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1. 发明授权

US08536626B2 Electronic pH sensor die packaging 有权
标题翻译：电子pH传感器模具包装
公开(公告)号：US08536626B2
公开(公告)日：2013-09-17
申请号：US13096710
申请日：2011-04-28
申请人： Gregory C. Brown , Curtis H. Rahn
发明人： Gregory C. Brown , Curtis H. Rahn
IPC分类号： G01N27/414
CPC分类号： G01N27/414 , H01L24/24 , H01L2924/1306 , H01L2924/13091 , H01L2924/1461 , H01L2924/15787 , H01L2924/00
摘要： A pH sensor is provided. The pH sensor comprises a substrate and an ion sensitive field effect transistor (ISFET) die comprising an ion sensing part that responds to pH, wherein the ISFET die is located over the substrate. The pH sensor also comprises a protective layer formed over at least a portion of an outer surface of the ISFET die and at least a portion of the substrate. Further, the pH sensor comprises a cover member mechanically coupled to the protective layer, wherein the cover member houses the ISFET die and the substrate, and wherein the cover member defines an opening proximate to the ion sensing part.
摘要翻译：提供pH传感器。 pH传感器包括衬底和离子敏感场效应晶体管（ISFET）管芯，其包含响应于pH的离子感测部件，其中ISFET管芯位于衬底上方。 pH传感器还包括在ISFET管芯的至少一部分外表面上形成的保护层和至少一部分基底。此外，pH传感器包括机械耦合到保护层的盖构件，其中盖构件容纳ISFET管芯和衬底，并且其中盖构件限定靠近离子感测部件的开口。

2. 发明申请

US20130228022A1 APPARATUS AND PROCESSES FOR SILICON ON INSULATOR MEMS PRESSURE SENSORS 有权
标题翻译：绝缘子MEMS压力传感器硅的设备和工艺
公开(公告)号：US20130228022A1
公开(公告)日：2013-09-05
申请号：US13412264
申请日：2012-03-05
申请人： Gregory C. Brown , Curtis Rahn
发明人： Gregory C. Brown , Curtis Rahn
IPC分类号： G01L1/00 , H01L21/02
CPC分类号： G01L9/0054 , B81B3/0081 , B81B2201/0264 , B81B2203/0127 , G01L9/0042
摘要： System and methods for silicon on insulator MEMS pressure sensors are provided. In one embodiment, a method comprises: applying a doping source to a silicon-on-insulator (SOI) silicon wafer having a sensor layer and an insulating layer comprising SiO2 material; doping the silicon wafer with Boron atoms from the doping source while controlling an injection energy of the doping to achieve a top-heavy ion penetration profile; and applying a heat source to diffuse the Boron atoms throughout the sensor layer of the SOI silicon wafer.
摘要翻译：提供了硅绝缘体MEMS压力传感器的系统和方法。在一个实施例中，一种方法包括：将掺杂源施加到具有传感器层和包含SiO 2材料的绝缘层的绝缘体上硅（SOI）硅晶片; 用来自掺杂源的硼原子掺杂硅晶片，同时控制掺杂的注入能量以获得顶部重离子渗透分布; 以及施加热源以将硼原子扩散到SOI硅晶片的整个传感器层。

3. 发明申请

US20110283802A1 MODULAR PRESSURE SENSOR 有权
标题翻译：模块式压力传感器
公开(公告)号：US20110283802A1
公开(公告)日：2011-11-24
申请号：US12782325
申请日：2010-05-18
申请人： Gregory C. Brown , Thomas A. Larson , Curtis Rahn
发明人： Gregory C. Brown , Thomas A. Larson , Curtis Rahn
IPC分类号： G01L7/00
CPC分类号： G01L19/003
摘要： A pressure sensor device for a modular pressure sensor package is provided, comprising a substrate having a pressure port that extends through the substrate from a first side of the substrate to a second side of the substrate. A pressure sensor die is attached to the first side of the substrate, forming a seal over the pressure port on the first side of the substrate. A cover is attached to the first side of the substrate over the pressure sensor die, forming a sealed cavity wherein the pressure sensor die is located within the cavity. The device also comprises a plurality of electrical connectors mounted to the substrate external to the cavity, the plurality of electrical connectors electrically coupled to the pressure sensor die. Further, the substrate includes at least one mounting element configured to secure a pressure port interface to the second side of the substrate in a position around the pressure port.
摘要翻译：提供了一种用于模块化压力传感器封装的压力传感器装置，包括：衬底，其具有从衬底的第一侧到衬底的第二侧延伸穿过衬底的压力端口。压力传感器模具附接到基板的第一侧，在基板的第一侧上的压力端口上形成密封。盖子通过压力传感器模具附接到基板的第一侧，形成密封腔体，其中压力传感器模具位于腔体内。该装置还包括多个电连接器，其安装到空腔外部的基板，多个电连接器电耦合到压力传感器芯片。此外，衬底包括至少一个安装元件，其被配置为在围绕压力端口的位置处将压力端口接口固定到衬底的第二侧。

4. 发明申请

US20090293628A1 PRESSURE-SENSOR APPARATUS 有权
标题翻译：压力传感器装置
公开(公告)号：US20090293628A1
公开(公告)日：2009-12-03
申请号：US12127641
申请日：2008-05-27
申请人： Gregory C. Brown , Curtis Rahn
发明人： Gregory C. Brown , Curtis Rahn
IPC分类号： G01L9/00
CPC分类号： G01L9/0055 , G01L19/0069 , G01L19/0092
摘要： A sensing apparatus for determining the pressure of a fluid includes first and second support members. The first and second support members are configured to define at least one sealed chamber. A flexible diaphragm is disposed between the first and second support members. The diaphragm includes first and second opposing surfaces. The first opposing surface is in fluid communication with a first fluid-flow circuit, and the second opposing surface is in fluid communication with a second fluid-flow circuit. A first electronic circuit is disposed within the at least one chamber and coupled to the diaphragm for sensing a first differential pressure associated with the first and second flow circuits. The first electronic circuit is configured to produce at least one electrical signal proportional to a magnitude of the first differential pressure.
摘要翻译：用于确定流体压力的感测装置包括第一和第二支撑构件。第一和第二支撑构件被构造成限定至少一个密封室。柔性膜片设置在第一和第二支撑构件之间。隔膜包括第一和第二相对表面。第一相对表面与第一流体流动回路流体连通，并且第二相对表面与第二流体流动回路流体连通。第一电子电路设置在所述至少一个室内并且耦合到所述隔膜以感测与所述第一和第二流动回路相关联的第一差压。第一电子电路被配置为产生与第一压差的大小成比例的至少一个电信号。

5. 发明授权

US5870695A Differential pressure measurement arrangement utilizing remote sensor units 失效
标题翻译：使用远程传感器单元的差压测量装置
公开(公告)号：US5870695A
公开(公告)日：1999-02-09
申请号：US804613
申请日：1997-02-24
申请人： Gregory C. Brown , David A. Broden
发明人： Gregory C. Brown , David A. Broden
IPC分类号： G01F1/36 , G01F1/88 , G01F15/06 , G01F23/14 , G01F23/18 , G01L7/08 , G01L9/04 , G01L19/00 , G01L19/08 , G01L7/00
CPC分类号： G01F23/18 , G01F1/363 , G01F1/50 , G01F1/88 , G01F15/063 , G01L19/0007 , G01L19/0015 , G01L19/083 , G01L9/045
摘要： A master transmitter couples to first and second slave units through a bus. The slave units provide outputs to the bus related to first and second pressures of a process. The bus provides power to the units and carries signals. The master transmitter is adapted to couple to a two-wire process control loop which wholly powers the system.
摘要翻译：主发送器通过总线耦合到第一和第二从属单元。从属单元向总线提供与过程的第一和第二压力相关的输出。总线为单元供电并携带信号。主发送器适于耦合到完全为系统供电的两线制过程控制回路。

6. 发明授权

US4534376A Electric signal to pressure signal transducer 失效
标题翻译：电信号到压力信号传感器
公开(公告)号：US4534376A
公开(公告)日：1985-08-13
申请号：US528727
申请日：1983-09-01
申请人： Gregory C. Brown
发明人： Gregory C. Brown
IPC分类号： G01D5/42 , F15B5/00 , F15C3/14 , G05D16/00
CPC分类号： F15C3/14 , F15B5/003 , Y10T137/2322 , Y10T137/2365 , Y10T137/7761
摘要： An electric signal to pneumatic signal transducer 10 comprises a nozzle 12 that accepts an input pneumatic supply and expels a gas stream 20. A receiver 16 that is spaced from the nozzle is positioned to recover at least a portion of the gas stream. The recovered portion constitutes a pneumatic output signal. The position of a deflector 14 relative to the gas stream is controlled by an electric input signal to aerodynamically deflect the gas stream expelled from the nozzle. The aerodynamic deflection affects the magnitude of the portion of the gas stream recovered by the receiver in a manner having a known relationship to the electric input signal, thereby generating a pneumatic output signal responsive to the electric input signal.
摘要翻译：与气动信号传感器10的电信号包括接收输入气动供给并排出气流20的喷嘴12.与喷嘴间隔开的接收器16定位成回收至少一部分气流。回收部分构成气动输出信号。偏转器14相对于气流的位置由电输入信号控制，以空气动力地偏转从喷嘴排出的气流。空气动力学偏转以与电输入信号有已知关系的方式影响由接收器回收的气流的部分的大小，由此产生响应于电输入信号的气动输出信号。

7. 发明授权

US07514285B2 Isolation scheme for reducing film stress in a MEMS device 有权
标题翻译：用于降低MEMS器件中的膜应力的隔离方案
公开(公告)号：US07514285B2
公开(公告)日：2009-04-07
申请号：US11333015
申请日：2006-01-17
申请人： Gregory C. Brown , Curtis H. Rahn
发明人： Gregory C. Brown , Curtis H. Rahn
IPC分类号： H01L21/762
CPC分类号： B81C1/00666 , B81B2201/0264 , G01L9/0042 , G01L9/0054 , G01L19/06
摘要： A method of electrically isolating a MEMS device is provided. In one example, a piezo-resistive pressure sensor having an exposed silicon region undergoes a Local Oxidation of Silicon (LOCOS) process. An electrically insulating structure is created in the LOCOS process. The insulating structure has a rounded, or curved, interface with the piezo-resistive pressure sensor. The curved interface mitigates stresses associated with exposure to high temperatures and pressures. Additionally, the electrically insulating line may be patterned so that it has curved angles, further mitigating stress.
摘要翻译：提供了一种电隔离MEMS器件的方法。在一个示例中，具有暴露的硅区域的压阻式压力传感器经历硅的局部氧化（LOCOS）工艺。在LOCOS工艺中产生电绝缘结构。绝缘结构与压阻式压力传感器具有圆形或弯曲的界面。弯曲的界面减轻了暴露于高温和高压下的应力。此外，电绝缘线可以被图案化，使得其具有弯曲角度，进一步减轻应力。

8. 发明申请

US20080143552A1 SENSOR ARRAY FOR DOWN-HOLE MEASUREMENT 审中-公开
标题翻译：传感器阵列用于下颌测量
公开(公告)号：US20080143552A1
公开(公告)日：2008-06-19
申请号：US11610471
申请日：2006-12-13
申请人： Edgar R. Mallison , Gregory C. Brown
发明人： Edgar R. Mallison , Gregory C. Brown
IPC分类号： G01V3/00 , G08B1/00 , G01V3/38
CPC分类号： E21B47/06
摘要： A sensor array includes an array of nodes coupled to an optical transmission line. The nodes include a transducer, and encoder, and a transmitter. The transducer senses an environmental condition such as temperature and pressure. The encoder encodes readings from the transducer by means of a characteristic frequency to indicate which node generated the reading. The transmitter transmits the encoded reading to a decoder located near the opening of the oil well, or other blind hole. Power is transmitted to the nodes through the transmission line. A photo-electric converter at the node converts the optical power to electrical energy that is stored to power the node.
摘要翻译：传感器阵列包括耦合到光传输线的节点阵列。节点包括换能器，编码器和发射器。换能器检测环境条件如温度和压力。编码器通过特征频率对来自传感器的读数进行编码，以指示哪个节点产生读数。发射机将编码的读数发送到位于油井开口附近的解码器或其他盲孔。电力通过传输线传输到节点。节点处的光电转换器将光功率转换为存储以为节点供电的电能。

9. 发明授权

US06975043B2 Pressurized gas to electrical energy conversion for low-power field devices 有权
标题翻译：用于低功率现场设备的加压气体进行电能转换
公开(公告)号：US06975043B2
公开(公告)日：2005-12-13
申请号：US10745310
申请日：2003-12-22
申请人： Mark S. Schumacher , Gregory C. Brown
发明人： Mark S. Schumacher , Gregory C. Brown
IPC分类号： H01L41/113 , H02K7/18 , H02P9/00
CPC分类号： H02N2/185 , H02K7/1892 , H05K7/1462
摘要： An industrial process field device with improved power generation is provided. The process device can be a process variable transmitter, process actuator, or any other suitable field device. The field device includes a wireless transceiver that transceives information related to the process via a wireless medium. A power supply within the field device is couplable to a source of pressurized gas and generates motion within the power supply that is translated into electrical energy. This electrical energy is then used to operate the field device.
摘要翻译：提供了一种具有改进的发电的工业过程现场设备。过程装置可以是过程变量发送器，过程执行器或任何其它合适的现场设备。现场设备包括无线收发器，其经由无线介质收发与该过程相关的信息。现场设备内的电源可连接到加压气体源，并在电源内产生转换为电能的运动。然后使用该电能来操作现场设备。

10. 发明授权

US6003219A Method of making a pressure transmitter having pressure sensor having cohered surfaces 失效
标题翻译：一种具有压力传感器的压力变送器的方法，所述压力传感器具有粘附表面
公开(公告)号：US6003219A
公开(公告)日：1999-12-21
申请号：US66790
申请日：1998-04-24
申请人： Roger L. Frick , Gregory C. Brown
发明人： Roger L. Frick , Gregory C. Brown
IPC分类号： G01L13/02 , G01L19/00 , H01G5/013
CPC分类号： G01L19/0007 , G01L13/025 , Y10T29/43
摘要： A pressure transmitter having a pressure sensor includes a first half cell and a second half cell. The first half cell includes a first recess formed therein filled with brittle material and having a first sensor surface formed thereon. The second half cell is coupled to the first half cell and includes a second recess formed therein which opposes the first recess and is filled with brittle material having a second sensor surface formed thereon. A diaphragm is positioned between the first and second sensor surfaces. The diaphragm deflects in response to applied pressure. The first and second sensor surfaces comprise heated surfaces.
摘要翻译：具有压力传感器的压力变送器包括第一半单元和第二半单元。第一半单元包括在其中形成的填充有脆性材料并且具有形成在其上的第一传感器表面的第一凹部。第二半单元耦合到第一半单元并且包括形成在其中的与第一凹部相对的第二凹部，并且填充有形成在其上的第二传感器表面的脆性材料。隔膜位于第一和第二传感器表面之间。隔膜响应于施加的压力而偏转。第一和第二传感器表面包括加热表面。

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