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    • 5. 发明授权
    • Silicon based optical vias
    • 硅基光通孔
    • US07352066B2
    • 2008-04-01
    • US10675139
    • 2003-09-30
    • Russell A. BuddPunit P. ChiniwallaChirag S. Patel
    • Russell A. BuddPunit P. ChiniwallaChirag S. Patel
    • H01L23/48
    • G02B6/43H01L23/481H01L2924/0002H05K1/0274H01L2924/00
    • Method of fabricating a semiconductor die with a microlens associated therewith. More particularly, a method for fabricating a vertical channel guide optical via through a silicon substrate wherein the optical via can contain lens elements, a discrete index gradient guiding pillar and other embodiments. Also disclosed are means for transferring, coupling and or focusing light from an electronic-optical device on the top of a semiconductor substrate through the substrate to a waveguiding medium below the substrate. The high alignment accuracies afforded by standard semiconductor fabrication processes are exploited so as to obviate the need for active alignment of the optical coupling or light guiding elements.
    • 制造具有与之相关联的微透镜的半导体管芯的方法。 更具体地,涉及一种通过硅衬底制造垂直沟道引导光通孔的方法,其中光通孔可以包含透镜元件,离散折射率梯度引导柱和其它实施例。 还公开了用于将来自半导体衬底顶部的电子光学器件的光通过衬底转移,耦合和聚焦到衬底下面的波导介质的装置。 利用由标准半导体制造工艺提供的高对准精度,以便消除对光学耦合或导光元件的主动对准的需要。