专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明专利

JP2005338061A Inspection device for electric test for inspection article 有权
标题翻译：检验用电气检验检验装置
公开(公告)号：JP2005338061A
公开(公告)日：2005-12-08
申请号：JP2005088960
申请日：2005-03-25
申请人： Feinmetall Gmbh , ファインメタルゲーエムベーハー
发明人： BOEHM GUENTHER
IPC分类号： G01R31/26 , G01R1/04 , G01R1/06 , G01R1/073 , H01L21/66 , H01L21/68
CPC分类号： G01R1/07371 , G01R1/0466 , G01R1/0483 , G01R1/07357 , G01R1/07378
摘要： PROBLEM TO BE SOLVED: To provide an inspection device always certainly ensured with certain contact especially for the inspection device for the wafer which is provided with an electric contact device provided with a contact head with pin contact constituted of pin array applied on the inspection article and a contact surface being in contact with the edges of contact member which is arranged on the other side of the inspection surface for storing the inspection article, and a supporting device arranged on the other side of the contact device.
SOLUTION: A pulling means and/or compression means (14) for adjusting the flatness or deviation from the flatness of array of the contact surface (10) is arranged between the supporting device (6) and the contact device (5).
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了提供一定确保的检查装置，特别是对于具有电触点装置的晶片的检查装置，其具有一定的接触，该接触装置具有接触头，该接触头具有由针阵列检查物品和与布置在检查表面的另一侧的接触构件的边缘接触的接触表面，用于存放检查物品;以及支撑装置，布置在接触装置的另一侧。解决方案：在支撑装置（6）和接触装置（5）之间布置有用于调节与接触表面（10）的阵列的平坦度的平坦度或偏差的牵引装置和/或压缩装置（14）。版权所有（C）2006，JPO＆NCIPI

2. 发明专利

JP2010032519A Electric inspection apparatus and electric inspection method for inspecting electric inspection sample 有权
标题翻译：检查电检样品的电气检查装置和电检检查方法
公开(公告)号：JP2010032519A
公开(公告)日：2010-02-12
申请号：JP2009172653
申请日：2009-07-24
申请人： Feinmetall Gmbh , ファインメタルゲーエムベーハー
发明人： BOEHM GUNTHER , KOPILAS BERISLAV , EHRLER SYLVIA , HOLOCHER MICHAEL
IPC分类号： G01R1/073 , G01R31/26 , H01L21/66
CPC分类号： G01R1/07378 , G01R1/07357 , G01R31/2886
摘要： PROBLEM TO BE SOLVED: To provide an electric inspection apparatus for inspecting an electric inspection sample that has high contact certainty and operation certainty and correctly inspects the electric inspection sample. SOLUTION: This electric inspection apparatus for inspection of the electric inspection sample has a conductor substrate electrically bound to an inspection head via a transformer of a contact section interval, and the conductor substrate is mechanically bound to a first reinforcing device and is reinforced by it. At least one spacer (30) penetrating the conductor substrate (12) is mechanically bound to the transformer (7) of the contact section interval, and is intended to be held via an inclination adjusting means (34) in the first reinforcing device (26). COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于检查具有高接触确定性和操作确定性并正确检查电检样品的电检样品的电气检查装置。该电气检查样本的检查用电气检查装置具有通过接触部间隔的变压器与检查头电连接的导体基板，导体基板机械地结合到第一增强装置并被加强通过它。穿透导体基板（12）的至少一个间隔件（30）机械地结合到接触部分间隔的变压器（7），并且旨在通过第一加强装置（26）中的倾斜调节装置（34））。版权所有（C）2010，JPO＆INPIT

3. 发明专利

JP2008134248A Apparatus and method for making contact with electric analyte to be inspected 有权
标题翻译：与电气分析仪联系的装置和方法将被检查
公开(公告)号：JP2008134248A
公开(公告)日：2008-06-12
申请号：JP2007304365
申请日：2007-11-26
申请人： Feinmetall Gmbh , ファインメタルゲーエムベーハー
发明人： SCHMITT REINER , GAUSS ULRICH
IPC分类号： G01R1/06
CPC分类号： G01R1/07371 , G01R1/07357
摘要： PROBLEM TO BE SOLVED: To provide a contact apparatus whose contact element, or needle in particular, can be used for a decisively extended period of time.
SOLUTION: The present invention relates to a contact apparatus (1) for making contact with an electric analyte (25) to be inspected or, in particular, an analyte (25) including a contact portion plated with tin. The apparatus includes at least two guide elements (2, 3, 4, 5) each having a through-hole (16, 17, 18, 19) through which a contact element (20) extends substantially in an axial direction, and the contact element protrudes from the guide element on that side of the guide element (5) which faces the analyte (25), so as to make contact with the analyte (25). The length of protrusion (H) can be matched by adjusting the intervals at which the guide elements (2, 3, 4, 5) are placed in the axial direction or the position of the guide element (5), which faces the analyte (25), in the axial direction.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种接触装置，其接触元件或特别是针可以在决定性延长的时间段内使用。解决方案：本发明涉及一种用于与被检查的电分析物（25）接触的接触装置（1），特别涉及包括镀锡的接触部分的分析物（25）。该装置包括至少两个引导元件（2,3,4,5），每个引导元件具有通孔（16,17,18,19），接触元件（20）通过其沿轴向方向延伸，并且触点元件从引导元件（5）的面向分析物（25）的那侧的引导元件突出，以便与分析物（25）接触。可以通过调整引导元件（2,3,4,5）在轴向方向上放置的间隔或面向分析物的引导元件（5）的位置来匹配突起（H）的长度 25）。版权所有（C）2008，JPO＆INPIT

4. 发明专利

JP2007010671A Method and system for electrically inspecting test subject, and manufacturing method of contactor used in inspection 审中-公开
标题翻译：电检检测方法及系统及检验中使用的接触器的制造方法
公开(公告)号：JP2007010671A
公开(公告)日：2007-01-18
申请号：JP2006181906
申请日：2006-06-30
申请人： Feinmetall Gmbh , ファインメタルゲーエムベーハー
发明人： BOEHM GUNTHER
IPC分类号： G01R31/28 , G01R31/26 , H01L21/66
CPC分类号： G01R31/2808 , G01R1/06794 , G01R1/073 , G01R1/07314
摘要： PROBLEM TO BE SOLVED: To provide an electrical inspection method of a test subject which can very quickly and precisely achieve alignment in contact points of a contactor to the opposite points of the test subject without any error. SOLUTION: This invented contactor electrically couples two or more electrical inspection devices, containing at least one contact point and being installed in a retention element, with the test subject. The contactor (1), preferably the retention element (3), is equipped with at least one marking (25) which has a fixed position to at least one contact point (7). Further this invention also concerns the corresponding method. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种可以非常快速且精确地将接触器的接触点对准测试对象的相对点而非任何错误地进行对准的测试对象的电气检查方法。解决方案：本发明的接触器将包含至少一个接触点并且被安装在保持元件中的两个或更多个电气检查装置与测试对象电耦合。接触器（1），优选保持元件（3），配备有至少一个标记（25），其具有至少一个接触点（7）的固定位置。此外，本发明还涉及相应的方法。版权所有（C）2007，JPO＆INPIT

5. 发明专利

JP2008209408A Electric inspection device for inspection of electric object to be inspected 审中-公开
标题翻译：用于检查电气对象检查的电气检查装置
公开(公告)号：JP2008209408A
公开(公告)日：2008-09-11
申请号：JP2008027837
申请日：2008-02-07
申请人： Feinmetall Gmbh , ファインメタルゲーエムベーハー
发明人： BOEHM GUENTHER , STOLP PETER , STEIDLE GEORG
IPC分类号： G01R1/073 , G01R31/26 , H01L21/66
CPC分类号： G01R31/2889 , G01R1/07357
摘要： PROBLEM TO BE SOLVED: To provide an electric inspection device which can test surely an electric object to be inspected under an extreme inspection condition.
SOLUTION: In the electric inspection device 1 for the inspection of the electric object 2 to be inspected, preferably a wafer 3, the electric inspection device comprises at least an electric contact system 5 and at least an electric connection device 7 equipped with at least an electric/electronic part 16. The electric connection device is equipped with a contact surface 13 for carrying out touch contact of the contact system 5 which can contact the electric object 2 to be inspected, and the electric connection device 7 has a wiring substrate 9 and a connection element 8. The electric/electronic part 16 exists in internals/surface of the connection element 8.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够在极端检查条件下可靠地测试要检查的电气对象的电气检查装置。解决方案：在用于检查待检查的电气对象2的电气检查装置1中，优选地是晶片3，电检查装置至少包括电接触系统5和至少具有电接触装置7的电连接装置7 至少具有电气/电子部件16.电连接装置具有用于进行接触系统5的接触的接触面13，接触系统5能够接触待检查的电气对象2，电连接装置7具有布线基板9和连接元件8.电气/电子部件16存在于连接元件8的内部/表面中。（C）2008，JPO＆INPIT

6. 发明专利

JP2008209401A Contact device for bringing electrical specimen into contact and method required for same 有权
标题翻译：用于将电子样本连接起来的接触装置和为此需要的方法
公开(公告)号：JP2008209401A
公开(公告)日：2008-09-11
申请号：JP2007326305
申请日：2007-12-18
申请人： Feinmetall Gmbh , ファインメタルゲーエムベーハー
发明人： WEILAND ACHIM , BOEHM GUENTHER
IPC分类号： G01R1/073 , G01R31/26 , H01L21/66
CPC分类号： G01R31/2863 , G01R31/2874 , G01R31/2889
摘要： PROBLEM TO BE SOLVED: To provide a contact device for bringing an electrical specimen, especially a wafer, into contact. SOLUTION: The contact device has a contact head and a connection device. In this case, the contact head has a probe contact capable of coming into contact with a specimen electrically, and the position of the probe contact arranged in a probe region 12 is determined by at least a guidance element 9 belong to the contact head. The guidance element is fixed to a retainer 11 in the contact head. In this case, a side opposite to the specimen in the probe contact can be brought into contact with the contact region of the connection device electrically. It is intended that the guidance element 9 is composed of individual segments 17, the individual segments compose a portion of the probe region, and each is coupled to the retainer and/or the connection device by a fixed support 22. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供用于使电试样，特别是晶片接触的接触装置。
解决方案：接触装置具有接触头和连接装置。在这种情况下，接触头具有能够与试样电接触的探针接触，并且布置在探针区域12中的探针接触件的位置至少由属于接触头的引导元件9决定。引导元件固定在接触头中的保持器11上。在这种情况下，与探针接触件中的试样相对的一侧可以与连接装置的接触区域电接触。意图是，引导元件9由单独的段17组成，各个段构成探测区域的一部分，并且每个通过固定的支撑件22联接到保持器和/或连接装置。版权所有：（C）2008，JPO＆INPIT

7. 发明专利

JP2007003525A Contact device 有权
标题翻译：联系设备
公开(公告)号：JP2007003525A
公开(公告)日：2007-01-11
申请号：JP2006171027
申请日：2006-06-21
申请人： Feinmetall Gmbh , ファインメタルゲーエムベーハー
发明人： SCHMITT REINER , WEILAND ACHIM
IPC分类号： G01R31/28 , G01R1/06 , H01L21/66
CPC分类号： G01R1/07357 , G01R3/00 , H01R13/03
摘要： PROBLEM TO BE SOLVED: To provide a contact device for continuously achieving an improved contact state between an inspection contact and the contact element of a converter. SOLUTION: The contact device 1 comprises: a number of inspection contacts 12 for contacting a specimen 2 arranged to at least one holding element for electrically connecting the specimen 2 to an electric inspection device; and the converter 18 for enlarging the interval between adjacent contact paths. The contact device 1 has contact elements that come into contact with the inspection contacts 12 in the converter 18. The contact elements 22 are manufactured by noble metals, a noble metal alloy, an alloy containing at least one type of noble metal constituent, or conductive plastic. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种接触装置，用于连续地实现检查触头和转换器的接触元件之间的改善的接触状态。接触装置1包括：多个检查触点12，用于接触布置在至少一个用于将试样2电连接到电检查装置的保持元件的试样2; 以及用于扩大相邻接触路径之间的间隔的转换器18。接触装置1具有与转换器18中的检查触点12接触的接触元件。接触元件22由贵金属，贵金属合金，含有至少一种贵金属成分的合金或导电塑料。版权所有（C）2007，JPO＆INPIT

8. 发明专利

JP2005338060A Inspection device for electric inspection of inspection article and manufacturing method for inspection device 审中-公开
标题翻译：检验检验检验检验检测装置及检验设备制造方法
公开(公告)号：JP2005338060A
公开(公告)日：2005-12-08
申请号：JP2005087544
申请日：2005-03-25
申请人： Feinmetall Gmbh , ファインメタルゲーエムベーハー
发明人： BOEHM GUENTHER , HOLOCHER MICHAEL
IPC分类号： G01R31/26 , G01R1/06 , G01R1/067 , G01R1/073 , G01R3/00 , H01L21/66
CPC分类号： G01R3/00 , G01R1/06711 , G01R1/07314 , G01R1/07357 , Y10T29/49147 , Y10T29/49222
摘要： PROBLEM TO BE SOLVED: To provide an inspection device always certainly ensured with a certain contact of the inspection article especially for the inspection device for the wafer for inspecting the article provided with an electric contact device composed of a contact head equipped with pin contact member constituted of contact pin array and a contact surface being in contact with the edges of the contact members which are provided on the other side of inspection surface for storing the inspection article. SOLUTION: The contact surface of the contact member (22) extending in the axial direction is formed into the contact surface (12c) by machining. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了提供检查装置一定确保的检查装置，特别是对于用于检查具有电触头装置的用于检查的晶片的检查装置的检查装置，该电接触装置由配备有引脚的接触头组成接触构件由接触针阵列和与接触构件的边缘接触的接触表面设置在检查表面的另一侧以用于存储检查制品。解决方案：通过机械加工将接触构件（22）沿轴向延伸的接触表面形成接触表面（12c）。版权所有（C）2006，JPO＆NCIPI

9. 发明专利

JPH11248747A TEST HEAD FOR MICROSCOPIC STRUCTURE WITH INTERFACE 失效
公开(公告)号：JPH11248747A
公开(公告)日：1999-09-17
申请号：JP35065098
申请日：1998-11-05
申请人： FEINMETALL GMBH
发明人： SCHMITT REINER , GIRINGER KLAUS , GAUSS ULRICH , DEUSCH HEINZ
IPC分类号： G01R1/073 , G01R31/28 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To provide a test head provided with a device which is brought into contact with preferably continuously and adjacently arranged test points on an electric component being tested. SOLUTION: An electric component is provided with a plurality of contact elements which can be connected electrically to connecting elements of a testing apparatus and which are arranged preferably in feed-through openings in at least one guide panel out of two guide panels. The respective contact elements are guided to the respective allocated feed-through openings in the guide panel so as to be displaceable in their axial direction. Ends, on one side, of the respective contact elements are directed to one contact point on the connecting element, and ends on the other side are directed to one test point on every case. At this time, in a test head, contact elements 25 are not separated and removed from feed-through openings 23, 47 by using a fixation means 43. In addition, a device 7 which is brought into contact with a connecting element 11 is connected so as to be detachable by using auxiliary means 9.

10. 发明专利

JP2012123010A Electric inspection apparatus and electric inspection method for inspection of electric inspection sample 有权
标题翻译：检查电气样本的电气检查装置和电检检查方法
公开(公告)号：JP2012123010A
公开(公告)日：2012-06-28
申请号：JP2012011631
申请日：2012-01-24
申请人： Feinmetall Gmbh , ファインメタルゲーエムベーハー
发明人： BOEHM GUNTHER , KOPILAS BERISLAV , EHRLER SYLVIA , HOLOCHER MICHAEL
IPC分类号： G01R1/073 , G01R31/26 , H01L21/66
CPC分类号： G01R1/07378 , G01R1/07357 , G01R31/2886
摘要： PROBLEM TO BE SOLVED: To provide an electric inspection apparatus for inspection of an electric inspection sample that has high contact certainty and operation certainty, and thereby correctly inspects the electric inspection sample.SOLUTION: The present invention relates to an electric inspection apparatus for inspection of an electric inspection sample which has a conductor substrate electrically bound to an inspection head via a transformer of a contact section interval, and the conductor substrate is mechanically bound to a first reinforcing device and is reinforced by the first reinforcing device. At least one spacer (30) penetrating the conductor substrate (12) is mechanically bound to the transformer (7) of the contact section interval, and is intended to be held via an inclination adjusting means (34) in the first reinforcing device (26).
摘要翻译：要解决的问题：提供一种用于检查具有高接触确定性和操作确定性的电检样品的电气检查装置，从而正确地检查电检样品。解决方案：本发明涉及一种用于检查电检查样本的电气检查装置，该电检查样本具有通过接触部分间隔的变压器电连接到检查头的导体基板，并且导体基板机械地结合到第一加强装置，并由第一加强装置加固。穿透导体基板（12）的至少一个间隔件（30）机械地结合到接触部分间隔的变压器（7），并且旨在通过第一加强装置（26）中的倾斜调节装置（34））。版权所有（C）2012，JPO＆INPIT

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式