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    • 5. 发明授权
    • Method for identifying a wafer serial number
    • 识别晶圆序列号的方法
    • US08498471B2
    • 2013-07-30
    • US12757044
    • 2010-04-09
    • Wei-Chin ChenChien-Ming Li
    • Wei-Chin ChenChien-Ming Li
    • G06K9/00
    • H01L21/67294
    • A method of identifying a wafer serial number is provided. First, a wafer having a wafer serial number is provided. Second, an identification procedure is carried out to identify the wafer serial number by means of multiple identification recipes thereby obtaining multiple digit results which correspond to the multiple identification recipes and a specific digit in the wafer serial number. The multiple digit results include at least two of a successful result and an unsuccessful result. Then, the wafer serial number is determined in accordance with the multiple digit results.
    • 提供了一种识别晶片序列号的方法。 首先,提供具有晶片序列号的晶片。 其次,进行识别程序以通过多个识别配方识别晶片序列号,从而获得对应于多个识别配方的多个数字结果和晶片序列号中的特定数字。 多位数字结果包括成功结果和不成功结果中的至少两个。 然后,根据多位数字结果确定晶圆序列号。
    • 10. 发明授权
    • Self-adjustable and cross-chamber transmission system
    • 自调节和横舱传动系统
    • US07669498B2
    • 2010-03-02
    • US11200062
    • 2005-08-10
    • Geeng-Jen SheuTuan-Jen YuChung-Chung LiuChien-Ming LiHsin-Lun Wu
    • Geeng-Jen SheuTuan-Jen YuChung-Chung LiuChien-Ming LiHsin-Lun Wu
    • F16H1/04
    • C23C14/56C23C14/568Y10T74/19623Y10T74/19633Y10T74/1967
    • A transmission system includes two or more independent chambers, in each of which shafts with gears thereon are provided for rolling in synchronous motion, and a carrier with adjustable gear devices on a bottom thereof. Each of the adjustable gear devices has a base, a movable rack member, vertical springs and horizontal springs. The movable rack member is connected to the base to be moved along a horizontal direction. The vertical springs are provided between the base and the carrier to urge the adjustable gear device along a vertical direction. The movable rack member has a rack portion to be meshed with the gears of the shafts, such that the carrier is moved by the gears to cross the chambers. With the movement of the movable rack member both along the horizontal and the vertical direction, the carrier is transported in a smooth, synchronous, skid-proof, stable and real-time motion during the crossing chamber process.
    • 传动系统包括两个或更多个独立的腔室,每个腔室中的齿轮上设有用于同步运动的滚动件,以及在其底部具有可调齿轮装置的载体。 每个可调齿轮装置具有基座,可动齿条构件,垂直弹簧和水平弹簧。 可移动的齿条构件连接到基座以沿水平方向移动。 垂直弹簧设置在基座和托架之间,以沿垂直方向推动可调齿轮装置。 可移动齿条构件具有与轴的齿轮啮合的齿条部分,使得托架通过齿轮移动以跨过腔室。 随着可移动齿条构件沿着水平和垂直方向的移动,载体在交叉腔室过程中以平滑,同步,防滑,稳定和实时的运动传送。