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    • 5. 发明申请
    • Method for filtering nuisance defects
    • 过滤滋扰缺陷的方法
    • US20060115143A1
    • 2006-06-01
    • US11287815
    • 2005-11-28
    • Ditza Auerbach
    • Ditza Auerbach
    • G06K9/00
    • G01N21/95607G01N2021/8825G01N2021/8854G01R31/2831G06T7/0004G06T2207/30148
    • A method for inspecting a sample, consisting of receiving a definition of image attributes that are characteristic of defects, and processing an image of the sample so as to identify candidate defects on the sample. The method further includes forming distributions of values of the respective attributes from the candidate defects, and selecting a set of the candidate defects that are characterized by respective candidate attribute values that fall in one or more tails of the distributions. The selected set is presented to a human operator, and respective classifications of the candidate defects in the selected set are received from the operator. A definition of the one or more tails of the distributions is refined responsively to the classifications. The method may be used as a filter to remove false alarms, or nuisances. The method may also be used to categorize the candidate defects into two or more classes.
    • 一种用于检查样本的方法,包括接收具有缺陷特征的图像属性的定义,以及处理样本的图像,以便识别样本上的候选缺陷。 所述方法还包括从所述候选缺陷形成各个属性的值的分布,以及选择一组候选缺陷,所述候选缺陷的特征在于分布在所述分布的一个或多个尾部中的各个候选属性值。 所选择的集合被呈现给人类操作者,并且从操作者接收所选集合中候选缺陷的相应分类。 分发的一个或多个尾部的定义是响应于分类而精炼的。 该方法可以用作过滤器来消除假警报或妨扰。 该方法还可用于将候选缺陷分类为两个或更多个类别。
    • 6. 发明专利
    • Motion monitor
    • IL245185B
    • 2022-09-01
    • IL24518516
    • 2016-04-18
    • BREATHEVISION LTDDITZA AUERBACH
    • DITZA AUERBACH
    • A system for monitoring the respiratory activity of a subject, which comprises two or more signal generating elements being inertial sensors, or light emitting elements, applied to the thorax of a subject, for generating signals that are indicative of displacement of the thorax of the subject throughout a predetermined time period; a receiver for receiving the generated signals during breathing motions of the subject; and one or more computing devices in data communication with the receiver, for analyzing the breathing motions. The one or more computing devices is operable to generate, by the two or more signal generating elements, signals that are indicative of displacement of the thorax of the subject, throughout the predetermined time period; calculate the current displacements and relative phases of the signal generating elements throughout the predetermined time period; and calculate, throughout the predetermined time period, the breathing volume from the displacements and the relative phases.
    • 10. 发明申请
    • WAFER DEFECT DETECTION SYSTEM AND METHOD
    • 波形缺陷检测系统及方法
    • US20100076699A1
    • 2010-03-25
    • US12566448
    • 2009-09-24
    • Ditza Auerbach
    • Ditza Auerbach
    • G06F19/00G01N21/00
    • G01N21/9501
    • Random defects and repeaters accommodated on a wafer are detected using slice information obtained by scanning a plurality of wafer slices; analyzing defect information using a first set of filters selected to detect random defects, thereby generating a first set of defects per slice, analyzing the defect information using a second set of filters selected to detect repeaters, thereby providing a second set of defects per slice; analyzing a plurality of the second sets of defects per slice using a third set of filters selected to detect repeater families, thereby providing a set of repeaters per wafer; and optionally combining the set of repeaters per wafer with a plurality of the first sets of defects per slice, thereby generating one or more defect maps indicative of random defects and/or repeaters.
    • 使用通过扫描多个晶片切片获得的切片信息来检测容纳在晶片上的随机缺陷和中继器; 使用被选择用于检测随机缺陷的第一组滤波器来分析缺陷信息,由此产生每个切片的第一组缺陷,使用被选择用于检测中继器的第二组滤波器来分析缺陷信息,从而提供每个切片的第二组缺陷; 使用选择用于检测中继器族的第三组滤波器来分析每个切片的多个第二组缺陷,从而为每个晶片提供一组中继器; 并且可选地将每个晶片的中继器集合与每个切片的多个第一组缺陷组合,从而生成指示随机缺陷和/或中继器的一个或多个缺陷图。