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1. 发明申请

US20060070883A1 Fixtureless vertical paddle electroplating cell 审中-公开
标题翻译：无夹钳垂直电镀电镀槽
公开(公告)号：US20060070883A1
公开(公告)日：2006-04-06
申请号：US10958161
申请日：2004-10-04
申请人： Lincoln Bejan , Douglas Crafts , Steve Swain , Duy Trang
发明人： Lincoln Bejan , Douglas Crafts , Steve Swain , Duy Trang
IPC分类号： C25D5/02 , C25D17/00
CPC分类号： C25D17/001 , C25D17/00 , C25D17/004 , C25D17/007 , C25D17/06
摘要： A submersible assembly for exposing respective front surfaces of different work-pieces to an electroplating bath as a partial respective electrodes thereof, while protecting opposing, rear surfaces of the work-pieces from the bath. The assembly includes a wall, having a front surface also partially forming a first electrode of the bath, and having an opening smaller in size than the perimeter of a work-piece while substantially corresponding in size to the portion of the front surface of the work-piece to be exposed to the bath. The assembly also includes a chuck mechanism for applying pressure against the rear surface of the work-piece to thereby hold the work-piece against a rear surface of the wall and create a fluid-tight seal between the rear surface of the wall and the perimeter of the front surface of the work-piece, thereby exposing the front surface of the work-piece to the bath while protecting the rear surface of the work-piece from exposure to the bath.
摘要翻译：一种用于将不同工件的各个前表面暴露于电镀浴作为其部分相应电极的潜水组件，同时保护工件的相对的后表面与熔池相对。该组件包括壁，其前表面也部分地形成浴槽的第一电极，并且具有比工件的周边更小的开口，同时基本上对应于工件前表面部分的尺寸衣服要暴露在浴缸里。组件还包括用于向工件的后表面施加压力的卡盘机构，从而将工件保持在壁的后表面上，并在壁的后表面与周边之间产生流体密封的工件的前表面，从而将工件的前表面暴露于浴中，同时保护工件的后表面免于暴露于浴中。

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