the same
    • 全嵌入式微机械装置,片上系统及其制造方法
    • US08648432B2
    • 2014-02-11
    • US13305536
    • 2011-11-28
    • Alfred Haeusler
    • Alfred Haeusler
    • H01L29/84H01L21/302
    • B81C1/00246B81C2203/0735
    • A fully embedded micromechanical device and a system on chip is manufactured on an SOI-substrate. The micromechanical device comprises a moveable component having a laterally extending upper and lower surface and vertical side surfaces. The upper surface is adjacent to an upper gap which laterally extends over at least a part of the upper surface and results from the removal of a shallow trench insulation material. The lower surface is adjacent to a lower gap which laterally extends over at least a part of the lower surface and results from the removal of the buried silicon oxide layer. The side surfaces of the movable component are adjacent to side gaps which surround at least a part of the vertical side surfaces of the moveable component and result from the removal of a deep trench insulation material.
    • 在SOI衬底上制造完全嵌入的微机械器件和片上系统。 微机械装置包括具有横向延伸的上表面和下表面以及垂直侧表面的可移动部件。 上表面与在上表面的至少一部分上横向延伸的上间隙相邻,并且由去除浅沟槽绝缘材料导致。 下表面与下部间隙相邻,该下部间隙在下表面的至少一部分上横向延伸,并且由去除掩埋的氧化硅层导致。 可移动部件的侧表面邻近包围可移动部件的垂直侧表面的至少一部分的侧间隙,并且是由去除深沟槽绝缘材料导致的。