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1. 发明申请

WO2004041998A2 AN APPARATUS AND METHOD FOR TWO-DIMENSIONAL ELECTRON GAS ACTUATION AND TRANSDUCTION FOR GAAS NEMS 审中-公开
标题翻译：用于二维电子气体激励和传递用于脑神经元的装置和方法
公开(公告)号：WO2004041998A2
公开(公告)日：2004-05-21
申请号：PCT/US2003/014566
申请日：2003-05-07
申请人： CALIFORNIA INSTITUTE OF TECHNOLOGY , ROUKES, Michael, L. , EKINCI, Kamil, L. , YANG, Y., T. , HUANG, X., M., H. , TANG, H., X. , HARRINGTON, Darrell, A. , CASEY, Jean , ARLETT, Jessica, L.
发明人： ROUKES, Michael, L. , EKINCI, Kamil, L. , YANG, Y., T. , HUANG, X., M., H. , TANG, H., X. , HARRINGTON, Darrell, A. , CASEY, Jean , ARLETT, Jessica, L.
IPC分类号： C12N
CPC分类号： B81B3/0035 , G01P15/08 , G01P15/097 , H03H9/02244 , H03H9/2457 , H03H9/2463 , H03H2009/02496 , H03H2009/02511 , H03H2009/02519 , H03H2009/02527
摘要： A doubly clamped beam has an asymmetric piezoelectric layer within the beam with a gate proximate to the beam within a submicron distance with a gate and beam dipole. A suspended beam is formed using a Cl 2 /He plasma etch supplied at a flow rate ratio of 1:9 respectively into a plasma chamber. A parametric amplifier comprises a NEMS signal beam driven at resonance and a pair of pump beams driven at twice resonance to generate a modulated Lorentz force on the pump beams to perturb the spring constant of the signal beam. A bridge circuit provides two out-of-phase components of an excitation signal to a first and second NEMS beam in a first and second arm. A DC current is supplied to an AC driven NEMS device to tune the resonant frequency. An analyzer comprises a plurality of piezoresistive NEMS cantilevers with different resonant frequencies and a plurality of drive/sense elements, or an interacting plurality of beams to form an optical diffraction grating, or a plurality of strain-sensing NEMS cantilevers, each responsive to a different analyte, or a plurality of piezoresistive NEMS cantilevers with different IR absorbers.
摘要翻译：双夹紧光束在光束内具有非对称压电层，栅极和栅极和光束偶极子之间的亚微米距离内的栅极靠近光束。使用以1：9的流量比提供的Cl 2 / He等离子体蚀刻分别形成悬臂，形成等离子体室。参数放大器包括以共振驱动的NEMS信号光束和以两次谐振驱动的一对泵浦光束，以在泵浦光束上产生调制的洛伦兹力，以扰乱信号光束的弹簧常数。桥接电路在第一和第二臂中向第一和第二NEMS波束提供激励信号的两个异相分量。直流电流被提供给AC驱动NEMS器件以调谐谐振频率。分析器包括具有不同谐振频率的多个压阻NEMS悬臂和多个驱动/感测元件或相互作用的多个光束以形成光学衍射光栅，或多个应变感测NEMS悬臂，每个响应于不同的分析物或具有不同IR吸收剂的多个压阻NEMS悬臂。

2. 发明申请

WO02090246A3 AN APPARATUS AND METHOD FOR ULTRASENSITIVE NANOELECTROMECHANICAL MASS DETECTION 审中-公开
标题翻译：一种用于超声波纳米电子质量检测的装置和方法
公开(公告)号：WO02090246A3
公开(公告)日：2003-03-13
申请号：PCT/US0214130
申请日：2002-05-03
申请人： CALIFORNIA INST OF TECHN , ROUKES MICHAEL L , EKINCI KAMIL L
发明人： ROUKES MICHAEL L , EKINCI KAMIL L
IPC分类号： G01G3/16 , G01N27/00 , G01N11/00 , G01G3/14 , G01L1/10
CPC分类号： G01N29/036 , G01G3/16 , G01N2291/0256 , H01J49/26
摘要： The invention relates to the application of the techniques of nanoelectromechanical system (NEMS) to ultrasensitive mass detection. A pulsed flux of atoms is adsorbed onto the surface of a 32.8 MHz nanomechanical resonator (10) within an ultrahigh vacuum environment. The mass-induced frequency shifts from these adsorbates are then used to demonstrate a mass sensitivity of SIMILAR 1.46x10 Daltons (Da). For resonators (10) operating up to frequencies of 72 MHz, inverse mass responsivities as small as SIMILAR 8x10 grams/Hz (5x10 Da/Hz) are obtained. Our results offer a new approach to ultrahigh resolution mass spectrometry of individual, electrically-neutral macromolecules with clear prospects for single Dalton sensitivity.
摘要翻译：本发明涉及纳米机电系统（NEMS）技术在超敏感质量检测中的应用。脉冲通量的原子被吸附到超高真空环境中的32.8MHz纳米机械谐振器（10）的表面上。然后使用这些被吸附物质的质量诱导频率变化来证明质量灵敏度为1.46×10 6达尔顿（Da）。对于工作频率为72MHz的谐振器（10），可获得小至8x10 -20克/赫兹（5×10 4 Da / Hz）的反质量响应。我们的研究结果为单个电气中性大分子的超高分辨率质谱提供了一种新的方法，具有单道尔顿灵敏度的前景光明。

3. 发明申请

WO2009008915A3 TUNABLE BIO-FUNCTIONALIZED NANOELECTROMECHANICAL SYSTEMS HAVING SUPERHYDROPHOBIC SURFACES FOR USE IN FLUIDS 审中-公开
公开(公告)号：WO2009008915A3
公开(公告)日：2009-01-15
申请号：PCT/US2008/003719
申请日：2008-03-20
申请人： TRUSTEES OF BOSTON UNIVERSITY , EKINCI, Kamil, L. , YAKHOT, Victor
发明人： EKINCI, Kamil, L. , YAKHOT, Victor
IPC分类号： G01N13/16 , G01N27/00 , G01N33/543
摘要： Tunable, bio-functionalized, nanoelectromechanical systems (Bio-NEMS), micromechanical resonators (MRs), nanomechanical resonators (NRs), surface acoustic wave resonators, and bulk acoustic wave resonators having superhydrophobic surfaces for use in aqueous biochemical solutions. The MRs, NRs or Bio-NEMS include a system resonator that can vibrate or oscillate at a relatively high frequency and to which an analyte molecule (s) contained in the solution • can attach or upon which small molecular- scale forces can act; a device for adjusting a relaxation time of the solution, to increase the quality (Q- factor) of the resonator inside the solution, to reduce energy dissipation into the solution; and a device for detecting a frequency shift in the resonator due to the analyte molecule (s) or applied molecular-scale forces. The resonator can include roughness elements that provide superhydrophobicity and, more particularly, gaps between adjacent asperities for repelling the aqueous solution from the surface of the device.

4. 发明申请

WO2002090246A2 AN APPARATUS AND METHOD FOR ULTRASENSITIVE NANOELECTROMECHANICAL MASS DETECTION 审中-公开
标题翻译：一种用于超声波纳米电子质量检测的装置和方法
公开(公告)号：WO2002090246A2
公开(公告)日：2002-11-14
申请号：PCT/US2002/014130
申请日：2002-05-03
申请人： CALIFORNIA INSTITUTE OF TECHNOLOGY , ROUKES, Michael, L. , EKINCI, Kamil, L.
发明人： ROUKES, Michael, L. , EKINCI, Kamil, L.
IPC分类号： B81C
CPC分类号： G01N29/036 , G01G3/16 , G01N2291/0256 , H01J49/26
摘要： The invention relates to the application of the techniques of nanoelectromechanical system (NEMS) to ultrasensitive mass detection. A pulsed flux of atoms is adsorbed onto the surface of a 32.8 MHz nanomechanical resonator within an ultrahigh vacuum environment. The mass-induced frequency shifts from these adsorbates are then used to demonstrate a mass sensitivity of ∼1.46x10 6 Daltons (Da). For resonators operating up to frequencies of 72 MHz, inverse mass responsivities as small as ∼8x10 -20 grams/Hz (5x10 4 Da/Hz) are obtained. Our results offer a new approach to ultrahigh resolution mass spectrometry of individual, electrically-neutral macromolecules with clear prospects for single Dalton sensitivity.
摘要翻译：本发明涉及纳米机电系统（NEMS）技术在超敏感质量检测中的应用。在超高真空环境中，脉冲通量的原子被吸附到32.8MHz纳米机械谐振器的表面上。然后使用这些被吸附物质的质量诱导频率变化来证明质量灵敏度为1.46×10 6达尔顿（Da）。对于工作频率为72 MHz的谐振器，可获得小至8x10 -20克/赫兹（5×10 4 Da / Hz）的反质量响应。我们的研究结果为单个电气中性大分子的超高分辨率质谱提供了一种新的方法，具有单道尔顿灵敏度的前景光明。

5. 发明申请

WO2009008915A2 TUNABLE BIO-FUNCTIONALIZED NANOELECTROMECHANICAL SYSTEMS HAVING SUPERHYDROPHOBIC SURFACES FOR USE IN FLUIDS 审中-公开
标题翻译：具有超疏水表面的可生物生物功能化纳米电子机械系统用于流体
公开(公告)号：WO2009008915A2
公开(公告)日：2009-01-15
申请号：PCT/US2008003719
申请日：2008-03-20
申请人： UNIV BOSTON , EKINCI KAMIL L , YAKHOT VICTOR
发明人： EKINCI KAMIL L , YAKHOT VICTOR
IPC分类号： G01N27/00 , G01N33/543 , G01Q30/14 , G01Q60/42 , G01Q60/52
CPC分类号： G01N29/036 , G01N2291/0256
摘要： Tunable, bio-functionalized, nanoelectromechanical systems (Bio-NEMS), micromechanical resonators (MRs), nanomechanical resonators (NRs), surface acoustic wave resonators, and bulk acoustic wave resonators having superhydrophobic surfaces for use in aqueous biochemical solutions. The MRs, NRs or Bio-NEMS include a system resonator that can vibrate or oscillate at a relatively high frequency and to which an analyte molecule (s) contained in the solution can attach or upon which small molecular- scale forces can act; a device for adjusting a relaxation time of the solution, to increase the quality (Q- factor) of the resonator inside the solution, to reduce energy dissipation into the solution; and a device for detecting a frequency shift in the resonator due to the analyte molecule (s) or applied molecular-scale forces. The resonator can include roughness elements that provide superhydrophobicity and, more particularly, gaps between adjacent asperities for repelling the aqueous solution from the surface of the device.
摘要翻译：纳米机电系统（Bio-NEMS），微机械谐振器（MR），纳米机械谐振器（NR），表面声波谐振器和具有用于水性生物化学溶液的超疏水表面的体声波谐振器。 MR，NR或Bio-NEMS包括一个系统谐振器，它可以以相对较高的频率振动或振荡，并且溶液中包含的分析物分子可以附着在该系统谐振器上，或者小分子尺度的力可以作用于其上; 用于调节溶液弛豫时间的装置，用于提高溶液内谐振器的质量（Q因数），以减少进入溶液的能量耗散; 以及用于检测由于分析物分子或施加的分子尺度力而引起的谐振器中的频移的装置。谐振器可以包括提供超疏水性的粗糙元件，并且更具体地，包括用于从装置的表面排斥水溶液的相邻粗糙体之间的间隙。

6. 发明申请

WO2004041998A3 NANOMECHANICHAL ENERGY, FORCE, AND MASS SENSORS 审中-公开
标题翻译： NANOMECHANICHAL ENERGY，FORCE和MASS SENSORS
公开(公告)号：WO2004041998A3
公开(公告)日：2005-01-20
申请号：PCT/US0314566
申请日：2003-05-07
申请人： CALIFORNIA INST OF TECHN , ROUKES MICHAEL L , EKINCI KAMIL L , YANG Y T , HUANG X M H , TANG H X , HARRINGTON DARRELL A , CASEY JEAN , ARLETT JESSICA L
发明人： ROUKES MICHAEL L , EKINCI KAMIL L , YANG Y T , HUANG X M H , TANG H X , HARRINGTON DARRELL A , CASEY JEAN , ARLETT JESSICA L
IPC分类号： B81B3/00 , G01N27/00 , G01P15/08 , G01P15/097 , H01L27/14 , H01N31/0328 , C12Q1/68 , G01B7/14 , G01G11/00 , G01N21/00 , G01N23/00 , G01N33/543 , H01P1/10
CPC分类号： B81B3/0035 , G01P15/08 , G01P15/097 , H03H9/02244 , H03H9/2457 , H03H9/2463 , H03H2009/02496 , H03H2009/02511 , H03H2009/02519 , H03H2009/02527
摘要： A doubly clamped beam (30) has an asymmetric piezoelectric layer within the beam with a gate (32) proximate to the beam within a submicron distance with a gate and beam dipole.
摘要翻译：双夹紧光束（30）在光束内具有不对称压电层，其中栅极（32）靠近与栅极和光束偶极子亚微米距离的光束。

7. 发明申请

WO2004041998A9 AN APPARATUS AND METHOD FOR TWO-DIMENSIONAL ELECTRON GAS ACTUATION AND TRANSDUCTION FOR GAS NEMS 审中-公开
标题翻译：用于二维电子气体致动和气体传播的装置和方法
公开(公告)号：WO2004041998A9
公开(公告)日：2004-07-15
申请号：PCT/US0314566
申请日：2003-05-07
申请人： CALIFORNIA INST OF TECHN , ROUKES MICHAEL L , EKINCI KAMIL L , YANG Y T , HUANG X M H , TANG H X , HARRINGTON DARRELL A , CASEY JEAN , ARLETT JESSICA L
发明人： ROUKES MICHAEL L , EKINCI KAMIL L , YANG Y T , HUANG X M H , TANG H X , HARRINGTON DARRELL A , CASEY JEAN , ARLETT JESSICA L
IPC分类号： B81B3/00 , G01N27/00 , G01P15/08 , G01P15/097 , H01L27/14 , C12N
CPC分类号： B81B3/0035 , G01P15/08 , G01P15/097 , H03H9/02244 , H03H9/2457 , H03H9/2463 , H03H2009/02496 , H03H2009/02511 , H03H2009/02519 , H03H2009/02527
摘要： A doubly clamped beam has an asymmetric piezoelectric layer within the beam with a gate proximate to the beam within a submicron distance with a gate and beam dipole. A suspended beam is formed using a Cl2/He plasma etch supplied at a flow rate ratio of 1:9 respectively into a plasma chamber. A parametric amplifier comprises a NEMS signal beam driven at resonance and a pair of pump beams driven at twice resonance to generate a modulated Lorentz force on the pump beams to perturb the spring constant of the signal beam. A bridge circuit provides two out-of-phase components of an excitation signal to a first and second NEMS beam in a first and second arm. A DC current is supplied to an AC driven NEMS device to tune the resonant frequency. An analyzer comprises a plurality of piezoresistive NEMS cantilevers with different resonant frequencies and a plurality of drive/sense elements, or an interacting plurality of beams to form an optical diffraction grating, or a plurality of strain-sensing NEMS cantilevers, each responsive to a different analyte, or a plurality of piezoresistive NEMS cantilevers with different IR absorbers.
摘要翻译：双夹紧光束在光束内具有非对称压电层，栅极和栅极和光束偶极子之间的亚微米距离内的栅极靠近光束。使用以1：9的流量比提供的Cl 2 / He等离子体蚀刻分别形成悬臂，形成等离子体室。参数放大器包括以共振驱动的NEMS信号光束和以两次谐振为驱动的一对泵浦光束，以在泵浦光束上产生调制的洛伦兹力，以扰乱信号光束的弹簧常数。桥接电路在第一和第二臂中向第一和第二NEMS波束提供激励信号的两个异相分量。直流电流被提供给AC驱动NEMS器件以调谐谐振频率。分析器包括具有不同谐振频率的多个压阻NEMS悬臂和多个驱动/感测元件或相互作用的多个光束以形成光学衍射光栅，或多个应变感测NEMS悬臂，每个响应于不同的分析物或具有不同IR吸收剂的多个压阻NEMS悬臂。

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