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    • 1. 发明授权
    • Wafer scrubbing brush core
    • 晶圆洗刷刷芯
    • US06543084B2
    • 2003-04-08
    • US09863781
    • 2001-05-22
    • Tanlin DickeyJulia S. SvirchevskiDonald E. AndersonMike RavkinHelmuth W. TreichelRoy Winston PascalDouglas S. Gardner
    • Tanlin DickeyJulia S. SvirchevskiDonald E. AndersonMike RavkinHelmuth W. TreichelRoy Winston PascalDouglas S. Gardner
    • A46B1106
    • H01L21/67046B08B1/04
    • A brush core and the method for making a brush core for use in substrate scrubbing are provided. The substrate can be any substrate that may need to undergo a scrubbing operation to complete a cleaning operation, etching operation, or other preparation. For instance, the substrate can be a semiconductor wafer, a disk, or any other type of work piece that will benefit from a brush core that can deliver uniform controlled amounts of fluid through the brush along an entire length of the brush core. The brush core is defined by a tubular core having a length that extends between a first end and a second end. The first end has an opening into a bore that is defined through a middle of the tubular core and extends along an inner length of the tubular core. A first plurality of holes are oriented along a plurality of first lines that extend in the direction of the length of the tubular core, and each of the first plurality of holes define paths to the bore of the tubular core. A second plurality of holes are oriented along a plurality of second lines that extend in the direction of the length of the tubular core, and each of the second plurality of holes define paths to the core of the tubular core. The plurality of first lines and the plurality of second lines alternate and the holes of the first and second plurality of holes are equally spaced apart. The holes of the second plurality of holes are offset relative to the holes of the first plurality of holes.
    • 提供了刷芯和用于制造用于衬底洗涤的刷芯的方法。 衬底可以是可能需要进行擦洗操作以完成清洁操作,蚀刻操作或其它制备的任何衬底。 例如,衬底可以是半导体晶片,盘或任何其它类型的工件,其将受益于可以沿着刷芯的整个长度输送均匀的受控量的流体通过刷子的刷芯。 刷芯由具有在第一端和第二端之间延伸的长度的管状芯限定。 第一端具有通过管状芯的中间限定并沿着管状芯的内部长度延伸的孔的开口。 第一多个孔沿着沿着管状芯的长度方向延伸的多个第一线定向,并且第一多个孔中的每一个限定到管状芯的孔的通路。 第二多个孔沿着沿着管状芯的长度方向延伸的多个第二线定向,并且第二多个孔中的每一个限定到管状芯的芯的路径。 多个第一线和多个第二线交替,并且第一和第二多个孔的孔等间隔开。 第二多个孔中的孔相对于第一多个孔的孔偏移。
    • 2. 发明授权
    • Chain saw attachment
    • 链锯附件
    • US4479303A
    • 1984-10-30
    • US458238
    • 1983-01-17
    • Douglas S. Gardner
    • Douglas S. Gardner
    • B27B17/00B27B17/02
    • B27B17/0016Y10T83/7083
    • A chain saw attachment for mounting on a portable power-driven chain saw having a saw bar and an endless saw chain disposed for movement around the saw bar, the chain saw attachment consisting of: (a) a cutting head assembly including a first wheel having a central axial aperture and slots in the perimeter of the wheel for receiving four cutting knives; a second wheel having a central axial aperture and slots in the perimeter of the wheel for receiving four cutting knives; a drive sprocket positioned between the two wheels, the drive sprocket being adapted to receive and be driven by the chain; eight cutting knives, the cutting knives being individually positioned in the slots in the perimeters of the first and second wheels and held in the slots by set screws; and three bolts for holding closely together in a unitary assembly the first and second wheels and the drive sprocket; (b) an axle extending through the central axial apertures of the first and second wheels, the ends of the axle extending normally outwardly from the center of the wheels; and, (c) two mounting arms receiving the end of the axle, the mounting arms being adapted to be bolted to the saw bar so that the axle is held in a plane perpendicular to the plane of the saw bar. The chain saw attachment may also include a safety cover located above the cutting head assembly.
    • 一种用于安装在便携式动力链锯上的链锯附件,其具有设置成围绕锯条移动的锯条和环形锯链,所述链锯附件由以下部件组成:(a)切割头组件,其包括第一轮, 中心轴向孔和轮周边的槽,用于接收四个切割刀; 具有中心轴向孔的第二轮和在轮的周边中的槽,用于容纳四个切割刀; 位于两个车轮之间的驱动链轮,所述驱动链轮适于由链条接收和驱动; 八个切割刀,切割刀单独定位在第一和第二轮的周边的槽中,并通过固定螺钉保持在槽中; 以及三个用于紧固在一起的第一和第二轮和驱动链轮组合的螺栓; (b)延伸穿过第一和第二轮的中心轴向孔的车轴,车轴的端部从轮的中心正常向外延伸; 以及(c)两个安装臂,其接收所述轴的端部,所述安装臂适于螺栓连接到所述锯条,使得所述轴保持在垂直于所述锯条的平面的平面中。 链锯附件还可以包括位于切割头组件上方的安全盖。
    • 3. 发明授权
    • Wafer scrubbing brush core
    • 晶圆洗刷刷芯
    • US06240588B1
    • 2001-06-05
    • US09454698
    • 1999-12-03
    • Tanlin DickeyJulia S. SvirchevskiDonald E. AndersonMike RavkinHelmuth W. TreichelRoy Winston PascalDouglas S. Gardner
    • Tanlin DickeyJulia S. SvirchevskiDonald E. AndersonMike RavkinHelmuth W. TreichelRoy Winston PascalDouglas S. Gardner
    • B05C108
    • H01L21/67046B08B1/04
    • A brush core and the method for making a brush core for use in substrate scrubbing are provided. The substrate can be any substrate that may need to undergo a scrubbing operation to complete a cleaning operation, etching operation, or other preparation. For instance, the substrate can be a semiconductor wafer, a disk, or any other type of work piece that will benefit from a brush core that can deliver uniform controlled amounts of fluid through the brush along an entire length of the brush core. The brush core is defined by a tubular core having a length that extends between a first end and a second end. The first end has an opening into a bore that is defined through a middle of the tubular core and extends along an inner length of the tubular core. A first plurality of holes are oriented along a plurality of first lines that extend in the direction of the length of the tubular core, and each of the first plurality of holes define paths to the bore of the tubular core. A second plurality of holes are oriented along a plurality of second lines that extend in the direction of the length of the tubular core, and each of the second plurality of holes define paths to the core of the tubular core. The plurality of first lines and the plurality of second lines alternate and the holes of the first and second plurality of holes are equally spaced apart. The holes of the second plurality of holes are offset relative to the holes of the first plurality of holes.
    • 提供了刷芯和用于制造用于衬底洗涤的刷芯的方法。 衬底可以是可能需要进行擦洗操作以完成清洁操作,蚀刻操作或其它制备的任何衬底。 例如,衬底可以是半导体晶片,盘或任何其它类型的工件,其将受益于可以沿着刷芯的整个长度输送均匀的受控量的流体通过刷子的刷芯。 刷芯由具有在第一端和第二端之间延伸的长度的管状芯限定。 第一端具有通过管状芯的中间限定并沿着管状芯的内部长度延伸的孔的开口。 第一多个孔沿着沿着管状芯的长度方向延伸的多个第一线定向,并且第一多个孔中的每一个限定到管状芯的孔的通路。 第二多个孔沿着沿着管状芯的长度方向延伸的多个第二线定向,并且第二多个孔中的每一个限定到管状芯的芯的路径。 多个第一线和多个第二线交替,并且第一和第二多个孔的孔等间隔开。 第二多个孔中的孔相对于第一多个孔的孔偏移。
    • 4. 发明授权
    • Planer attachment for chain saws
    • 链锯的刨床附件
    • US4674185A
    • 1987-06-23
    • US884073
    • 1986-07-10
    • Douglas S. Gardner
    • Douglas S. Gardner
    • B27B17/00B27C1/10B27B17/02
    • B27C1/10B27B17/0016
    • A chain saw attachment for a portable chain saw. The chain saw attachment comprises a cutter head journalled on the cutter axle and having four planing knives, two mounting arms removably securable to the chain saw bar, a chain sprocket engaging and being rotated by the saw chain, a driving sprocket rotated in response to rotation of the chain sprocket, a driven sprocket fixedly attached to the cutter head, and a planer chain engaged by the driving and driven sprockets so as to transmit power from the saw motor to the cutter head. The planing knives are arranged conventionally on the cutter head. The mounting arms the ends of the cutter axle so as to hold the cutter axle and cutter head perpendicularly to the saw bar. A planing guide is provided for use with the planer attachment. The planing guide has two side members, and forward and rearward guide members affixed to and respectively positioned forwardly and rearwardly along the side members so as to define a cutting plane determining the depth of cut of the planing knives. Vertical slots in the side members pivotably mount the planing guide on the ends of the cutter axle and allow the planing guide to be positioned vertically with respect to the cutter axle, thus providing a precise depth adjustment mechanism for maintaining a selected depth of cut.
    • 用于便携式链锯的链锯附件。 链锯附件包括钉在刀轴上的刀头,具有四个刨刀,可拆卸地固定到链锯条上的两个安装臂,与链条啮合并由锯链转动的链轮,响应旋转而旋转的驱动链轮 链轮,固定地连接到刀头的从动链轮和由驱动链轮和从动链轮接合的平面链,以便将动力从锯马达传递到切割头。 刨刀常规地设置在刀头上。 安装臂将刀轴的端部保持在垂直于锯条的状态下,以保持刀轴和刀头。 提供刨床指南,用于刨床附件。 平面导向件具有两个侧部构件,以及前后导向构件,其沿着侧构件固定并分别位于前后方向上,以便限定确定刨刀切割深度的切割平面。 侧构件中的垂直槽可将刨削导向件可枢转地安装在切割器轴的端部上,并允许刨削导向件相对于切割器轴线垂直定位,从而提供精确的深度调整机构,用于保持选定的切割深度。