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1. 发明授权

US06411426B1 Apparatus, system, and method for active compensation of aberrations in an optical system 有权
公开(公告)号：US06411426B1
公开(公告)日：2002-06-25
申请号：US09702854
申请日：2000-11-01
申请人： Michael F. Meehan , David G. Taub , Jorge S. Ivaldi
发明人： Michael F. Meehan , David G. Taub , Jorge S. Ivaldi
IPC分类号： G02B2600
CPC分类号： G03F7/70233 , G02B7/1822 , G02B7/185 , G03F7/70258
摘要： Active compensation of aberrations in an optical system involves attaching first and second force bars to a mirror. The first force bar is bifurcated to form an opening near its longitudinal midpoint. This opening defines first and second opposed surfaces. A second force bar is substantially perpendicular to the first force bar and extends through the opening of the first force bar so that a medial portion of the second force bar is disposed in the opening of the first force bar. The second force bar is connected to the first surface by at least one actuator. Longitudinal movement of the actuator causes a displacement of the mirror. A support structure is used to support the weight of the force bars and actuator. The force bars are connected to the support structure by a plurality of flexures. A control module receives information from a sensing module and controls the actuator. Other embodiments use more than two force bars and are capable of more fully compensating for any aberrations in the optical system.

2. 发明授权

US06556364B2 Apparatus, system, and method for precision positioning and alignment of a lens in an optical system 有权
标题翻译：用于光学系统中的透镜的精确定位和对准的装置，系统和方法
公开(公告)号：US06556364B2
公开(公告)日：2003-04-29
申请号：US09841108
申请日：2001-04-25
申请人： Michael F. Meehan , David G. Taub , Daniel N. Galburt
发明人： Michael F. Meehan , David G. Taub , Daniel N. Galburt
IPC分类号： G02B702
CPC分类号： G03F7/708 , G02B7/023 , G02B7/028
摘要： An apparatus, system, and method for precision positioning and alignment of a lens in an optical system, wherein a first support for coupling to the peripheral edge of the lens is connected to a concentric second support using a plurality of positioning devices. At least one positioning device is configured to move the first support in an axial direction relative to the second support. Each positioning device comprises a lever, an actuator, and a flexure. The lever has a pivot point and is mounted on the second support. The actuator is connected to the lever and used to operate the lever about its pivot point. The flexure has a first end connected to the lever between the actuator and the pivot point. A second end of the flexure is connected to the first support. A second positioning device is used to move the first support relative to the second support in a direction substantially perpendicular to the axial direction. Additional positioning devices can be used to provide for other types of motion such as, for example, rotation and tilt. In a preferred embodiment, the actuators are pneumatic bellows. A compressible gas supply module is fluidly connected to the bellows, and a control module in communication with the compressible gas supply module is used to operate the bellows. An optional sensor module is used to provide data to the control module for positioning the first support relative to the second support.
摘要翻译：一种用于光学系统中的透镜的精确定位和对准的装置，系统和方法，其中用于联接到透镜的周缘的第一支撑件使用多个定位装置连接到同心的第二支撑件。至少一个定位装置构造成相对于第二支撑件在轴向上移动第一支撑件。每个定位装置包括杠杆，致动器和挠曲件。杠杆具有枢轴点并且安装在第二支撑件上。执行器连接到杠杆并用于围绕其枢转点操作杠杆。挠曲件具有连接到致动器和枢转点之间的杠杆的第一端。挠曲件的第二端连接到第一支撑件。第二定位装置用于沿着基本上垂直于轴向方向的方向相对于第二支撑件移动第一支撑件。可以使用附加的定位装置来提供其它类型的运动，例如旋转和倾斜。在优选实施例中，致动器是气动波纹管。可压缩气体供应模块流体地连接到波纹管，并且与可压缩气体供应模块连通的控制模块用于操作波纹管。可选的传感器模块用于向控制模块提供相对于第二支撑件定位第一支撑件的数据。

3. 发明授权

US06760167B2 Apparatus, system, and method for precision positioning and alignment of a lens in an optical system 有权
标题翻译：用于光学系统中的透镜的精确定位和对准的装置，系统和方法
公开(公告)号：US06760167B2
公开(公告)日：2004-07-06
申请号：US10403027
申请日：2003-04-01
申请人： Michael F. Meehan , David G. Taub , Daniel N. Galburt
发明人： Michael F. Meehan , David G. Taub , Daniel N. Galburt
IPC分类号： G02B702
CPC分类号： G03F7/708 , G02B7/023 , G02B7/028
摘要： An apparatus, system, and method for precision positioning and alignment of a lens in an optical system. The apparatus includes a support, a lever having a pivot point, and a first actuator and a second actuator coupled to the lever and to the support. The first actuator and the second actuator are used to position the lever and thereby position the lens. The first actuator is used to make finer position adjustments of the lever than are made by the second actuator. In one embodiment, the first actuator and the second actuator are pneumatic bellows. In another embodiment, the first actuator and the second actuator are electromechanical devices. A spring can be used to apply a biasing force to the lever.
摘要翻译：用于在光学系统中精确定位和对准透镜的装置，系统和方法。该装置包括支撑件，具有枢转点的杠杆，以及联接到杠杆和支撑件的第一致动器和第二致动器。第一致动器和第二致动器用于定位杠杆并由此定位透镜。第一个致动器用于使得比由第二致动器制成的杆更精细的位置调整。在一个实施例中，第一致动器和第二致动器是气动波纹管。在另一个实施例中，第一致动器和第二致动器是机电装置。可以使用弹簧向杠杆施加偏压力。

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