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    • 8. 发明申请
    • LASER GENERATED STRESS WAVES FOR STICTION REPAIR
    • 激光生成应力波修复
    • WO2005084394A2
    • 2005-09-15
    • PCT/US2005/007311
    • 2005-03-07
    • THE REGENTS OF THE UNIVERSITY OF CALIFORNIAGUPTA, Vijay
    • GUPTA, Vijay
    • B81C1/00968
    • Methods and apparatus are presented to release stiction between suspended structures and the underlying surface in freestanding MEMS structures. A nanosecond rise time stress wave is launched on the backside of the Si substrate by impinging a 2.5 ns-duration Nd:YAG laser pulse onto a 3mm-dia area. The compressive stress wave propagates through the Si substrate and arrives at the site of several stiction-failed cantilevers on the front Si surface. The compressive stress wave propagates through the cantilevered structures and is reflected into a tensile wave from their free surfaces. The returning tensile wave pries off the interface, releasing the cantilevers.
    • 提出了方法和装置,以释放独立MEMS结构中的悬挂结构和底层表面之间的静摩擦力。 在Si衬底的背面通过在3mm直径区域上施加2.5ns持续时间的Nd:YAG激光脉冲来发射纳秒上升时间应力波。 压缩应力波传播通过Si衬底并到达前Si表面上几个不稳定悬臂的位置。 压缩应力波传播通过悬臂结构,并从其自由表面反射成拉伸波。 返回的拉伸波从界面上撬开,释放悬臂。