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1. 发明公开

EP2890529A2 SYSTEMS AND METHODS FOR SAFE ROBOT OPERATION 审中-公开
标题翻译：系统和机器人的安全操作方法
公开(公告)号：EP2890529A2
公开(公告)日：2015-07-08
申请号：EP13829022.6
申请日：2013-09-03
申请人： Rethink Robotics Inc. , Brooks, Rodney , Sussman, Michael , Williamson, Matthew M. , Goodwin, William A. , Dye, Noelle , Blumberg, Bruce
发明人： BROOKS, Rodney , SUSSMAN, Michael , WILLIAMSON, Matthew Murray , GOODWIN, William A. , DYE, Noelle , BLUMBERG, Bruce
IPC分类号： B25J9/16
CPC分类号： B25J9/1676 , G05B2219/40202 , G05B2219/40203 , G05B2219/43202
摘要： In various embodiments, safe collaboration between a robot and humans is achieved by operating the robot continuously at or below a first threshold speed at which any collisions with a person's arms do not cause harm, and, upon detection of the person's torso or head within a danger zone around the robot, reducing the speed to or below a second threshold at which any collisions with the person's torso or head do not cause harm.

2. 发明公开

EP2864085A2 USER INTERFACES FOR ROBOT TRAINING 有权转让
标题翻译： INTERFACES机器人培训
公开(公告)号：EP2864085A2
公开(公告)日：2015-04-29
申请号：EP13740399.4
申请日：2013-06-21
申请人： Rethink Robotics Inc. , Chen, Elaine Y. , Brooks, Rodney , Blumberg, Bruce , Dye, Noelle , Caine, Michael Edward , Sussman, Michael , Linder, Natan , Long, Paula , Buehler, Christopher J. , Williamson, Matthew M. , Romano, Joseph M. , Goodwin, William A.
发明人： CHEN, Elaine, Y. , BROOKS, Rodney , BLUMBERG, Bruce , DYE, Noelle , CAINE, Michael , SUSSMAN, Michael , LINDER, Natan , LONG, Paula , BUEHLER, Christopher, J. , WILLIAMSON, Matthew, M. , ROMANO, Joseph, M. , GOODWIN, William, A.
IPC分类号： B25J9/16 , G05B19/42 , B25J13/02 , B25J11/00
CPC分类号： B25J9/163 , B25J9/0087 , B25J9/1671 , B25J9/1676 , B25J9/1697 , B25J11/0005 , B25J13/084 , G05B19/42 , G05B2219/39451 , G05B2219/39466 , G05B2219/40116 , G06F17/00 , G06K9/2081 , G06K9/6255 , G06K9/66 , G06N5/025 , G06N7/005 , G06N99/005 , Y02P90/86 , Y10S901/01 , Y10S901/03 , Y10S901/09 , Y10S901/31 , Y10S901/46 , Y10S901/47
摘要： In accordance with various embodiments, a user interface embedded into a robot facilitates robot training via direct and intuitive physical interactions. In some embodiments, the user interface includes a wrist cuff that, when grasped by the user, switches the robot into zero-force gravity-compensated mode.

3. 发明申请

WO2007149513A2 SYSTEM FOR PURGING RETICLE STORAGE 审中-公开
标题翻译：用于储存存货的系统
公开(公告)号：WO2007149513A2
公开(公告)日：2007-12-27
申请号：PCT/US2007/014428
申请日：2007-06-19
申请人： ENTEGRIS, INC. , KISHKOVICH, Oleg, P. , GABARRE, Xavier , GOODWIN, William, M. , LO, James , SCOGGINS, Troy
发明人： KISHKOVICH, Oleg, P. , GABARRE, Xavier , GOODWIN, William, M. , LO, James , SCOGGINS, Troy
IPC分类号： A61N1/00
CPC分类号： H01L21/67769 , G03F1/66 , G03F7/70741 , G03F7/70866 , G03F7/70916 , G03F7/70925 , G03F7/70933 , H01L21/67017 , H01L21/67253 , H01L21/67353 , H01L21/67359 , H01L21/67386 , H01L21/67389 , H01L21/67393 , Y10S414/135 , Y10S414/137 , Y10S414/139 , Y10S414/14
摘要： The present invention provides a method, system, and components for protecting reticles and specifically for minimizing haze formation on reticles during storage and use. By substantially continually maintaining a purge in a storage housing having a reduced humidity level on reticles or by temporarily storing the reticle in a container in proximity to a desiccant or getter when not being purged, haze formation can be eliminated, minimized, or sufficiently controlled. Moreover, a filter media in the container may be positioned to be "recharged" during the substantially continual purging of the reticle, a reduced desireable humidity level can be readily maintained in the reticle container when the container is not currently being purged. Additionally, the system of the invention can comprise an ionizer associated with the purge system. For example, the ionizer can be associated with at least one of the plurality of purge lines of the purge system. The system of the invention can also include a purge gas source connected to the purge system that comprises a source of CDA or extra CDA. The storage housing can comprise a plurality of shelves that each include a plurality of reticle storage receptacles.
摘要翻译：本发明提供一种用于保护标线的方法，系统和部件，并且特别地用于最小化在保存和使用期间掩模版上的雾化形成。通过基本上连续地保持在具有降低的刻度上的湿度水平的储存壳体中的吹扫，或者当不被清除时将掩模版临时存储在接近干燥剂或吸气剂的容器中时，可以消除，最小化或充分控制雾度形成。此外，容器中的过滤介质可以在基本上持续地清除标线板期间被定位成“再充电”，当容器当前不被清除时，可以容易地保持在掩模版容器中减少的期望的湿度水平。另外，本发明的系统可以包括与吹扫系统相关联的离子发生器。例如，离子发生器可以与净化系统的多条清除管线中的至少一条相关联。本发明的系统还可以包括连接到吹扫系统的吹扫气体源，其包括CDA源或额外的CDA。存储壳体可以包括多个搁架，每个搁架都包括多个标线保管容器。

4. 发明申请

WO0127602A3 GAS SENSOR DESIGN AND METHOD FOR USING THE SAME 审中-公开
标题翻译：气体传感器设计及其使用方法
公开(公告)号：WO0127602A3
公开(公告)日：2001-12-13
申请号：PCT/US0041149
申请日：2000-10-12
申请人： DELPHI TECH INC , WANG DA YU , CHADWICK WAYNE M , KIKUCHI PAUL CASEY , GOODWIN WILLIAM RUSSELL , TAI LONE WREN F , DETWILER ERIC J , KENNARD FREDERICK LINCOLN III , COHA JEFFREY T
发明人： WANG DA YU , CHADWICK WAYNE M , KIKUCHI PAUL CASEY , GOODWIN WILLIAM RUSSELL , TAI LONE-WREN F , DETWILER ERIC J , KENNARD FREDERICK LINCOLN III , COHA JEFFREY T
IPC分类号： G01N27/406 , G01N27/407 , G01N27/419
CPC分类号： G01N27/419
摘要： The gas sensor employs a reference gas channel which enables simultaneous or sequential pumping of oxygen and sensing of the exhaust gas (e.g., to determine if the exhaust gas is rich or lean). The method comprises: using a gas sensor comprising a first electrode and a reference electrode with an electrolyte disposed therebetween, wherein the first electrode and reference electrode are in ionic communication, and a reference gas channel in fluid communication with the reference electrode and an exterior of the sensor; introducing an exhaust gas to the first electrode; applying a voltage to the reference electrode; ionizing oxygen at the first electrode; transferring the ionized oxygen across the electrolyte to the reference electrode; forming molecular oxygen at the reference electrode; ionizing the molecular oxygen on the reference electrode; transferring the ionized oxygen across the electrolyte to the first electrode to create a voltage; and measuring the voltage.
摘要翻译：气体传感器采用参考气体通道，其能够同时或顺序地抽吸氧气和感测废气（例如，以确定废气是富有还是贫的）。该方法包括：使用包括第一电极和参考电极的气体传感器，其间设置有电解质，其中第一电极和参比电极离子连通，以及与参考电极流体连通的参考气体通道和传感器; 将废气引入所述第一电极; 向参考电极施加电压; 在第一电极处电离氧; 将电离氧转移到电极到参比电极; 在参比电极上形成分子氧; 电离参比电极上的分子氧; 将电离氧转移到第一电极以产生电压; 并测量电压。

5. 发明申请

WO2009023787A3 STOKER WITH PURGE CONDITION SENSING 审中-公开
标题翻译： STOKER与浇注条件感测
公开(公告)号：WO2009023787A3
公开(公告)日：2009-06-04
申请号：PCT/US2008073198
申请日：2008-08-14
申请人： ENTEGRIS INC , GOODWIN WILLIAM W , PHELPS MARK C
发明人： GOODWIN WILLIAM W , PHELPS MARK C
IPC分类号： H01L21/00 , H01L21/673 , H01L21/677
CPC分类号： H01L21/67253 , G03F1/66 , H01L21/67017 , H01L21/67353 , H01L21/67359 , H01L21/67393 , H01L21/67769
摘要： The present invention provides a method, system, and components for protecting substrates and particularly reticles (9) by providing purging and sensing and confirmation of said purging streams. A storage housing (54, 54.1, 70, 78) with a purge system (50, 52) for reticle (2, 66, 84) pods has an automated robotic mechanism (74, 85) for transferring reticle pods which includes a gripper (70.3, 90) with an air flow sensor (71.2, 102) associated therewith. The storage housing includes receptacles (58, 71.7, 87) for receiving the reticle pods, the receptacles having purge outlets (64) as part of the purge system that discharge purge streams, into the enclosed envoironment (54.2) of the storage housing, when a reticle pod is not in place and discharge purge streams into the reticle pod when the recticle pod is in place. The air flow sensor on the gripper can confirm a measure, a purge stream at a receptacle before placing a reticle pod thereon.
摘要翻译：本发明提供了一种通过提供清洗和检测和确认所述清洗流来保护基底，特别是标线（9）的方法，系统和部件。具有用于掩模版（2,66,84）舱的净化系统（50,52）的储存壳体（54,54,70,78）具有用于传送标线舱的自动机器人机构（74,85），所述自动化机器人机构包括夹具 70.3,90）与其相关联的空气流量传感器（71.2,102）。存储壳体包括用于接纳标线舱的容器（58,71,77,8），所述容器具有作为吹扫系统的一部分的清洗出口（64），其将清除流排出到储存壳体的封闭式通风口（54.2）中，标线盒不在适当的位置，并且当直肠荚果就位时，将清除流排放到标线舱中。夹具上的空气流量传感器可以在将掩模版盒放置在其上之前确认测量，在容器处的吹扫流。

6. 发明申请

WO2006108032A3 ENVIRONMENTAL CONTROL IN A RETICLE SMIF POD 审中-公开
标题翻译：一个虚拟SMIF POD环境控制
公开(公告)号：WO2006108032A3
公开(公告)日：2007-11-15
申请号：PCT/US2006012636
申请日：2006-04-04
申请人： ENTEGRIS INC , HALBMAIER DAVID L , SIMPSON ANTHONY , GOODWIN WILLIAM M , KISHKOVICH OLEG P , KIELBASO TOM , MANGANIELO FRANK
发明人： HALBMAIER DAVID L , SIMPSON ANTHONY , GOODWIN WILLIAM M , KISHKOVICH OLEG P , KIELBASO TOM , MANGANIELO FRANK
IPC分类号： G03B27/42 , B65D85/48 , G03B27/58 , G03B27/62
CPC分类号： H01L21/67017 , H01L21/67353 , H01L21/67359 , H01L21/67386 , H01L21/67389 , H01L21/67393
摘要： The present invention provides a standardized mechanical interface (SMIF) reticle pod (100) that is configured to provide a controlled environment for supporting a reticle (130) wherein the controlled environemt is maintained substantially free of crystal growth causing contaminants. Accordingly, there is provided a layered filter (232) with filter elements capable of filtering particulates and adsorbing gaseous contaminants. The filter (232) has an inwardly facing face generally planar shaped with a surface area that is substantially half or more of the area of the reticle face (129). The inwardly facing is placed in close proximity to the reticle patterned surface (128) and has an area that is a significant fraction of the reticle patterned surface area (128). The SMIF pod is also provided with a purge system configured to inject a very dry gas within the controlled environment to flush the controlled environment of contaminants as well as to regenerate the filter (232).
摘要翻译：本发明提供了一种标准化的机械接口（SMIF）掩模版架（100），其被配置为提供用于支撑掩模版（130）的受控环境，其中所述受控环境基本上不含导致污染物的晶体生长。因此，提供了具有能够过滤颗粒并吸附气态污染物的过滤元件的层状过滤器（232）。过滤器（232）具有大致平面形状的面向内的面，其表面面积大致为标线面（129）的面积的一半或更多。向内面对放置在靠近掩模版图案表面（128）处，并且具有作为标线片图案化表面区域（128）的重要部分的面积。 SMIF吊舱还设有吹扫系统，其配置成在受控环境内喷射非常干燥的气体以冲洗受污染物的受控环境以及再生过滤器（232）。

7. 发明申请

WO2006083290A3 SYSTEM AND METHOD FOR REMOVING CONTAMINANTS 审中-公开
标题翻译：去除污染物的系统和方法
公开(公告)号：WO2006083290A3
公开(公告)日：2007-04-19
申请号：PCT/US2005020090
申请日：2005-06-07
申请人： ENTEGRIS INC , SERGI JOHN E , GAUDREAU JOHN , GOODWIN WILLIAM , KISHKOVICH OLEG P , KINKEAD DEVON A
发明人： SERGI JOHN E , GAUDREAU JOHN , GOODWIN WILLIAM , KISHKOVICH OLEG P , KINKEAD DEVON A
IPC分类号： B01D53/04 , B01D46/12 , F24F3/16
CPC分类号： B01D46/10 , B01D46/0013 , B01D46/429 , B01D46/521 , B01D53/0446 , B01D53/0454 , B01D2258/0216 , B01D2259/402 , B01D2273/30 , B33Y80/00
摘要： The invention provides a system and method comprising an apparatus for removing contaminants from a gas in a semiconductor processing device, which can include a filter unit having at least two parallel filter stages located therein. The filter stages are designed to remove a least a portion of the contaminants present in the gas flowing through them. The apparatus can also include a flow controller for distributing the gas flow among the filter stages. In one embodiment, the controller may consist of a diffuser plate. The invention also provides a sampling tube orifice for gas flow control in a system or method of the invention. In another embodiment, an apparatus for removing contaminants from a gas in a clean room comprises a filter unit having at least two parallel filter stages, which are used to remove a portion of the contaminants in the gas as it passes through the apparatus.
摘要翻译：本发明提供了一种系统和方法，其包括用于从半导体处理装置中的气体中除去污染物的装置，其可以包括其中设置有至少两个平行的过滤器级的过滤器单元。过滤器级被设计成去除流过它们的气体中存在的至少一部分污染物。该装置还可以包括用于在过滤级之间分配气流的流量控制器。在一个实施例中，控制器可以由扩散板组成。本发明还提供了一种用于本发明的系统或方法中的气体流量控制的采样管孔。在另一个实施例中，用于从洁净室中的气体中去除污染物的装置包括具有至少两个平行的过滤器阶段的过滤器单元，其用于在气体通过设备时去除气体中的一部分污染物。

8. 发明申请

WO2006083290A2 SYSTEM AND METHOD FOR REMOVING CONTAMINANTS 审中-公开
标题翻译：去除污染物的系统和方法
公开(公告)号：WO2006083290A2
公开(公告)日：2006-08-10
申请号：PCT/US2005/020090
申请日：2005-06-07
申请人： ENTEGRIS, INC. , SERGI, John, E. , GAUDREAU, John , GOODWIN, William , KISHKOVICH, Oleg, P. , KINKEAD, Devon, A.
发明人： SERGI, John, E. , GAUDREAU, John , GOODWIN, William , KISHKOVICH, Oleg, P. , KINKEAD, Devon, A.
IPC分类号： B01D53/04 , B01D46/12 , F24F3/16
CPC分类号： B01D46/10 , B01D46/0013 , B01D46/429 , B01D46/521 , B01D53/0446 , B01D53/0454 , B01D2258/0216 , B01D2259/402 , B01D2273/30 , B33Y80/00
摘要： The invention provides a system and method comprising an apparatus for removing contaminants from a gas in a semiconductor processing device, which can include a filter unit having at least two parallel filter stages located therein. The filter stages are designed to remove a least a portion of the contaminants present in the gas flowing through them. The apparatus can also include a flow controller for distributing the gas flow among the filter stages. In one embodiment, the controller may consist of a diffuser plate. The invention also provides a sampling tube orifice for gas flow control in a system or method of the invention. In another embodiment, an apparatus for removing contaminants from a gas in a clean room comprises a filter unit having at least two parallel filter stages, which are used to remove a portion of the contaminants in the gas as it passes through the apparatus.
摘要翻译：本发明提供了一种系统和方法，其包括用于从半导体处理装置中的气体中除去污染物的装置，其可以包括其中设置有至少两个平行的过滤器级的过滤器单元。过滤器级被设计成去除流过它们的气体中存在的至少一部分污染物。该装置还可以包括用于在过滤级之间分配气流的流量控制器。在一个实施例中，控制器可以由扩散板组成。本发明还提供了一种用于本发明的系统或方法中的气体流量控制的采样管孔。在另一个实施例中，用于从洁净室中的气体中去除污染物的装置包括具有至少两个平行过滤器阶段的过滤器单元，用于在气体通过设备时去除气体中的一部分污染物。

9. 发明申请

WO2006037017A2 FORCE REFLECTING HAPTIC INTERFACE 审中-公开
标题翻译：强制反映口交界面
公开(公告)号：WO2006037017A2
公开(公告)日：2006-04-06
申请号：PCT/US2005/034748
申请日：2005-09-27
申请人： SENSABLE TECHNOLOGIES, INC. , KAPOOR, Deepak , GOODWIN, William, Alexander
发明人： KAPOOR, Deepak , GOODWIN, William, Alexander
IPC分类号： G06F3/00 , B25J13/02 , G05G9/047
CPC分类号： G06F3/0346 , B25J13/025 , G06F3/016
摘要： The invention generally relates haptic interfaces and user interfaces that interact with all of a user's body members, including but not limited to the hand, foot, arm, tongue, head, buttocks, etc. The haptic and user interfaces may include combinations of powered and unpowered degrees-of-freedom. In addition, the invention relates to user interfaces for replicating compound movements including, for example, pinch, grasp, twist, extension and retraction, and roll. The user interfaces facilitate the interaction between point type tools (pencil, stylus, scalpel, etc.) and line-type tools (e.g. rat tail file, sword and cane) and virtual or remote environments through the haptic interfaces.
摘要翻译：本发明总体上涉及触觉界面和用户界面，其与所有用户的身体成员相互作用，包括但不限于手，脚，手臂，舌头，头部，臀部等。触觉和用户界面可以包括动力和没有动力的自由度。此外，本发明涉及用于复制复合运动的用户界面，包括例如夹紧，抓握，扭曲，延伸和缩回以及滚动。用户界面促进点类型工具（铅笔，手写笔，手术刀等）和线型工具（例如鼠尾文件，剑和手杖）以及通过触觉界面的虚拟或远程环境之间的交互。

10. 发明申请

WO2005043365A3 FORCE REFLECTING HAPTIC INTERFACE 审中-公开
标题翻译：力反射HAPTIC界面
公开(公告)号：WO2005043365A3
公开(公告)日：2005-09-29
申请号：PCT/US2004036147
申请日：2004-10-29
申请人： SENSABLE TECHNOLOGIES INC , MASSIE THOMAS H , GOODWIN WILLIAM ALEXANDER , CHEN ELAINE , KAPOOR DEEPAK , COHEN ABBE J , ITKOWITZ BRANDON D
发明人： MASSIE THOMAS H , GOODWIN WILLIAM ALEXANDER , CHEN ELAINE , KAPOOR DEEPAK , COHEN ABBE J , ITKOWITZ BRANDON D
IPC分类号： G06F1/20 , G06F3/00 , G06F3/01 , G06F3/033
CPC分类号： G06F3/016 , G06F1/206 , G06F3/0346
摘要： A multi-function force reflecting haptic interface including various sub-assemblies is disclosed. The sub-assemblies include multiple function user interfaces, a user interface docking station for setting the interface to a home position, temperature monitoring and control systems, and various kinematic cable drive systems.
摘要翻译：公开了反映包括各种子组件的触觉界面的多功能力。子组件包括多个功能用户界面，用于将界面设置到原位的用户界面对接站，温度监控和控制系统以及各种运动式线缆驱动系统。

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