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2. 发明授权

US5846330A Gas injection disc assembly for CVD applications 失效
标题翻译：用于CVD应用的气体注射盘组件
公开(公告)号：US5846330A
公开(公告)日：1998-12-08
申请号：US883020
申请日：1997-06-26
申请人： George Quirk , Daniel V. Raney , Michael Scott Heuser , C. B. Shepard, Jr.
发明人： George Quirk , Daniel V. Raney , Michael Scott Heuser , C. B. Shepard, Jr.
IPC分类号： C23C16/455 , C23C16/44 , C23C16/513 , C23C16/00
CPC分类号： C23C16/4558 , C23C16/513
摘要： A gas injection disc is provided which includes an outer ring and a tubular modular insert which slips into the outer ring. The outer ring is provided with an inner bore, a ring-shaped plenum located around the inner bore, an outer gas sealing surface around the plenum, and two gas feed paths extending from the periphery of the outer ring to the plenum. The gas feed paths are each provided with a gas feed attachment for coupling gas supply tubes thereto. The insert is provided with a plurality of radially aligned injectant holes, an inner gas sealing surface, and an axial bore. The insert is seated in the inner bore of the outer ring such that the inner and outer gas sealing surface face each other with a small gap provided therebetween which enables the insertion of the insert into the inner bore. The insert thereby substantially encloses the plenum, and the injectant holes are aligned with the plenum to receive injectant gases and direct the injectant gases into the axial bore of the insert. During the CVD process, the heat generated by the arc jet causes the insert to expand and eliminate the gap between the inner and outer sealing surfaces to thereby prevent undesirable gas leakage. Once the CVD operation is stopped the insert is permitted to cool and contract and return to its cooled dimensions unencumbered by the outer ring. The insert may then be removed for cleaning or for replacement with an insert having different characteristics.
摘要翻译：提供了一种气体注射盘，其包括滑入外圈的外圈和管状模块化插入件。外环设置有内孔，位于内孔周围的环形增压室，围绕增压室的外部气体密封表面以及从外环的周边延伸到气室的两个气体供给路径。气体供给路径各自设置有用于将气体供给管连接到其上的气体供给附件。插入件设置有多个径向排列的注入孔，内部气体密封表面和轴向孔。插入件位于外环的内孔中，使得内外气体密封表面彼此面对，其间设置有小间隙，从而能够将插入件插入内孔。因此，插入件基本上封闭气室，并且注入孔与气室对准以接收注入气体并将注入气体引导到插入件的轴向孔中。在CVD过程中，由电弧喷射产生的热量使得插入件膨胀并消除内密封表面和外密封表面之间的间隙，从而防止不期望的气体泄漏。一旦CVD操作停止，允许插入件冷却和收缩并返回到其被外圈阻碍的冷却尺寸。然后可以将插入件移除以用于具有不同特征的插入件进行清洁或替换。

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