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    • 2. 发明申请
    • IC CHIP
    • IC芯片
    • US20090184368A1
    • 2009-07-23
    • US12018638
    • 2008-01-23
    • Chin-Hung LiuChin-Lung ChenMing-Tsung TungWen-Kuo Li
    • Chin-Hung LiuChin-Lung ChenMing-Tsung TungWen-Kuo Li
    • H01L29/78
    • H01L27/088H01L21/823418H01L27/0207H01L29/0653H01L29/0696H01L29/086H01L29/0878H01L29/4238H01L29/7816
    • An IC chip, including a switch LDMOS device and an analog LDMOS device, is configured on a substrate having a first conductive type. Components of the two LDMOS devices respectively include two gate conductive layers configured on two first active regions of the substrate. A common source contact region having a second conductive type is configured in a second active region, which is configured between the two first active regions. An isolation structure is included for isolating the second active region and the first active regions. The isolation structure between the first active regions and the second active region has a length “A” extending along a longitudinal direction of a channel under each gate conductive layer, and each gate conductive layer on each first active region has a length “L” extending along the longitudinal direction of the channel, the two LDMOS devices have different A/L values.
    • 包括开关LDMOS器件和模拟LDMOS器件的IC芯片配置在具有第一导电类型的衬底上。 两个LDMOS器件的组件分别包括配置在衬底的两个第一有源区上的两个栅极导电层。 具有第二导电类型的公共源极接触区域被配置在第二有源区域中,第二有源区域被配置在两个第一有源区域之间。 包括用于隔离第二有源区和第一有源区的隔离结构。 第一有源区和第二有源区之间的隔离结构具有沿着每个栅极导电层下方的沟道的纵向方向延伸的长度“A”,并且每个第一有源区上的每个栅极导电层具有长度“L” 沿着通道的纵向方向,两个LDMOS器件具有不同的A / L值。
    • 3. 发明授权
    • High voltage metal-oxide-semiconductor transistor devices and method of making the same
    • 高压金属氧化物半导体晶体管器件及其制造方法
    • US07256095B2
    • 2007-08-14
    • US11468782
    • 2006-08-31
    • Chien-Ming LinMing-Tsung TungChin-Hung Liu
    • Chien-Ming LinMing-Tsung TungChin-Hung Liu
    • H01L21/336
    • H01L27/11526H01L21/823462H01L21/823468H01L27/105H01L27/1052H01L27/11546
    • A method for fabricating metal-oxide-semiconductor devices is provided. The method includes forming a gate dielectric layer on a substrate; depositing a polysilicon layer on the gate dielectric layer; forming a resist mask on the polysilicon layer; etching the polysilicon layer not masked by the resist mask, thereby forming a gate electrode; etching a thickness of the gate dielectric layer not covered by the gate electrode; stripping the resist mask; forming a salicide block resist mask covering the gate electrode and a portions of the remaining gate dielectric layer; etching away the remaining gate dielectric layer not covered by the salicide block resist mask, thereby exposing the substrate and forming a salicide block lug portions on two opposite sides of the gate electrode; and making a metal layer react with the substrate, thereby forming a salicide layer that is kept a distance “d” away from the gate electrode.
    • 提供了制造金属氧化物半导体器件的方法。 该方法包括在基板上形成栅介电层; 在所述栅极电介质层上沉积多晶硅层; 在所述多晶硅层上形成抗蚀剂掩模; 蚀刻未被抗蚀剂掩模掩蔽的多晶硅层,从而形成栅电极; 蚀刻未被栅电极覆盖的栅极电介质层的厚度; 剥离抗蚀剂掩模; 形成覆盖所述栅极电极和所述剩余栅极介电层的一部分的自对准硅化物阻挡掩模; 蚀刻除了未被所述自对准硅化物阻挡掩模掩盖的剩余栅极电介质层,从而暴露所述基板并在所述栅电极的两个相对侧上形成自对准硅嵌块凸块部分; 并且使金属层与基板反应,从而形成与栅电极保持距离“d”的自对准硅化物层。
    • 4. 发明申请
    • SEMICONDUCTOR DEVICE HAVING CAPACITOR AND FABRICATING METHOD THEREOF
    • 具有电容器的半导体器件及其制造方法
    • US20070141776A1
    • 2007-06-21
    • US11306162
    • 2005-12-19
    • Jung-Ching ChenChin-Hung LiuChien-Ming LinMing-Tsung Tung
    • Jung-Ching ChenChin-Hung LiuChien-Ming LinMing-Tsung Tung
    • H01L21/8244
    • H01L28/40H01L27/1085
    • A semiconductor device having a capacitor is provided. The semiconductor device includes a substrate, a capacitor and a metal-oxide-semiconductor (MOS) transistor. The MOS transistor is located in a MOS transistor region of the substrate, and the MOS transistor region has a first bottom diffusion region. The capacitor is located in a capacitor region of the substrate and consisted of a second bottom diffusion region located in the substrate, a first dielectric layer located over the second bottom diffusion region, a bottom conductive layer located over the first dielectric layer, a second dielectric layer located over the bottom conductive layer, and a top conductive layer located over the second dielectric layer. The first bottom diffusion region and the second bottom diffusion region are different conductive type.
    • 提供具有电容器的半导体器件。 半导体器件包括衬底,电容器和金属氧化物半导体(MOS)晶体管。 MOS晶体管位于衬底的MOS晶体管区域中,并且MOS晶体管区域具有第一底部扩散区域。 电容器位于衬底的电容器区域中,由位于衬底中的第二底部扩散区域,位于第二底部扩散区域上方的第一电介质层,位于第一电介质层上方的底部导电层,第二电介质层 位于所述底部导电层上方的层,以及位于所述第二介电层上方的顶部导电层。 第一底部扩散区域和第二底部扩散区域是不同的导电类型。
    • 6. 发明申请
    • METHOD OF FABRICATING A SEMICONDUCTOR DEVICE HAVING A CAPACITOR
    • 制造具有电容器的半导体器件的方法
    • US20070254417A1
    • 2007-11-01
    • US11777294
    • 2007-07-13
    • Jung-Ching ChenChin-Hung LiuChien-Ming LinMing-Tsung Tung
    • Jung-Ching ChenChin-Hung LiuChien-Ming LinMing-Tsung Tung
    • H01L21/8242H01L21/20
    • H01L28/40H01L27/1085
    • A semiconductor device having a capacitor is provided. The semiconductor device includes a substrate, a capacitor and a metal-oxide-semiconductor (MOS) transistor. The MOS transistor is located in a MOS transistor region of the substrate, and the MOS transistor region has a first bottom diffusion region. The capacitor is located in a capacitor region of the substrate and consisted of a second bottom diffusion region located in the substrate, a first dielectric layer located over the second bottom diffusion region, a bottom conductive layer located over the first dielectric layer, a second dielectric layer located over the bottom conductive layer, and a top conductive layer located over the second dielectric layer. The first bottom diffusion region and the second bottom diffusion region are different conductive type.
    • 提供具有电容器的半导体器件。 半导体器件包括衬底,电容器和金属氧化物半导体(MOS)晶体管。 MOS晶体管位于衬底的MOS晶体管区域中,并且MOS晶体管区域具有第一底部扩散区域。 电容器位于衬底的电容器区域中,由位于衬底中的第二底部扩散区域,位于第二底部扩散区域上方的第一电介质层,位于第一电介质层上方的底部导电层,第二电介质层 位于所述底部导电层上方的层,以及位于所述第二介电层上方的顶部导电层。 第一底部扩散区域和第二底部扩散区域是不同的导电类型。
    • 8. 发明授权
    • High voltage metal-oxide-semiconductor transistor devices and method of making the same
    • 高压金属氧化物半导体晶体管器件及其制造方法
    • US07118954B1
    • 2006-10-10
    • US10908784
    • 2005-05-26
    • Chien-Ming LinMing-Tsung TungChin-Hung Liu
    • Chien-Ming LinMing-Tsung TungChin-Hung Liu
    • H01L21/8238
    • H01L27/11526H01L21/823462H01L21/823468H01L27/105H01L27/1052H01L27/11546
    • A method for fabricating metal-oxide-semiconductor devices is provided. The method includes forming a gate dielectric layer on a substrate; depositing a polysilicon layer on the gate dielectric layer; forming a resist mask on the polysilicon layer; etching the polysilicon layer not masked by the resist mask, thereby forming a gate electrode; etching a thickness of the gate dielectric layer not covered by the gate electrode; stripping the resist mask; forming a salicide block resist mask covering the gate electrode and a portions of the remaining gate dielectric layer; etching away the remaining gate dielectric layer not covered by the salicide block resist mask, thereby exposing the substrate and forming a salicide block lug portions on two opposite sides of the gate electrode; and making a metal layer react with the substrate, thereby forming a salicide layer that is kept a distance “d” away from the gate electrode.
    • 提供了制造金属氧化物半导体器件的方法。 该方法包括在基板上形成栅介电层; 在所述栅极电介质层上沉积多晶硅层; 在所述多晶硅层上形成抗蚀剂掩模; 蚀刻未被抗蚀剂掩模掩蔽的多晶硅层,从而形成栅电极; 蚀刻未被栅电极覆盖的栅极电介质层的厚度; 剥离抗蚀剂掩模; 形成覆盖所述栅极电极和所述剩余栅极介电层的一部分的自对准硅化物阻挡掩模; 蚀刻除了未被所述自对准硅化物阻挡掩模掩盖的剩余栅极电介质层,从而暴露所述基板并在所述栅电极的两个相对侧上形成自对准硅嵌块凸块部分; 并且使金属层与基板反应,从而形成与栅电极保持距离“d”的自对准硅化物层。
    • 9. 发明授权
    • IC chip
    • IC芯片
    • US07560774B1
    • 2009-07-14
    • US12018638
    • 2008-01-23
    • Chin-Hung LiuChin-Lung ChenMing-Tsung TungWen-Kuo Li
    • Chin-Hung LiuChin-Lung ChenMing-Tsung TungWen-Kuo Li
    • H01L29/76
    • H01L27/088H01L21/823418H01L27/0207H01L29/0653H01L29/0696H01L29/086H01L29/0878H01L29/4238H01L29/7816
    • An IC chip, including a switch LDMOS device and an analog LDMOS device, is configured on a substrate having a first conductive type. Components of the two LDMOS devices respectively include two gate conductive layers configured on two first active regions of the substrate. A common source contact region having a second conductive type is configured in a second active region, which is configured between the two first active regions. An isolation structure is included for isolating the second active region and the first active regions. The isolation structure between the first active regions and the second active region has a length “A” extending along a longitudinal direction of a channel under each gate conductive layer, and each gate conductive layer on each first active region has a length “L” extending along the longitudinal direction of the channel, the two LDMOS devices have different A/L values.
    • 包括开关LDMOS器件和模拟LDMOS器件的IC芯片配置在具有第一导电类型的衬底上。 两个LDMOS器件的组件分别包括配置在衬底的两个第一有源区上的两个栅极导电层。 具有第二导电类型的公共源极接触区域被配置在第二有源区域中,第二有源区域被配置在两个第一有源区域之间。 包括用于隔离第二有源区和第一有源区的隔离结构。 第一有源区和第二有源区之间的隔离结构具有沿着每个栅极导电层下方的沟道的纵向方向延伸的长度“A”,并且每个第一有源区上的每个栅极导电层具有长度“L” 沿着通道的纵向方向,两个LDMOS器件具有不同的A / L值。