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    • 3. 发明授权
    • Thick, low-stress films, and coated substrates formed therefrom
    • 厚的低应力膜和由其形成的涂覆的基底
    • US5061574A
    • 1991-10-29
    • US443454
    • 1989-11-28
    • Charles H. Henager, Jr.Robert W. Knoll
    • Charles H. Henager, Jr.Robert W. Knoll
    • C23C14/06H01L21/48
    • C23C14/0676H01L21/481Y10T428/12528Y10T428/1259Y10T428/265
    • Stress-induced deformation, and the damage resulting therefrom, increases with film thickness. The overcoming of excessive stress by the use of the film material of the present invention, permits the formation of thick films that are necessary for certain of the above described applications. The most likely use for the subject film materials, other than their specialized views as an optical film, is for microelectronic packaging of components on silicon substrates.In general, the subject Si-Al-O-N films have excellent adherence to the underlying substrate, a high degree of hardness and durability, and are excellent insulators. Prior art elevated temperature deposition processes cannot meet the microelectronic packaging temperature formation constraints. The process of the present invention is conducted under non-elevated temperature conditions, typically 500# C. or less.
    • 应力引起的变形以及由此产生的损伤随着膜厚而增加。 通过使用本发明的薄膜材料来克服过大的应力,允许形成对于上述某些应用所必需的厚膜。 除了作为光学膜的专门视图之外,主题薄膜材料的最有可能的用途是用于在硅衬底上的元件的微电子封装。 通常,本发明的Si-Al-O-N膜对下面的基底具有优异的粘附性,高硬度和耐久性,并且是优异的绝缘体。 现有技术的高温沉积工艺不能满足微电子封装温度形成的限制。 本发明的方法在非高温条件下进行,通常为500℃以下。
    • 6. 发明授权
    • Process for producing dispersed particulate composite materials
    • 生产分散颗粒复合材料的方法
    • US5462902A
    • 1995-10-31
    • US150453
    • 1993-11-09
    • Charles H. Henager, Jr.John P. Hirth
    • Charles H. Henager, Jr.John P. Hirth
    • C04B35/58C04B35/65C04B35/573
    • C04B35/58092C04B35/645C04B35/652
    • This invention is directed to a process for forming noninterwoven dispersed particulate composite products. In one case a composite multi-layer film product comprises a substantially noninterwoven multi-layer film having a plurality of discrete layers. This noninterwoven film comprises at least one discrete layer of a first material and at least one discrete layer of a second material. In another case the first and second materials are blended together with each other. In either case, the first material comprises a metalloid and the second material a metal compound. At least one component of a first material in one discrete layer undergoes a solid state displacement reaction with at least one component of a second material thereby producing the requisite noninterwoven composite film product. Preferably, the first material comprises silicon, the second material comprises Mo.sub.2 C, the third material comprises SiC and the fourth material comprises MoSi.sub.2.
    • 本发明涉及一种形成非交织的分散颗粒复合产品的方法。 在一种情况下,复合多层膜产品包括具有多个离散层的基本上非编织的多层膜。 该非编织膜包括至少一个第一材料的离散层和至少一个第二材料的离散层。 在另一种情况下,第一和第二材料彼此混合在一起。 在任一情况下,第一材料包括准金属,第二材料包括金属化合物。 在一个离散层中的第一材料的至少一个组分与第二材料的至少一种组分进行固态置换反应,从而产生必需的非相互缠绕的复合膜产品。 优选地,第一材料包括硅,第二材料包括Mo 2 C,第三材料包括SiC,第四材料包括MoSi 2。