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    • 2. 发明授权
    • Asymmetric virtual ground p-channel flash cell with latid n-type pocket
and method of fabrication therefor
    • 非对称虚拟地面p沟道闪存单元,带有n型口袋及其制造方法
    • US5822242A
    • 1998-10-13
    • US812107
    • 1997-03-05
    • Chia-Shing Chen
    • Chia-Shing Chen
    • G11C16/34H01L21/8247H01L27/115H01L29/788G11C13/00
    • H01L27/11521G11C16/3418G11C16/3427H01L27/115H01L29/7885
    • A memory cell having an asymmetric source and drain connection to virtual ground bit-lines providing an abrupt junction suitable for band-to-band hot electron generation and a gradual junction suitable for Fowler-Nordheim tunneling on each side of the cells. A nonvolatile semiconductor memory device comprising row and column arrangement of the cells in which adjacent columns of cells share a single virtual ground bit line. The method for manufacturing a memory cell having asymmetric source and drain regions and comprising the steps of: (1) forming a semiconductor substrate having a first conductivity type; (3) forming a dielectric covering a semiconductor substrate; (3) forming a first and second column of floating gate cores on the dielectric; (4) implanting a first dopant along a first dopant strip, the first dopant strip aligned between the first and second column and having a second conductivity type opposite the first conductivity type; (5) implanting a second dopant in a second dopant strip aligned with the first diffusion and extending below the second column, the second dopant having an enhancement of the first conductivity type; and (6) completing formation of control gate dielectric and control gates. The presence of asymmetric source and drain diffusions formed thereby improve the isolation between adjacent memory cells and minimizes the disturb problem.
    • 具有与虚拟接地位线的不对称源极和漏极连接的存储单元,其提供适用于带 - 带热电子产生的突变结,以及适用于细胞每侧的Fowler-Nordheim隧道的逐渐连接。 一种非易失性半导体存储器件,包括单元的行和列排列,其中相邻列的单元共享单个虚拟接地位线。 一种制造具有不对称源区和漏区的存储单元的方法,包括以下步骤:(1)形成具有第一导电类型的半导体衬底; (3)形成覆盖半导体衬底的电介质; (3)在所述电介质上形成第一和第二列浮栅; (4)沿着第一掺杂剂条移植第一掺杂剂,所述第一掺杂剂条排列在所述第一和第二列之间并且具有与所述第一导电类型相反的第二导电类型; (5)在与所述第一扩散层对准的第二掺杂物条带中注入第二掺杂剂并在所述第二柱的下方延伸,所述第二掺杂物具有所述第一导电类型的增强; (6)完成控制栅介质和控制栅的形成。 形成的不对称源极和漏极扩散的存在从而改善了相邻存储器单元之间的隔离并使干扰问题最小化。
    • 4. 发明授权
    • Automatic programming algorithm for page mode flash memory with variable
programming pulse height and pulse width
    • 用于页面模式闪存的自动编程算法,具有可变编程脉冲高度和脉冲宽度
    • US5751637A
    • 1998-05-12
    • US605003
    • 1996-03-12
    • Chia Shing ChenChun-Hsiung HungRay-Lin WanTeruhiko Kamei
    • Chia Shing ChenChun-Hsiung HungRay-Lin WanTeruhiko Kamei
    • G11C16/02G11C16/10G11C13/00
    • G11C16/10
    • A method for programming a flash memory array which insures fast programming to substantially all of the cells in the array, without over-programming, based on providing a pattern of program retry pulses which have respective pulse widths and pulse heights which vary according to a pattern. The pattern includes a combination of both increasing pulse widths and increasing pulse heights. The pattern includes a first phase which completes in a specified amount of time including a predetermined number of retries so that substantially all of the cells in the array are programmed within the first phase. A second phase of the patter involves a sequence of higher energy pulses addressed to programming the slowest cells in the array. When used in a page program array, in which individual cells which are programmed fast do not receive subsequent retry pulses, a very fast and reliable programming scheme is achieved.
    • PCT No.PCT / US95 / 07376 Sec。 371日期:1996年3月12日 102(e)日期1995年6月7日PCT 1996年3月12日提交一种用于对闪速存储器阵列进行编程的方法,其基于提供程序模式确保快速编程到阵列中的基本上所有的阵列中的所有单元,而不需要过度编程 具有根据图案变化的相应脉冲宽度和脉冲高度的重试脉冲。 该图案包括增加的脉冲宽度和增加的脉冲高度的组合。 该模式包括第一阶段,其以指定的时间量完成,包括预定次数的重试,使得阵列中的基本上所有的单元在第一阶段内被编程。 图案的第二阶段涉及一系列更高能量的脉冲,寻址到对阵列中最慢的单元进行编程。 当在页面程序阵列中使用时,其中被编程为快速的各个单元不接收后续重试脉冲,实现了非常快速和可靠的编程方案。
    • 6. 发明授权
    • Method for forming asymmetric flash EEPROM with a pocket to focus
electron injections
    • 用口形成不对称快速EEPROM以聚焦电子注入的方法
    • US6130134A
    • 2000-10-10
    • US134205
    • 1998-08-14
    • Chia-Shing Chen
    • Chia-Shing Chen
    • H01L21/265H01L21/336H01L29/788
    • H01L29/66825H01L29/7885H01L21/26586
    • A memory cell having an asymmetric source and drain connection to virtual ground bit-lines. A main diffusion, adjacent the drain and displaced from the source, allows Fowler-Nordheim (FN) tunneling erasure on the drain side of the floating gate. A pocket diffusion, between the main diffusion and the source, concentrates the electric field and thereby enhances the efficiency of programming by electron injection on the source side of the floating gate. A nonvolatile semiconductor memory device comprising row and column arrangement of the cells, in which adjacent columns of cells share a single virtual ground bit line. The method for manufacturing a memory cell having asymmetric source and drain regions and comprising the steps of: (1) forming a semiconductor substrate having a first conductivity type; (2) forming a dielectric covering a semiconductor substrate; (3) forming a first and second column of floating gates on the dielectric; (4) implanting a first dopant along a first dopant strip, the first dopant strip aligned adjacent the first column and displaced from the second column and having a second conductivity type opposite the first conductivity type; (5) implanting a second dopant in a second dopant strip, aligned with the first dopant strip and extending below the second column, the second dopant having an enhancement of the first conductivity type; and (6) completing formation of control gate dielectric and control gates. The manufacturing method of the present invention results in a cell, which increases floating gate memory array density and programming speed while reducing power consumption and the likelihood of a disturb condition.
    • 具有与虚拟接地位线不对称的源极和漏极连接的存储单元。 在漏极附近并从源极偏移的主扩散允许在浮动栅极的漏极侧上的Fowler-Nordheim(FN)隧穿擦除。 在主扩散和源之间的口袋扩散集中了电场,从而通过在浮动栅极的源极侧上的电子注入来增强编程的效率。 一种非易失性半导体存储器件,包括单元的行和列布置,其中相邻列的单元共享单个虚拟地址位线。 一种制造具有不对称源区和漏区的存储单元的方法,包括以下步骤:(1)形成具有第一导电类型的半导体衬底; (2)形成覆盖半导体衬底的电介质; (3)在电介质上形成浮置栅极的第一和第二列; (4)沿着第一掺杂剂条移植第一掺杂剂,所述第一掺杂剂条与所述第一列相邻排列并且从所述第二列移位并具有与所述第一导电类型相反的第二导电类型; (5)在与第一掺杂剂条对准并在第二列下方延伸的第二掺杂剂条中注入第二掺杂剂,第二掺杂剂具有第一导电类型的增强; (6)完成控制栅介质和控制栅的形成。 本发明的制造方法产生一个单元,其增加浮动栅极存储器阵列密度和编程速度,同时降低功耗和干扰条件的可能性。
    • 7. 发明授权
    • Asymmetric flash EEPROM with a pocket to focus electron injection and a
manufacturing method therefor
    • 具有口袋的不对称闪存EEPROM,用于聚焦电子注入及其制造方法
    • US5896314A
    • 1999-04-20
    • US812104
    • 1997-03-05
    • Chia-Shing Chen
    • Chia-Shing Chen
    • H01L21/265H01L21/336H01L29/788G11C13/00
    • H01L29/66825H01L29/7885H01L21/26586
    • A memory cell having an asymmetric source and drain connection to virtual ground bit-lines. A main diffusion, adjacent the drain and displaced from the source, allows Fowler-Nordheim (FN) tunneling erasure on the drain side of the floating gate. A pocket diffusion, between the main diffusion and the source, concentrates the electric field and thereby enhances the efficiency of programming by electron injection on the source side of the floating gate. A nonvolatile semiconductor memory device comprising row and column arrangement of the cells, in which adjacent columns of cells share a single virtual ground bit line. The method for manufacturing a memory cell having asymmetric source and drain regions and comprising the steps of: (1) forming a semiconductor substrate having a first conductivity type; (2) forming a dielectric covering a semiconductor substrate; (3) forming a first and second column of floating pates on the dielectric; (4) implanting a first dopant along a first dopant strip, the first dopant strip aligned adjacent the first column and displaced from the second column and having a second conductivity type opposite the first conductivity type; (5) implanting a second dopant in a second dopant strip, aligned with the first dopant strip and extending below the second column, the second dopant having an enhancement of the first conductivity type; and (6) completing formation of control gate dielectric and control gates. The manufacturing method of the present invention results in a cell, which increases floating gate memory array density and programming speed while reducing power consumption and the likelihood of a disturb condition.
    • 具有与虚拟接地位线不对称的源极和漏极连接的存储单元。 在漏极附近并从源极偏移的主扩散允许在浮动栅极的漏极侧上的Fowler-Nordheim(FN)隧穿擦除。 在主扩散和源之间的口袋扩散集中了电场,从而通过在浮动栅极的源极侧上的电子注入来增强编程的效率。 一种非易失性半导体存储器件,包括单元的行和列布置,其中相邻列的单元共享单个虚拟地址位线。 一种制造具有不对称源区和漏区的存储单元的方法,包括以下步骤:(1)形成具有第一导电类型的半导体衬底; (2)形成覆盖半导体衬底的电介质; (3)在所述电介质上形成第一和第二列浮动柱; (4)沿着第一掺杂剂条移植第一掺杂剂,所述第一掺杂剂条与所述第一列相邻排列并且从所述第二列移位并具有与所述第一导电类型相反的第二导电类型; (5)在与第一掺杂剂条对准并在第二列下方延伸的第二掺杂剂条中注入第二掺杂剂,第二掺杂剂具有第一导电类型的增强; (6)完成控制栅介质和控制栅的形成。 本发明的制造方法产生一个单元,其增加浮动栅极存储器阵列密度和编程速度,同时降低功耗和干扰条件的可能性。
    • 8. 发明授权
    • Method for fabricating asymmetric virtual ground P-channel flash cell
    • 不对称虚拟地面P沟道闪存单元的制造方法
    • US06211011B1
    • 2001-04-03
    • US09119350
    • 1998-07-20
    • Chia-Shing Chen
    • Chia-Shing Chen
    • H01L21336
    • H01L27/11521G11C16/3418G11C16/3427H01L27/115H01L29/7885
    • A memory cell having an asymmetric source and drain connection to virtual ground bit-lines providing an abrupt junction suitable for band-to-band hot electron generation and a gradual junction suitable for Fowler-Nordheim tunneling on each side of the cells. A nonvolatile semiconductor memory device comprising row and column arrangement of the cells in which adjacent columns of cells share a single virtual ground bit line. The method for manufacturing a memory cell having asymmetric source and drain regions and comprising the steps of: (1) forming a semiconductor substrate having a first conductivity type; (3) forming a dielectric covering a semiconductor substrate; (3) forming a first and second column of floating gate cores on the dielectric; (4) implanting a first dopant along a first dopant strip, the first dopant strip aligned between the first and second column and having a second conductivity type opposite the first conductivity type; (5) implanting a second dopant in a second dopant strip aligned with the first diffusion and extending below the second column, the second dopant having an enhancement of the first conductivity type; and (6) completing formation of control gate dielectric and control gates. The presence of asymmetric source and drain diffusions formed thereby improve the isolation between adjacent memory cells and minimizes the disturb problem.
    • 具有与虚拟接地位线的不对称源极和漏极连接的存储单元,其提供适用于带 - 带热电子产生的突变结,以及适用于细胞每侧的Fowler-Nordheim隧道的逐渐连接。 一种非易失性半导体存储器件,包括单元的行和列排列,其中相邻列的单元共享单个虚拟接地位线。 一种制造具有不对称源区和漏区的存储单元的方法,包括以下步骤:(1)形成具有第一导电类型的半导体衬底; (3)形成覆盖半导体衬底的电介质; (3)在所述电介质上形成第一和第二列浮栅; (4)沿着第一掺杂剂条移植第一掺杂剂,所述第一掺杂剂条排列在所述第一和第二列之间并且具有与所述第一导电类型相反的第二导电类型; (5)在与所述第一扩散层对准的第二掺杂物条带中注入第二掺杂剂并在所述第二柱的下方延伸,所述第二掺杂物具有所述第一导电类型的增强; (6)完成控制栅介质和控制栅的形成。 形成的不对称源极和漏极扩散的存在从而改善了相邻存储器单元之间的隔离并使干扰问题最小化。