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    • 1. 发明申请
    • PROTECTIVE COAT AND METHOD FOR MANUFACTURING THEREOF
    • 防护罩及其制造方法
    • US20090324844A1
    • 2009-12-31
    • US12477322
    • 2009-06-03
    • Daisaku HAOTOKenji TANAKA
    • Daisaku HAOTOKenji TANAKA
    • C23C14/14C23C16/22B05D1/36C23C14/34
    • C23C14/0676Y10T428/265
    • A method for producing a protective coat formed on the top surface of a substrate, or on the top surface of a thin film layered body formed on the substrate is disclosed, wherein the protective coat comprises silicon oxynitride in which the atomic ratio of Si/O/N is 100/X/Y (130≦X+Y≦180, 10≦X≦135, 5≦Y≦150), wherein the protective coat is formed by a sputtering method in which silicon nitride is used as a target material, an inert gas is used as a sputtering gas, and N2 is used as a reactive feed gas. The oxygen component of the obtained protective coat comprising the silicon oxynitride is incorporated into the composition of the protective coat by degradation of moisture that was present in the substrate or the thin film layered body or in the reaction apparatus.
    • 公开了一种在衬底的顶表面或形成在衬底上的薄膜层叠体的顶表面上形成的保护涂层的制造方法,其中保护涂层包括氮氧化硅,其中Si / O的原子比 / N为100 / X / Y(130 <= X + Y <= 180,10 <= X <= 135,5 <= Y <= 150),其中保护涂层是通过溅射法形成的,其中氮化硅 作为靶材使用惰性气体作为溅射气体,使用N 2作为反应性原料气体。 通过降解存在于基材或薄膜层叠体或反应装置中的水分,将得到的包含氮氧化硅的保护涂层的氧成分并入保护层的组合物中。
    • 2. 发明申请
    • Protective coat and method for manufacturing thereof
    • 保护涂层及其制造方法
    • US20050037240A1
    • 2005-02-17
    • US10813538
    • 2004-03-30
    • Daisaku HaotoKenji Tanaka
    • Daisaku HaotoKenji Tanaka
    • H05B33/04B32B9/00C23C14/06C23C14/32
    • C23C14/0676Y10T428/265
    • A method for producing a protective coat formed on the top surface of a substrate, or on the top surface of a thin film layered body formed on the substrate is disclosed, wherein the protective coat comprises silicon oxynitride in which the atomic ratio of Si/O/N is 100/X/Y (130≦X+Y≦180, 10≦X≦135, 5≦Y≦150), wherein the protective coat is formed by a sputtering method in which silicon nitride is used as a target material, an inert gas is used as a sputtering gas, and N2 is used as a reactive feed gas. The oxygen component of the obtained protective coat comprising the silicon oxynitride is incorporated into the composition of the protective coat by degradation of moisture that was present in the substrate or the thin film layered body or in the reaction apparatus.
    • 公开了一种在衬底的顶表面或形成在衬底上的薄膜层叠体的顶表面上形成的保护涂层的制造方法,其中保护涂层包括氮氧化硅,其中Si / O的原子比 / N为100 / X / Y(130 <= X + Y <= 180,10 <= X <= 135,5 <= Y <= 150),其中保护涂层是通过溅射法形成的,其中氮化硅 作为靶材使用惰性气体作为溅射气体,使用N 2作为反应性原料气体。 通过降解存在于基材或薄膜层叠体或反应装置中的水分,将得到的包含氮氧化硅的保护涂层的氧成分并入保护层的组合物中。
    • 6. 发明申请
    • Organic EL display panel
    • 有机EL显示面板
    • US20050084708A1
    • 2005-04-21
    • US10755931
    • 2004-01-13
    • Daisaku HaotoKenji TanakaMinoru Komada
    • Daisaku HaotoKenji TanakaMinoru Komada
    • G02B5/20H01L27/32H01L51/50H01L51/52H05B33/00H05B33/04H05B33/12H05B33/14
    • H01L51/5256H01L27/322Y10T428/24942
    • The main object is to provide an organic EL display panel capable of achieving the electromagnetic wave blocking effect without providing newly an electromagnetic wave blocking layer, and to provide an organic EL display panel having a barrier film with an uniform composition even in the case it is produced using an in line type device, capable of preventing the light emission deterioration of the organic EL due to the gas outputted from the base member, such as the oxygen and the moisture. The organic EL display panel comprises a base member, an organic EL element, and a barrier layer provided between the base member and the organic EL element, wherein the barrier layer comprises two kinds of laminated inorganic films, the inorganic film on the base member side out of the two kinds of the inorganic films is an inorganic oxide film having the conductivity, and the inorganic film on the organic EL element side is an inorganic film having the gas barrier property and the insulation property.
    • 主要目的是提供一种能够实现电磁波阻挡效果而不提供电磁波阻挡层的有机EL显示面板,并且提供具有均匀组成的阻挡膜的有机EL显示面板,即使在它是 使用在线型装置制造的,能够防止由于基底部件输出的气体(例如氧气和水分)引起的有机EL的发光劣化。 有机EL显示面板包括基底构件,有机EL元件和设置在基底构件和有机EL元件之间的阻挡层,其中阻挡层包括两种层叠无机膜,基底构件侧的无机膜 两种无机膜中的两种是具有导电性的无机氧化物膜,有机EL元件侧的无机膜是具有阻气性和绝缘性的无机膜。